High Vacuum Angle Valve, XL Series O After a few seconds at 10-6Torr 41
XLGV 17 Series XLG, XLGV High Vacuum Angle Valve Specifications Model XLG(V)-50 XLG(V)-63 XLG(V)-80 XLG(V)-16 XLG(V)-25 XLG(V)-40 Valve type Double acting (dual operation), pressurize to open/close Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLG Operating temperature C 5 to 50C (41 to 122F) XLGV Atmospheric
Up to 750 30 116 1/4 55 189 114 89 170 25 37.5 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE GF J K MM N P Q H Z 32 M10 x 1.25 6 154 13 6.5 18.3 23 47 224 234.5 34 10.5 1/8 6.5 13 37 27 M6 x 1.0 88.5 40 M14 x 1.5 6 161 13 8 19.5 23 51 235 246 39.5 11 1/4 9 16.5 41.5 27 M6 x 1.0 96.5 50 M18 x 1.5 7 183 17 9 22.4 30 58 271 286 47 15 1/4 10.5 20 47.5 31.5 M8 x 1.25 111.2 63 M18
/4 55 189 114 89 170 37.5 25 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE GF J K MM N P Q H Z 32 M10 x 1.25 6 154 13 6.5 18.3 23 47 224 234.5 10.5 34 1/8 13 6.5 37 27 M6 x 1.0 88.5 40 M14 x 1.5 6 161 13 8 19.5 23 51 235 246 1/4 11 39.5 16.5 9 27 41.5 M6 x 1.0 96.5 50 M18 x 1.5 7 183 17 9 22.4 30 58 271 286 15 47 1/4 10.5 20 31.5 47.5 M8 x 1.25 111.2 63 M18 x 1.5 7 197 17 8.5
150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700 M10 X 1.25 6 8 37.5 5.5
COM. 41 Red Red COM.
+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on
+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on
CNP1CNP2CNP3 . 3-11 3.4 . 3-13 3.5 (). 3-15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 .
38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 4 4 4 17 10.4 19.7 D1 10 A L2 8 D2 H Connection threads 6 10 10 18.5 12.8 21.8 (R) 10 (R) 8 26 2 x Applicable tubing 18 15.2 20.5 25.3 12 M L1 M L1 10 41 18.5 29 23 28.4 17 17 12 58 20.9 46 24 30.4 D1 22 D2 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.
Fittings & Tubing Air Cylinders Rotary Actuators 14.5 13.3 13.5 54.1 43.3 35 5.8 19 19 2 x 3.2 M5 x 0.8 (External pilot port) 17 17 (For mounting) 3 A B 22 SMC A B B A PE X EB EA P Manual override 41 2.8 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port)
OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.
35 Up to 1000 24 244 37 10.5 6 4 106 16 37.5 17 M16 x 1.5 8 M8 x 1.25 15.5 G 1/4 5 20 24 40 Up to 1000 32 259 37 12 9 4 121 16 45 17 M16 x 1.5 8 M8 x 1.25 16.5 G 3/8 5 20 24 45 Up to 1000 32 300 46 14 11.5 4 128 17 45 22 M20 x 1.5 10 M10 x 1.5 19 G 3/8 25 30 45 Up to 1000 40 320 51 15 17 4 138 17 50 22 M20 x 1.5 10 M10 x 1.5 19 G 1/2 25 32 55 Up to 1000 40 398 65 15 17 6 160 20 58 27 M27
17 56 62 81 91 15 17 29 29 3.5 3.5 3.5 4.5 25 27 39 39 41 46 54 64 50 56 72 82 12 16 20 25 37 38 44 50 CY1 16 M5 X 0.8 18 167 167 M6 X 1.0 MY1 26 M6 X 1.0 MGPM(Slide Bearing)/Dimensions A, DB, E MGPL(Ball Bushing Bearing)/Dimensions A, DB, E A E DB A E DB Bore (mm) 100st< 50st< 100st 50st< 100st Bore (mm) 100st< 30st< 100st 30st< 100st 50st 50st 100st< 30st 30st 100st< 12 16 42 46 60.5 64.5
Bore size (mm) Bolt Tightening torque (Nm) Width across flats 125 M12 x 1.75 x 25l 10 30.1 160, 200 M16 x 2 x 30l 14 99 M20 x 2.5 x 35l 17 193.5 250 Foot Others M20 x 2.5 x 30l 17 6-12-42
-1 Individual EXH spacer SJ7000-17-2 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 R R1 R R1 Manifold Gasket DXT199-21-10 Manifold Gasket DXT199-21-11 L Blanking Plate Assembly SYJ7000-21-1A Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7
Bracket B240 NAFM2000 B340 NAFM3000 B440 NAFM4000 With auto drain Model A Port size B C D E F G H J K L M P B Type NAFM2000 40 97.5 11 40 17 30 27 22 5.4 8.4 40 2.3 40 120.5 Differential pressure 1/8 1/4 NAFM3000 1/4 3/6 53 132.5 14 53 16 41 40 23 6.5 8 53 2.3 56 158 Differential pressure NAFM4000 1/4 3/8 1/2 70 168.5 18 70 17 50 54 26 8.5 10.5 70 2.3 73 194 Float type NAFM4000-06 3/4 75
Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-
6 17 !8 19 Rod seal NBR Component part numbers: !4, !5, !6, !8. Cushion seal Urethane 17 and 19 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.