\/o 5r.0 44.0 N/A ftlA N/A 35.019.23 kg 127 .0 51,0 57.2 0ElUl4.0lUlx2(M(S) 50 15. 90.5 l?
B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80
kg kg kg Allowable load weight coefficient Allowable moment coefficient Workpiece mounting coefficient 8-5-15 16 Series MXQ Dimensions: MXQ6 Basic style For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.
effective area Q=11S P(P2+1.033).kg/h Equation in the domain of sonic flow Calculation by Cv factor Q=98.9Cv(p1+1.033).kg/h Calculation by effective area Q=5.51S(P1+1.033).kg/h 4.2-38 VND Flow Characteristics Water/VND 2 to 7 should be N.O. to suppress water hammer.
How to Calculate Flow/Saturated Steam qEquation in the domain of subsonic flow P1+0.1013=(1 to 2)(P2+0.1013) Calculation by Cv factor Q=197.8Cv gP(P2+0.1013)kg/h Calculation by effective area Q=11.0S gP(P2+0.1013)kg/h wEquation in the domain of sonic flow P1+0.1013 2(P2+0.1013) Calculation by Cv factor Q=98.9Cv(P1+ 0.1013) kg/h Calculation by effective area Q=5.5S(P1+0.1013) kg/h The
B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80
MJ 0.2774 Weight Power g 0.0353 oz W 0.7376 kg 2.2046 lb kW 1.341 1.3559 N. m 0.1383 kg. m t t . l b tt. lb psi psi psi psi psi psi psi mm3 cm3 (cc) Area in2 645.16 in'?
Ek: Kinetic energy of load [J] m: Load mass [kg] u: Piston speed [m/s] 3. The piston speed will exceed the average speed immediately before locking. To determine the piston speed for the purpose of obtaining the kinetic energy of load, use 1.2 times the average speed as a guide. 4. The relationship between the speed and the load is indicated in the diagram below.
/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).
Unit: mm D-F7V D-J79C D-F7 D-J79 D-A7/D-A80 D-A73C/D-A80C D-A7H D-A80H D-F7WV D-F7W/D-J79W D-F7BAL D-F7NTL/D-F7LF Number of auto switches D-A79W 1 pc. 5 5 10 15 2 pcs. 5 10 15 20 2.3-101 Series CQ2 Option Weights Mounting Bolt for CQ2 Unit: kg Bore size (mm) 125 140 160 Special bolt for through-hole of CQ2B is available as option. How to Order: Specify the required bolts.
Applicable model 3/8, 1/2 1.50 (1.65) 1.65 (1.80) 1.80 (1.95) Weight (kg) (With bracket) BM65 IDG60S/75S/100S With cap bolts and spring washers Note 1) No freezing. Note 2) ANR indicates the flow rate converted to the value at 20C under the atmospheric pressure and the state of relative humidity 65%.
Deflection X mm CXSW32 40 Extended rod CXSW25 20 CXSWl20 4 CXSWM (Slide bearing) CXSWL (Ball bushing bearing) Bore size (mm) 6 to 32 10 CXSW15 3.5 0.03 mm CXSWM (Slide bearing) 32 CXSWL (Ball bushing bearing) CXSW10 3 4 Maximum load weight W (kg) 25 Load weight W (kg) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside
moving parts (Example) MGGLB32-500-HN Moving parts basic weight . 1.74 Additional weight for stroke 0.203/50 st Stroke 500 st 1.74 + 0.203 x 500/50 = 3.77 kg Refer to pages 8-21-10 to 16 for the allowable end load and deflection, as well as the allowable eccentric load. 8-21-28 28 Series MGG Guide Cylinder With End Lock Construction 20 to 100/MGG Manual release (Lock type) !
Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.
32 x 2)1 40% 6.6 Increased by Improved by up to times Allowable lateral load Non-rotating accuracy 0.06 0.4 kg 0.1 0.06 kg CXSM10 50 mm stroke (10 x 2)1 JMGPM12 50 mm stroke (10 x 2)1 CXSM32 25 mm stroke (32 x 2)1 JMGPM40 25 mm stroke (32 x 2)1 + m 1 Both cylinders used in the comparison have almost the same piston area.
KK KK130 DM KDM Tube KB KR Body KA KQG2 KG Stainless steel Metal exists in nature as ore (like oxide or sulfide). This means that oxide or sulfide is more stable than pure metal. Accordingly, metallic material chemically oxidizes (metallic constituent becomes ion and melts out). It corrodes in the natural environment.
operating temperature Cv Leak rate Connections Supply pressure effect Installation Internal volume Mass 4500 psig (30.7 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 1 x 10-10 Pam3/sec NPT female, Compression 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.4 lbs (1.09 kg
The product weight decreases by 1 kg for Option-Z. 9.1 Specifications HRR Series 9-2 HRX-OM-X071 Chapter 9 Documents 9.1.2 HRR050-W-Table 9-2 Specifications [HRR050-W-20/40-] Model HRR050-W-20HRR050-W-40Cooling method Water-Cooled refrigerated type Refrigerant R410A(HFC) Quantity of refrigerant kg 0.59 0.62 Control method PID control Ambient temperature andhumidity and altitude 12 Temperature