Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 18 Not included for Option Z (Removed parts) 19 Not included for Options Z and Z1 (Removed parts) 18 HRR Series Specifications: 200 to 230 VAC Water-cooled Refrigeration Model HRR050-W-20-(DM)U(YZ) Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 0.59 Control method PID control

HRX-OM-Y098

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

MGP

MGPS50 50 11 12 A 13 B 14 1 2 3 4 5 50 80 7 8 9 A 10 B 15 16 6 17 NBR 18 NBR 19 A NBR 20 B NBR / (mm) 50 MGP50-PS 19 18 17 80 MG80-PS 20 17 20 GR-S-010(10g 18 18. 18-1.

10

Bore size [mm] B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 Bore size [mm] Z MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 32 160 40 164 50 190 63 190 80 238 100 238 125 279 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64

MHZ

Normally closed Normally open MHZL2-16S 16 12 27 145 MHW MHZL2-20S 20 18 33 290 Single MHZL2-25S 25 22 50 515 MRHQ 13 acting MHZL2-10C 10 8 70 38 MHZL2-16C 16 12 140 Single acting, Normally closed Misc. 57 MHZL2-20C 20 18 290 85 MHZL2-25C 25 22 515 DNote 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

Magnetically Coupled Rodless Cylinder

Refer to page 18 for auto switch circuit diagrams.

MHZ

9@0@2 MHZA-A0603C MHZA2-6C MHZA-A0607 MHZA2-6H Main body of adaptor Mounting screw for adaptor Seal kit MHZA-A0608 MHZA2-6K End boss assembly MHZA-A0609 MHZA2-6M MHZA-A0610 MHZA2-6E 12-2-18 18 Parallel Style Air Gripper Compact Series (Without Auto Switch) Series MHZA2-6/MHZAJ2-6 Construction: With Dust Cover MHZAJ2-6 Double acting/With fingers open Single acting/Normally open @2 i !

MQQ

8 16 10 9 16 20 10 20 10 10 20 20 18 36 12 10 25 22 18 36 12 10 28 8 Series MQQ Accessory Dimensions Rod end thread adapter Rod end nut d NN MM Rod D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M12 x 1.75 27 14 34 35 34 100 125 15 100 250 16 112 170 M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160 17 110 279 18 140 197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5 10 18

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

XL

Port S (10) remains pressurized and valve S (18) remains open.

7

S F D Q Grommet (with surge voltage suppressor) C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (

IDG

Select a model based on the corrected outlet air flow rate calculated by Step 2 on the flow characteristics charts on pages 14-19-17, 18, 21, 22, 25, and 27. AT ID Example With the conditions of the corrected outlet air flow and the inlet air pressure mentioned to the left, the outlet air atmospheric pressure dew point is found to be 15C or below.

MTS

18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43)

HRX-OM-M090

Fig. 3-18 Connecting the connector 3.7.3 Setting items Table 3-9 shows the setting items of the external switch. For details, refer to 5.19 Communication function.

HRX-OM-W060

Alarms that allow continuous pump operation are shown in Table 5.4-17 Alarms that allow continuous pump operation (1/2) and Table 5.4-18 Alarms that allow continuous pump operation (2/2).

JXCx-OMT0061CN

(P.71) * 7 4.2 (P.18) PLC CC-link LED LED PWR ALM L ERR CC-Link L RUN CC-Link LED 8. LED (P.28) (LEC)LEDL RUNLEDL ERR/PLC PLC 17. CC-Link (P.77) 4.2 (P.18)4.3 PLC (P.18)PLC 10 - 8() ()() () 9 10. (P.32) PLC 14.