Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Table of Contents

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

1

CJ1 Series CJ2 Series CA2 B port D port C port A port CJP D port C port A port B port CJ2 S + Stroke B S + Stroke A Z + Stroke (A + B) CM2 D port C port Z S NB Bore size (mm) CG1 A port Stroke B B port Stroke A 10 150 36.5 21 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

Battery-less

T4 = 0.2 [s] T1 = V/a1 = 100/3000 = 0.033 [s], T3 = V/a2 = 100/3000 = 0.033 [s] T2 = = = 1.97 [s] L 0.5 V (T1 + T3) V 200 0.5 100 (0.033 + 0.033) 100 T4 = 0.2 [s] The cycle time can be found as follows.

Air Cylinder

N Rubber bumper 100 CG1 25 B S Z N CDG1 With auto switch M9BW 100 B 25 N S Z With auto switch (Built-in magnet) Number of auto switches Rod end thread Mounting Nil Male rod end F Female rod end Nil 2 pcs. S 1 pc. n n pcs.

V100

Z Option VP Nil Standard type E Continuous duty type V For vacuum Note) Note) Note) S070 S: With surge voltage suppressor Z: With light/surge voltage suppressor As to the case of rated voltage [Others (9)], please contact SMC.

CM2

S ZZ Z Z S S Z S S ZZ ZZ ZZ ZZ Z 20 6 21.5 25 20 158 112 143 183 133 137 87 168 193 6 24.5 32 25 162 112 147 187 137 137 87 172 197 6 27 40 32 164 114 149 189 139 139 89 174 199 164 214 224 8 32.5 40 138 179 168.5 163 113 204 229 188 243.5 254 193.5 218.5 213 268.5 279 6-4-49 50 Series CM2 Clevis Integrated Style (E) CM2E Bore size Stroke S T Spring return S + Stroke Z + Stroke ZZ +

CXS

with depth 12 2-M5 x 0.8 with depth 7.5 0.2 60 12 S SS ZZ Z Part no.

CRB2/CRBU2/CRB1

CRB1 (mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 50 S Y S Y S Y S Y 4 to 5 Thread 63 4.2 4.2 4.2 4.2 L1 = M5 x 0.8 4 to 6 L1 = Q1 Q1 80 5 5 5 M6 x 1 4 to 6.5 L1 100 6.8 M8 x 1.25 5 to 8 S axis Y axis J axis Z axis L1 Symbol: A43 Symbol: A44 Applicable to single vane type only A special end is machined onto both the long and short shafts, and

Environment

230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 LEC !

CJ2

WA WW S Z Bore 10 16 Basic CJ2WB6SCJ26, #6 CJ2WB10SCJ210, #6 CJ2WB16SCJ216, #6 The data shows auto switch styles.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 4 to 5 50 S Y S Y S Y S Y Thread L1 = L1 = 4 to 6 63 M5 x 0.8 4.2 4.2 4.2 4.2 4 to 6.5 Q1 Q1 80 M6 x 1 5 5 5 L1 5 to 8 100 M8 x 1.25 6.8 S axis Y axis J axis Z axis L1 Symbol: A43 Applicable to single vane type only Symbol: A44 Applicable to single vane type only A special end is machined onto both

Table of Contents

Shaft Pattern Sequencing II -XA31 to XA46 Applicable shaft type: J, K, S, T, X, Y, Z Shaft type J CRB2 K S Refer to CRBU2 T page 11-4-7.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Shaft Pattern Sequencing II -XA31 to XA46 Applicable shaft type: J, K, S, T, X, Y, Z Shaft type J CRB2 K S Refer to CRBU2 T page 11-4-7.

Hydraulic

Z (Example) C73CZ None .

CA2

+ Stroke H L Z + Stroke RR ZZ + Stroke Without auto switch With auto switch CDH10 Bore size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 B H1 C J D E F G H K S S KA L MM N P RR U A AL B1 CX Z 165 183 196 235 256 ZZ 175 195 212 255 281 Z 175 193 206 245 266 ZZ 185 205 222 265 291 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 +0.058 0 +0.070 0 +0.070 0 +0.084

A

S E PA R AT O R NAFM2000 (N)AFM Japanese N North American B O D Y S I Z E 2000 18 14 3000 14 38 4000 38 12 34 P O R T T H R E A D Rc(PT)* Remove (N) when ordering F PF N NPT* Remove (N) when ordering P O R T S I Z E A C C E S S O R I E S 01 18 02 14 03 38 04 12 06 34 Without D W/Auto Drain B Bracket O P T I O N A L S P E C S D I M E N S I O N S M I S T S E PA R AT O R NAFM30004000 ACCESSORIES

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Power saving circuit is only available for the Z type. 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC Electrical entry for D, Y R 3 VDC Nil Without light/surge voltage suppressor S Z With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) 50 60 AC ( Hz) 1 100 VAC 2 200 VAC DOZ and YOZ are not available. For AC voltage valves there is no S option.

ISO Cylinder

C85NT08A-S C85NT10A-S C85NT10A-S C85NT20A-S C85NT25A-S Mounting nut C85NT08B-S C85NT08B-S C85NT10B-S C85NT10B-S C85NT20B-S C85NT20B-S C75 Standard C75 Double acting, Single rod C75W Double acting, Double rod C75 Single acting (Spring return/extend) Direct mount C75R Double acting, Single rod XC6A only Description Bore size [mm] 32 40 Rod end nut C76NT32A-S C76NT40A-S Mounting nut C76NT32B-S