Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

LJ1H

Cable entry direction Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

MHZ2/MHZJ2

Nil (Example) F9N 3m . L (Example) F9NL Note 1) Use caution regarding hysteresis in the 2 color indicator type.

MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

CY1

Nil (Example) FY59A 3m . L Y59AL 5m .

Applicable Auto Switch Model

(Tolerance 30%) Dimensions Bore size (mm) Z Auto switch part number H H' HW C T T' D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 40 50 63 80 100 57 58 60.5 64 67 69 77 91 107 121 44 52 64 78 92 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 6.5 6.5 7.5 9.5 9.5 M5 X 0.8 X 16 M5 X 0.8 X 20 M5 X 0.8 X 25 5.3-38 Solid State Switch/Direct Mounting

XL

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

High Vacuum Angle Valve, XL Series

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

Modular F.R.L. Unit

Note 2) For M5 and NPT thread type.

Modular F.R.L. Unit

Note 3) For M5 and NPT thread types.

Modular F.R.L. Unit

How to Order 30 03 IS1000E Option Pressure switch with piping adapter X201 X202 X207 X215 X250 X251 Lead wire length: 3m Regulating pressure range: 0.1 to 0.6MPa MPa/PSI Dual scale Lead wire length: 3m; Regulating pressure range: 0.1 to 0.6MPa Body size Opposite-side mounting (Left-side mounting type) 20 30 40 For AC20 For AC25, AC30 For AC40-02 to 04 Lead wire length: 3m; Opposite-side mounting

LEC-OM07605CN

b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 available Without cable Cable length 1.5m Cable length 3m Cable length 5m U0 U1 U2 U3 U side D0 D1 D2 D3 D side 2 to 12 stations 2 to 12 stations Cable length 0.6m Cable length 1.5m Cable length 3m U0 U1 U2 D0 D1 D2 Kit F Kit F Kit L Kit L Type of connection T1 S Kit (Individual terminal

VQ5000

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 available Without cable Cable length 1.5m Cable length 3m Cable length 5m U0 U1 U2 U3 U side D0 D1 D2 D3 D side 2 to 12 stations 2 to 12 stations Cable length 0.6m Cable length 1.5m Cable length 3m U0 U1 U2 D0 D1 D2 Kit F Kit F Kit L Kit L Type of connection T1 S Kit (Individual terminal

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 Series Assembly part no.

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

Rotary Table/

x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25