IR1000/2000/3000

4 Rc(PT) 1/8 Port size Rc(PT) 1/4, 3/8, 1/2 Rc(PT) 1/4, 3/8, 1/2 Rc(PT) 1/4 Pressure gauge port Rc(PT) 1/8 (2 locations) Ambient and fluid temperature 5 to 60C (with no freezing) 0.64 0.30 0.14 0.71 0.35 Weight (kg) Note 1) With the condition of no flow on the output side.

3 Port Solenoid Valve Series SYJ300/500/700

Features 1 Series SYJ300/500/700 Manifold Variations A port size With one-touch fitting Valve series A port location P, R ports size M3 M5 1/8 Applicable tubing O.D. 6 4 N3 N7 N9 8 Note 1) M5 x 0.8 SYJ300 Top Note 2) Body ported Base mounted 1/8 SYJ500 Top 1/8 Note 1) 1/8 SYJ700 Top 1/4 Note 1) M5 x 0.8 SYJ300 Side 1/8 Bottom SYJ500 1/8 Side Note 1) 1/8 Bottom SYJ700 1/4 Side 1/4 Note 1)

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

CG1-OM0227

) JIS B 8433-1: --1 *2) 1. 2. 3. 1. 2. 3. 4

Air cylinder

No.CM2*-OM0064P-A PRODUCT NAME Air cylinder MODEL / Series / Product Number Contents Safety Instructions P2 1. Specifications P4 1-1. Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Control of direction 2-8. Auto switches 3. Maintenance P18 3-1.

CM2x-OM0230Q

CM2-*Z 3-1. a) b GR-S-010(10g )GR-S-020(20g ) P18, 4. (XC85,X446)P19 c) 4. 17 - 3-2. 3-2-1. 1 2 3 3-2-2. 1 2 3 4 5 6 7) 8 1) 2) 33. 331. 4. 20 25 32 40 CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS 1 3-3-2. 1 2 3 4 18 - 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> <> 4-2. PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

VFS4000-OMY0001

equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Operation Maintenance Warning Caution 1. Do not rotate the cover. Rotating the cover when mounting the cylinder or screwing pipe fittings into the ports may cause damage from the cover joint section. 1. Grease packs Order grease for maintenance using the order number below. Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Integrated clevis type Note 1) Single clevis type Note 1) Bore size (mm) Seal kit no. Kit components Double clevis type Note 3) Note 1) Front trunnion type (1 pc.) Note 2) 20 25 CM2X20-PS Rear trunnion type (1 pc.) Note 2) Rod seal: 1 pc. CM2X25-PS 32 40 Boss-cut basic type (1 pc.) CM2X32-PS Grease pack (10g): 1 pc. Boss-cut flange type (1 pc.)

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Piston seal: 1 pc. 12 16 20 25 CQSX12-PS Rod seal: 1 pc. CQSX16-PS Tube gasket: 1 pc. CQSX20-PS Grease pack (10g): 1 pc. CQSX25-PS 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4

The VDW series is a compact, direct operated, 2/3 port solenoid valve for water, air and vacuum. The use of a unique magnetic material reduces the operating resistance of moving parts, improving service life, wear and corrosion resistance. 2 port solenoid valve for manifold, Compact direct operated, Body material: brass, stainless steel, Valve type: N.C. for manifold, Seal material: NBR,

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: G, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: -, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: F (G)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)]

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread

Super Compact Direct Acting 2/3 Port Solenoid Valve Series S070

standard) 0.1W(with power saving circuit) 0.1W(with power saving circuit) Sonic conductance:C 0.042 [dm3/(s bar)] Sonic conductance:C 0.042 [dm3/(s bar)] Single unit Manifold Base mounted Body ported Base mounted Body ported Bar stock type Stacking type Meeting miniaturisation needs of analysers, medical equipment and semiconductor manufacturing equipment Series S070 Extremely light weight 5g