HRX-OM-R016

AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2. AL.01 Contact output 3 function Sets output signal function of contact output 3.

HRX-OM-R005

AL.01 Contact output 3 function ALM Contact output 3 operation B Selected for contact output 3 AL.01 5.2 Function HRS Series 5-6 HRX-OM-R005 Chapter 5 Display and setting of various functions 5.3 Main screen 5.3.1 Main screen Displays the current temperature and the set temperature of the circulating fluid.

HRX-OM-S004

Setting of the selected alarm Setting range: AL.01 to AL.51 to 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

Ozone Resistant

220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000

AS-FPQ/AS-FPG

P-80 (D)

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

Ionizer

Nil P NPN specification PNP specification Cable full length 1 m 2 m Symbol 01 02 Individual Special Order (Please contact an SMC sales representative.) Note 1) 11 m or longer power supply cables are not CE Marking-compliant. Note 2) Use standard power supply cables for 3 m and 10 m lengths.

VER2000/4000

OFF state { A R1 (Exhaust air) P B (Supply air) F1 < F2 condition: See figure q. ON state { { Immediately after turning on F1 > F2: See figure e.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc. P tight screw (4 x 14), 2 pcs. (3)Intermediate support bracket EX600-ZMB1: For direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

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KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 6. Do not use the cylinder with its body fixed. Be sure to secure both head covers (or end covers in case of CY1R) before using the cylinder.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Port size Panel nut 01 02 1/8 1/4 Option combination numbers Panel nut is also included with B.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Manifold 10 SS5Q13 08 FD2 D CE-compliant Clean series Nil Q CE-compliant Stations 1 station 01 1(P), 3(R) port size 24 Note) 24 stations Nil 1(P), 3(R) port 8 One-touch fittings 1(P), 3(R) port 5/16" One-touch fittings Note) The maximum number of stations depends on the type of electrical entries. 00T Option Nil 02 to 24 Note

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 8-31-1.) Note 2) (For intermediate stops, refer to page 8-15-74.)