Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !1 Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 15-9-94 4 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Construction Elbow type Meter-out type Universal type Meter-out type AS3201F-02 AS3301F-02 i w o !6 !5 r t y !2 !3 !0 q u !

VQ5000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3-Rc 1/2 1(P), 4(A), 2(B) port M5 ground screw SMC 26.5 16 4(A), 2(B) port 31.5 37 41 50 98 G1/2 Electrical entry PE X P R1 R2 18.4 18 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

Secondary Batteries

/Cap (Resin part only) RBC C 08 Applicable model 08 10 14 20 27 90-RBC2015 90-RBC2725 90-RBC0805, 0806 90-RBC1006, 1007 90-RBC1411, 1412 Cap Cap cannot be mounted for basic type. Please place an order with cap type from the beginning.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

depth 4 (Mounting screw) VQ7 ( ): M5 x 0.8 : With light/surge voltage suppressor EVS M5 01 M5 01 Conduit terminal: VF1120-T-M5 01 DIN terminal: VF1120-DVF1120-YVFN Applicable cable O.D. 6 to 8 Applicable cable O.D.

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard. Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C3: One-touch fitting ass'y for 3 2n-C3, C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

16) 12 14 18 25 30 32 40 50 24 M5 x 0.8 69(77) 20 25 32 40 50 63 80 100 23 Up to 200 201 to 350 C76 30 19.5 16.5 10(12) 40 31 M5 x 0.8 depth 7.5 5.5 M10 x 1.25 11 M6 x 0.75 111(119) 16 15(16) 29 M5 x 0.8 69(77) 25 Up to 300 301 to 400 25 19.5 20 10(12) 40 38 M5 x 0.8 depth 8 5.5 M10 x 1.25 10(11) M8 x 1.0 113(121) 16 15(16) 35.5 Rc 1/8 71(79) 28.5 Up to 300 301 to 450 20 C85 27 26 10(13)

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.