Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Table of Contents

P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 5 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P, R A, B SQ Direct electrical entry type Enables single-wire solenoid valve-PLC operation VQ0 L VQ4 C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

ZR

) M5 PE port Pilot valve exhaust port M5 PD port Vacuum release pressure port Manual override Non-locking push type Ejector unit Manual override Non-locking push type EXH 109 PE PE PD PD 80.8 PD PD PS PS PV PV 52 13.5 50 42 PD PS 35.5 31.5 33 28 16.5 17 PV PV PV M5 PD port Release flow rate adjustment needle Vacuum release pressure port M5 PS port 2-Rc 1/2 EXH port Common exhaust port 2-M5

KR

(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For monifold mounting) (Light/surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) M8 connector (W0): SYJ3120-W0-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

•

"t l: '-~ ~ o li , >-1 '" 2-95.5 .

MHZ2/MHZJ2

40 60 0.4MPa 0.3MPa 40 0.3MPa 20 0.25MPa 20 0.25MPa 0 20 40 60 80 100 0 20 40 60 80 100120 Gripping point L mm Gripping point L mm L 35 Standard Type/With Dust Cover Series MHZ 2 Confirmation of gripping point: Series MHZ 2 Step 2 External gripping Internal gripping External gripping MHZ 2-10 MHZ 2-10 MHZ2/Standard 60 50 50 Pressure 0.2MPa Pressure 0.2MPa 40 H Overhang H mm Overhang H mm

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

51 VQZ1000 2 to 20 stations l l Rc(PT) 1/8 lll In-line SY C4(4) C6(6) C8(8) Rc(PT)1/8 2 stations: 193 Addition per/ station: 54 VV5QZ25 VQZ2 50 VQZ2 51 VQZ2000 lll l l Rc(PT) 1/4 2 to 20 stations SYJ In-line SX 2 stations: 398 Addition per/ station: 102 1(P)port Rc(PT)3/8 35(R)port Rc(PT)1/4 C6(6) C8(8) C10(10) Rc(PT)1/4 l l VV5QZ35 VQZ3 50 VQZ3 51 VQZ3000 2 to 20 stations VK In-line lll

4/5 Port Air Operated Valve Series SYJA3000

override (30) 24.5 (37) 23 11.5 20 3 3.5 4 11 2-2.6 (For mounting) (18) 1.8 (Bleed port) With fiflter (80 mesh) (Piping port) 1/8 46.5 19.5 (25) 33.5 21.5 (2.3) (46.5) 8.5 M5 x 0.8 (Piping port) 6 6 15 17 17 R1 P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

override 34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For manifold mounting) (Light/Surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) M8 connector (WO): SYJ3120-WO-M3 (-F) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5

Hydraulic

5.5 through 4-9 counter bore depth 7 36 36 8 20 2-Rc 1/8 (port size) 20 57 + Stroke 5 5 + Stroke 67 + 2 strokes C X L C X L + Stroke 47 32 to 100 2-P (port size) Approx.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG

MG

M5 x 0.8 Nil Slide bearing Ball bushing bearing M L NPT Rc N G TF Copper-free For bore size 16, M5 x 0.8 is only available.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3.5 11 5 B A B A 10.6 19 10 M5 x 0.8 (A, B port) Manual override 2-2.6 (For monifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5

CQS

Basic style (Through-hole/Both ends tapped common): CQSK/CDQSK 12 16 Auto switch Minimum lead wire bending radius 10 2 x 2-OB counterbore H thread effective depth C 2-M5 x 0.8 2 x 2-OA effective depth RA Note) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-N through

REA/REB

Model REAH25 REAHT25 REATH32 REAH15 REAH20 REAH10 Screw size M5 x 0.8 l-8 M8 x 1.25 M6 x 1.0 l-9 M4 x 0.7 l-7 Bolt dimensions l-12 Dimension t Max.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(g) Applicable valve model Applicable stations Series Base model Port size Port location 1(P), 3(R) 2(A) C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 2 stations: 83 Addition per/station: 19 2 to 20 stations VV3QZ12VQZ115 Rc 1/8 VQZ100 Top V100 2 stations: 68 Addition per/station: 20 C4 (For 4) C6 (For 6) M5 (M5 thread) 2 to 20 stations VV3QZ22VQZ200 Rc 1/8 Top VQZ22 SY SYJ C6 (For 6