Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

HRX-OM-R016

Accessory Weight12 kg 47 46 1 For water -cooled type. 2 Use the product in conditions where freezing will not occur.

Cylinder with Lock Series CLS

Locked condition (when air is evacuated) Unlocked condition (when air is supplied) 3 Cylinder with Lock Double Acting: Single Rod Series CLS Construction Description Material Note Parts list Description Material Note Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 No. 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55

LEY-OM007

17 12 13 12 13 23 23 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 20 20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10 30 11 31 12 32 13 33 14 34 15 35 NBR 16 17 18 101 19 POM 101 20 / 16 LEY-L016 LEY-F016 LEY-D016 16 LE-D-2-1 25 LEY-L025 LEY-F025 LEY-D025 25 LE-D-2-2 32 LEY-L032 LEY-F032 LEY-D032 32 LE-D-2-3 1 2 C /P.46 7.4

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

13 10.4 21.8 33 36.4 63.1 61.7 54.6 53.2 13.3 24.5 28.5 9.3 19.2 55 AS321FSG-G02-08 8 13.2 22.7 33.9 14.2 AS321FSG-G02-10 10 15.9 26.7 37.9 35.7 15.6 57 AS321FSG-G02-12 12 18.5 29.7 40.9 34.5 17 59 AS321FSG-G03-06 6 1/4 21 16.6 45 AS321FSG-G03-08 8 13.2 22.7 33.9 14.2 46 AS321FSG-G03-10 10 15.9 26.7 37.9 28 15.6 47 AS321FSG-G03-12 12 18.5 29.7 40.9 26.8 17 49 AS421FSG-G04-10 10 1/2 27 15.9

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

CG5-S

Refer to pages 15 through 17 for auto switch related items. Auto switches with M8 and M12 connectors are available as standard product. See page 17 for other options besides lead wire.

Table of Contents

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

CE

79.5 83 D-A79W 2 10.5 14.5 36.5 41.5 39 Surge absorber 45 51.5 59.5 83.5 86.5 90 D-F7BA, F7W, F7F, J79W OUT Blue [Black] 8.5 17.5 21.5 43.5 48.5 46 41.5 48 56 80 83 86.5 D-F7WV Choke coil CD-P12 5 14 18 40 45 42.5 OUT (+) Brown [Red] 39.5 46 54 78 81 40.5 D-A9 Zener diode 3 12 16 38 43 81.5 OUT() Blue [Black] 46 52.5 60.5 84.5 87.5 91 D-F7NT 9.5 18.5 22.5 44.5 49.5 47 43.5 50 58 82 85 88.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

CRB2/CRBU2/CRB1

Applicable shaft type: W (mm) (mm) Long-shaft side Size Size Y X Y X Y = X = 10 10 1 to 8 3 to 14 X = Y= 1 to 12 3 to 10 Body (B) Body (A) 15 15 1.5 to 9 4 to 18 1.5 to 15.5 4 to 11.5 Body (A) Body (B) 20 20 1.5 to 10 4.5 to 20 1.5 to 17 4.5 to 13 Short-shaft side 30 30 2 to 13 5 to 22 2 to 19 5 to 16 40 6.5 to 17 Symbol: A23 Symbol: A24 The long shaft can be further shortened by machining

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

Vacuum System Peripherals:

17 Date issued: Photo copying this page is recommended.

15

13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 12.5 4.4 10 5 34 33 6 28 2.5 6 45 6.5 4.6 6 CY1SG15-Z 7.5 9.5 16.6 38 6.5 52 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 11.5 5.4 12 5 40 39 11 28 2 6 60 5.8 8 5.5 CY1F CY1SG20-Z 10 9.5 21.6 44 8.5 62 36 37.5 24 19 20 M6 x 1 M6 x 1 10.5 22 17 5.4 16 2 5.5 8 46 45 16 70 5.8 28 5.5 10 CY1SG25-Z M6 x 1 M6 x 1 10 11 26.4 52 8.5 70 40.5 40.5 27.5 21.5

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-

Basic Type/Direct Mount Type

45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11