MXS Series Air Slide Table

RB1411 70 47 12 78.3 19 12 M6 X 12 27 13 25.5 M6 X 25 MXS25 MXS-BT25 RB1412 80 54 15 79.3 19 12 M8 X 16 33 17 25.5 M8 X 25 Mounted to body MXS-BT 8, 12, 16 MXS-BT 20, 25 WIDTH ACROSS FLATS E D WIDTH ACROSS FLATS E B C B D WIDTH ACROSS FLATS F C A A P P Mounted to table HOW TO ORDER H Q MXS 12 BS I J Bore size (stroke mm) 8 12 16 20 25 10,20,30,40,50,75 10,20,30,40,50,75,100 10,20,30,40,50,75,100,125

Brake mechanism added

A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Keyway dimensions b l AU Model Port size Rc D (g6) DD (h9) W BA BB SA SC SU SB SD BU SE CU F DU H EU J K MU S U A B C M8 x 1.25 depth 8 156 (189) 0 0.030 62 98 17 17 8.5 13.5 45 M16 x 1.5 48 33 12 15 25 5 25 46 14 11 34 9 15 2.5 14 36 12 5 1/8 CDRA1BSU50 175 (213.5) 199 (243) 259 (325) M10 x 1.5 depth 12 0 0.030 6 76 117 19.5 20 10 14.5 54.5 M20 x 1.5 60 33 12 19 30 30 57 21 13 34 11

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Keyway dimensions b l AU Model Port size Rc D (g6) DD (h9) W BA BB SA SC SU SB SD BU SE CU F DU H EU J K MU S U A B C M8 x 1.25 depth 8 156 (189) 0 0.030 62 98 17 17 8.5 13.5 45 M16 x 1.5 48 33 12 15 25 5 25 46 14 11 34 9 15 2.5 14 36 12 5 1/8 CDRA1BSU50 175 (213.5) 199 (243) 259 (325) M10 x 1.5 depth 12 0 0.030 6 76 117 19.5 20 10 14.5 54.5 M20 x 1.5 60 33 12 19 30 30 57 21 13 34 11

RSQ

D-F7WV D-F79F D-A7H D-A80H D-F7 D-J79 D-F7W D-F7BAL D-J79W D-F79F D-F7NTL DD-M9 D-M9V D-F7V D-A7 D-A80 D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-A73C D-A80C D-A79W D-A9 D-A9V Bore size (mm) D-A7 D-A80 D-F7WV D-F9WV D-F9BAL -X D-F9BAL D-F9WV D-F9W 20Data B A B A B A B A B A B A U U U U U U U U U 12 16 20 32 40 50 9 4 13 8 12 7 17 19.5 16.5 11.5 11.5 12 12 9 9 22.5 23.5 29.5 26 29 25 17.5 9.5 18

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

NCA1

Auto switch Stroke B Dual operation Double rod Mounting Bore size CS1 Stroke A C76 Cushion Both ends N W/o cushions H Head end R Rod end Dimensions C85 C95 CP95 P + stroke A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM KK A AA B C D DD E EA EE G

NCA1

Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Bore size (in) 1.50 2, 2.50 3.25, 4 How to Order NC D A1 B 150 0400 A XC9 Bore size Auto switch Adjustment range A: 0 to 1" B: 0 to 2" Mounting Adjustable StrokeReturn Stroke Dimensions P + Stroke LF + Stroke (2) EE (NPTF) 4-DD D across

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

CL

12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 14 14 14 15 12 12 12 13 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 31 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod Construction With rubber bumper: CLG1BN CL CL1 MLGC CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

New

$P b 0.14 bar.

V

A M E T E R S 20, 25, 32 Model A B C D E F G H I Y ZPR10D 10 12 15 24 32.9 49 60 83 94 6 ZPR16D 16 18 16 25 33.9 50 61 84 95 7 A P P L I C A B L E T U B E Applicable Tube O.D.

JXCx-OMU0004

LE-CP-1 L B B-2 6 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* Shield B 15m* Vcc B-4 12 C 20m* GND A-4 13 A B-5 7 * * * A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 14 5.5 B1 A1 17.7 5 6 2 1 18 B6 A6 6.3 16 15 L 11 30.7 63 No.JXC-OMU0004-A 11.3 [5m ] A B-1 2 A A-1 1 L B B-2 6 LE-CP-1 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13

Rubber seal 5 Port Solenoid Valve Series SYJ7000

12 12 12 25.5 25.5 25.5 25.5 Refer to the page 91 for dimentions with connector cable. 55 Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 63 107.4 [111.8] B A With interface regulator 27 A B Manual override R1 R2 P 8.5 34 2-4.3 (For mounting) 128.8 [131] 1/4, 1/8 (P, A, B port) (Light/surge voltage suppressor

VQ7-6/7-8

Manual override R1 R2 P A B 14 11 9 50 62 38 50 62 A 12 Prewired connector (M12) (L approx. 500) R1 P R2 A B 13 13 2-Rc1/8 2-6.5 Mounting hole Indicator light 42.5 42.5 3-Rc1/4, 3/8 (P, A, B) 34 34 Bottom port drawing SMC (ports A, B) 93 12 Y 25 (port X) 5 3 37 22 14 25 14 1 25 9 25 2-Rc3/8 Ports R1, R2 Rc1/4, 3/8 Port P Rc1/8 Port Y (PE) 2-Rc1/4, 3/8 Ports A, B Rc1/8 Port X (PE) 2 position

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Formula

MK

-www.stevenengineering.com D-M9 D-F9W W D-M9V D-F9WV Hs Hs D-F9BAL Hs Hs D-A9 D-A9V D-M9, D-F9W D-M9V, D-F9WV Auto switch model W 19.5 21.5 B 4.5 4 A 11.5 12 W 5.5 6 B 4.5 4 A 11.5 12 Hs 17 19 B 0 0 A 7.5 8 W 1.5 (4) 2 (4.5) B 0 0 A 7.5 8 Symbol Bore size (mm) 12 16 D-F9BAL Auto switch model W 14.5 15 Hs 17 19 A 10.5 11 B 3.5 3 Symbol Bore size (mm) 12 16 ( ): Denotes the values of D-A93

VM

Description VH300 244120 244120-1 VH400 244219 244219-1 VH600 Resin e Slide ring 24408-1 24077 JIS B 2401 P5 JIS B 2401 P42 24403 24416-3 240359 JIS B 2401 P10 JIS B 2401 G55 24413 2407102A (2407114A) 24425-6 240359 JIS B 2401 P10 JIS B 2401 P71 24413 2407102A (2407114A) 240417 24047 JIS B 2401 P15 JIS B 2401 G120 r t y u i Slide ring spring Check ball spring O-ring O-ring Handle head Piano

JXCx-OMT0061CN

C 20m* Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 * A (A-5) 6 B (B-6) * 9 B (A-6) 8 3 (14.2) (2 ) 2 1 ( (14) (1 ) 5.5) B1 A1 5 6 (17.7) (3 ) 2 1 (18) B6 A6 ( 6.3) 16 15 (11) (30.7) 66 - 15.3 [5m ] (1) (2 ) ---A B-1 2 L A A-1 1 B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6)