Vacuum System Peripherals:

Light/Surge voltage suppressor 5 24 VDC 12 VDC Nil Without light/surge voltage suppressor 6 6 VDC V 5 VDC S 3 VDC R S With surge voltage suppressor With light/surge voltage suppressor Z AC specifications (50/60 HZ) With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) ZX Pilot type R 1 100 VAC 200 VAC 110 VAC (115 V) 220 VAC (230 V) 4 Nil R Internal

Table of Contents

Fixed 4% F .S.

Table of Contents

r r u u u Drain Drain Drain Component Parts Material No.

0.4

(For F/P/S kits) VVQ1000-2A-1VQC 1/2 Option Option Electrical entry Nil R S Common EXH External pilot Direct EXH outlet with built-in silencer FU25 F P L S Nil R Note 1) S Note 1) Common EXH External pilot Direct EXH outlet with built-in silencer For F kit top entry 25 pins For F kit For P kit For L kit For S kit VQC 4/5 Note) The !4s fitting assembly is included.

LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

0.4

Enter EX250-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

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10 siations) D side (2 to 10 statiom) Both sides (2 to 20 stations) Supply/Exhaust block assembly specilication Inlernal oilot sDecilication Iniernal piloLtsuiltn silencer Extenal pilol specitication External oiloUBuilfin silencel 'When the blill n s en@r type F lsed keep the dhaust port ' o r r o r r q n o f F c r . o _ d ' * _ s " e ' o r o ' e r q d r Nole 1) Dolbe wrng specl caton Singe

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $eni zsMl-T115/-T121 ) 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?rgts' css"e d;s,x{f,#&fx rfse $.lp&q ssllal e*xec9**i*xa:l {see ?"

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $enie zsMl-T115/-T121 I 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?

Hydraulic

CHKDB Bore size Rod end thread type Stroke Y7BA S R Water resistant cylinder Water resistant solid state switch with 2-color display NBR Seal (nitrile rubber) FKM Seal (fluoro rubber) R V F9BA Y7BA 20 and 25 32 to 100 Refer to page 2 for specifications.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

Aluminum High Vacuum Angle Valve

steel 304) Body y (Material: A6063) w Valve seal (Maintenance part) r S Valve seat assembly (Maintenance parts) S Valve i (Material: Stainless steel 304) (Material: Stainless steel 304 + Sealant) Plate Valve side exhaust Port 3(R) (Exhaust port) Refer to the back of page 465 for Maintenance Parts.

KJ

How to Order KKH 4 S 02 M S Body size With seal (male thread) 3 4 1/8 1/4 Connection type Type Male thread Female thread With nut fitting Symbol M F N Socket S Socket/Plug designation Piping port size variations Male/Female thread type Nut fitting type Connection port size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 Hose I.D.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

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.O (r) aol O Gl ,9 .rO ";p:* Stroke Variations Long strokes up to 400mm standardized. a.l)compact guide cytinder QlBore size @pon typ. l t t t l t t t l l 7 5 _ _ t t t t t t t t t l l t t t l t t t l l t t r t t t t t t l r t t t t t t t t l 1't5 l t t t t r r r r l r t t t r r t t l l z a n * For bore s zes 12 & 16 onyM5x0SisavailaHe Befer to lable al eft for delats Ocylinder stroke (mm

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6