Series AK1000

S 0 0 Delivery pressure Bonnet option Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Code Code Bonnet Standard Panel installation 4) 02 06 10 15 No code P Connections (Inletq, Outletw) 4) Panel mounting hole: dia. 1.42 inch (36.1 mm).

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

Serial Network

-963-7099 Fax: 02-501-2937 Chile Phone: 02-270-8600 Fax: 02-270-8601 United Kingdom Phone: 01908 563888 Fax: 01908 561185 Italy Phone/Fax: 02-9271365 Rochester Phone: (716) 321-1300 Fax: (716) 321-1865 Dallas Phone: (972) 446-9554 Fax: (972) 446-5931 Oceania Australia Phone: 02-9354-8222 Fax: 02-9894-5719 Netherlands Phone: 020-5318 Fax: 020-5318880 Mexico Phone: 47-22-55-00 Fax: 47-22-59

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

1/4, 1/8 port (A port) 25 12 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.5 70.7 [72.9] A 18 20 27 34 R P Manual override 2-4.5 (For mounting) 40 4 (Light/surge voltage suppressor) M5 x 0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector

Compact Hydraulic Cylinder

Bore size (mm) NT-02 NT-04 NT-04 NT-05 NT-05 NT-08 NT-10 B C d D H 12.5 21 21 26 26 31 39 5 8 8 11 11 13 16 15 25.4 25.4 31.2 31.2 37 47.3 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 32 40 50 63 80 100 13 22 22 27 27 32 41 256 Auto Switch Mounting CHQB/CHQWB Series Refer to pages 431 to 490 for detailed specifications.

Auto Switch Guide

K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 10-20-27 Grommet 10-20-28 Connector 10-20-29 Band 10-20-30 Terminal conduit 10-20-31

Auto Switch Guide

G5P/K59 D-H7C D-G39/K39 D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 6-16-28 Grommet 6-16-29 Connector 6-16-30 Band 6-16-31

Auto Switch Guide

RQ Solid state switch 2-color indication with diagnostic output Grommet Band MU Grommet Rail 7-9-29 Grommet Tie-rod DWater (coolant) resistant type D-H7BAL D-G5BAL D-F7BAL D-F7BAVL D-F5BAL D-F9BAL D-Y7BAL -X Band Grommet Water resistant 2-color indication Solid state switch 207-9-30 Rail Grommet Tie-rod Grommet Data 7-9-31 7-9-32 Direct Grommet With built-in OFF-delay timer (200 ms)

Auto Switch Guide

D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 9-15-27 Grommet 9-15-28 Connector 9-15-29 Band 9-15-30 Terminal conduit 9-15-31

Ionizer

31 22 4.5 2 x 5.4 22 4.5 32 20 Ionizer 27 2 100 Hexagon socket head cap screw M4 x 6 (Accessory) 6 Ionizer full length (L) Angle adjustable (90) (31) 12 2 Angle adjustment range is 45.

EX600-WEN_WSV.eng

SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Diagnostic Step 3 Connection to PLC UNITED KINGDOM (44) 0845 121 5122 Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator.

EXxx-OMV0028.eng

Step 3 Connection to PLC SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator. Diagnostic UNITED KINGDOM (44) 0845 121 5122 With the above settings, it is possible to control the upper level controller.

Applicable Auto Switch Model

resistance Water resistance Water resistance Water resistance Water resistance Diagnosis output With timer Diagnosis output Diagnosis output With timer With timer Function 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 5.3-9 5.3-11 5.3-10 5.3-25 5.3-12 5.3-13 5.3-18 5.3-14 5.3-15 5.3-16 5.3-26 5.3-17 5.3-27 5.3-19/5.3-20 5.3-21/5.3-22 5.3-24 5.3-23 5.3-29 5.3-31

AZ1000

Delivery pressure Code 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 02 06 10 15 Bonnet Standard Panel Installation 3) Bonnet port (NPT 1/8 inch) Code No code P BP Material 3) Panel mounting hole: dia.39.6 mm.

Thermo-chiller/Rack Mount Type

2 [ ] lamp Lights up when AL.01 Low level in tank abnormal or AL.02 Low level in tank alarm is generated !3 Digital display (11-segment, 1 digit) X is displayed when maintenance notification is generated. !4 [RMT] lamp Lights up during remote operation by communication function !5 [KEYLOCK] lamp Lights up when key lock setting is active !

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

VXA21/22

Valve (Port size) VQ 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) VXA31 VXA32 01 ( ) 1 8 02 ( ) 1 4 03 ( ) 3 8 02 ( ) 1 4 Ordering Example (Example) Series VXA31, Orifice size 1.5mm, Rc(PT)1/8 (Part number) VXA3114-01 4.1-69 VXA31/32 Air How to Read the Graph In the sonic flow region: For a flow of 100 l/min.

Electro-Pneumatic Valve NVEP/NVEF Series

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

PFxx-OMJ0005CN

--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B