3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

Hydraulic

YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 16 20 M24 x 1.5 20 C B-series +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 30 20 24 M30 x 1.5 31.5 dH10 L L +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75

MHZ2/MHZJ2

Max. screw-in depth l mm Maximum torque Nm Model Bolts M3 x 0.5 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 5 8 10 12 0.69 2.1 4.3 7.3 Maximum torque Nm Max. screw-in depth l mm Model Bolts M4 x 0.7 Without clearance M5 x 0.8 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 0.88 2.1 4.3 7.3 6 8 10 12 Impact load M6 x 1 Using the body through hole Hole depth mm Bore mm 11H9 17H9 21H9

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

REA/REB

REBH15 REBH25 REBHT25 REBHT32 Model M6 x 1.0 M8 x 1.25 Screw size M5 x 0.8 Bolt dimensions l-9 l-12 l-8 Dimension t Tightening torque 13.2 Nm 2.65 4.4 Square nut l t 70 Series REBH Model Selection 1 Max.

CQS

(mm) Stroke range (mm) A 29 29 35 39 OB H Q I RA K RB L T M N OA E D 6 8 10 12 C B 22 22 26 29 A 34 34 45 49 B 27 27 36 39 12 16 20 25 25 29 36 40 6 8 7 12 5 to 30 5 to 30 5 to 50 5 to 50 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 7.5 7.5 9 11 32 38 47 52 7 7 10 10 5 6 8 10 4 4 7 7 3.5 3.5 4.5 5 0.5 0.5 1 1 15.5 20 25.5 28 3.5 3.5 5.4 5.4 Note 1)

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

) (L3) L2 L1 3 2 1 16.5 Stations 5.5 D side 2-M5 X 0.8 External pilot port (Only external pilot style (R)) 2.3 21.6 35 53 5.5 300 (Lead wire) 39.5 7.8 (C3, C4, C6) (M5) Cover diameter 1.6 Cross section 0.34mm2 42.5 (11) R P 1 3 15 8 2-Rc(PT)1/8 R(EXH) port 16.3 13.4 2-M5 X 0.8 PE port 41.2 46.5 2-Rc(PT)1/8 P(SUP) port L plug connector (L) M plug connector (M) 66 71 300 (Lead wire) 55.5 56.5

Air Cylinder

V(1 pc.) V(1 pc.) V V L Axial foot V(1 pc.) V(1 pc.)Note 2) V(1 pc.) V(1 pc.)Note 2) V(2 pcs.) V V F Rod flange V(1 pc.) V(1 pc.) V(1 pc.) V(1 pc.) V V G Head flange V(1 pc.) V(1 pc.) V(1 pc.) V(1 pc.) V V C Single clevis V(1 pc.) Note 3) V(1 pc.) V(1 pc.) V(Max. 3 pcs.) Note 3) V V D Double clevis V(1 pc.) Note 3) V(1 pc.) V(1 pc.) V(Max. 3 pcs.) Note 3) V(1 pc.)

CY1

Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data A . 100 20 30 40 50 10 L type Usable range 5 10 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 1 1 2 1 3 1 4 1 5 Load Work piece Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1B10 CY1B40 500 L type H type Fn Allowable driving force Fn (N)

42

1/2" 1(P), 4 (A), 2 (B) port VQ 4/5 VQ 4/5 M5 x 0.8 ground screw 4(A), 2(B) port SMC VQC 1/2 VQC 4/5 37 41 50 98 PE X 18 31.5 VQZ 26.5 P R1 R2 16 27.5 41 41 27.5 SQ 1/8" External pilot port 1/8" PE. port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port VFS VFR 2-position double: VQ525 0 1-l G H 3-position closed center: VQ535 0 1-l G H 3-position exhaust center: VQ545 0 1-l G H 3-position pressure

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Type S41 / Side Ported (Single solenoid coil is located on same side as the A, B port.) [ ] for AC L type plug connector (L) M type plug connector (M) SS5YJ3-S41Station -M5,N3T 1 91.7(GZ:93.1) [95.1] 33.5 3.5 78.8(GZ:80.2) [82.2] 79.4 [82] 1 34.5 15.5 54.4(GZ:55.1) [56.1] 55.4(GZ:56.1) [57.1] A A A A A R 33.5 61.2 [62.5] P 70.8 B B B B B R 92.3 [94.9] (Lead wire length) 98.6 111.6 (Pitch)

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

Flow Control Equipment

Meter-out Control Series ASN2 Speed Exhaust Controller Series ASV ASS100 ASS300 ASS500 ASS600 / 1 4, / 3 8 / 1 8 ASN2-M5 ASN2-01 ASN2-02 ASN2-03 ASN2-04 ASV120F-M3 ASV220F-M5 ASV310F ASV410F ASV510F / 1 8 M5 M3 M5 4.6-1 / 1 2, / 3 4 / 3 4, 4.2-1 4.4-1 / 1 4 / 3 8 / 1 2 / 1 8, / 1 4 1 / 1 8, / 1 4, / 3 8 Meter-in Control ASS110 ASS310 / 1 4, / 3 8 / 1 8 / 1 4, / 3 8, / 1 2 4.6-1 Quick Exhaust

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8