Vacuum Pad

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

2/3 Port Valve

-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2.0 1.5 2.0 1.5 1.5 1.5 1.0 1/8 (6A) 0.9 0.5 1.1 0.6 0.5 0.5 1.0 Construction/Components 260 0.4 0.2 0.45 0.2 0.2 0.15 0.45 2.0 1.5 2.0 1.5 1.5 1.5 1.0 Water oil air 3.0 Steam 1.0 VX21/22/23 (Orifice

Tamper Proof and Flat Head Screw

27.2 36.4 12.8 6 27.8 39.3 33.9 43.2 20 21 AS221F-N02-11ST AS321F-02-08ST 3/8" 17.9 15.2 8 18.5 29.5 41 55.3 49.3 21.8 R 1/4 19 1.5 23 9.5 AS321F-N02-07ST AS321F-02-10ST 18.5 1/4" 13.2 27.8 39.3 17 31.8 10 21 43.3 AS321F-N02-09ST AS321F-02-12ST 23 9.5 NPT1/4 19 20.9 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 12 22 44.3 32.8 AS321F-N02-11ST AS321F-03-06ST 12.8 17.9 3/8" 31.8 43.3 21 27.8

Speed Controller with One-touch Fitting

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6

Gun Type Ionizer

Static Neutralization Characteristics e Pressure Flow Rate Characteristics IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 500 450 400 Flow rate [L/min (ANR)] 350 Flow setting: Max.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size 1/4 02 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors In the case of alone Terminal block Sub-plate 02 PW VQ2000 Dimensions 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size 1/4 02 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors In the case of alone Terminal block Sub-plate 02 PW VQ2000 Dimensions 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Speed Controller with Indicator

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

Thermo-chiller

type 1.8 [1.0] 41 to 95 [5 to 35] (400 V as standard) HRSH090 Inverter type 0.18 [0.1] 41 to 104 [5 to 40] Indoor use (400 V as standard) UL Standards (To be obtained) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.18 [0.1] 41 to 95 [5 to 35] (200 V only as an option) 4 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Manifold 10 SS5Q13 08 FD2 D CE-compliant Clean series Nil Q CE-compliant Stations 1 station 01 1(P), 3(R) port size 24 Note) 24 stations Nil 1(P), 3(R) port 8 One-touch fittings 1(P), 3(R) port 5/16" One-touch fittings Note) The maximum number of stations depends on the type of electrical entries. 00T Option Nil 02 to 24 Note

Sine Cylinder Series REC

NT-02 NT-03 NT-04 26 30 25.5 M20 x 1.5 8 13 15.0 12.5 M8 x 1.25 5 32 37 31.5 M26 x 1.5 8 17 19.6 16.5 6 M10 x 1.25 41 47.3 40.5 M32 x 2.0 10 22 25.4 21.0 8 M14 x 1.5 Trunnion Nut Material: Carbon steel (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no.

Sine Cylinder Series REC

NT-02 NT-03 NT-04 26 30 25.5 M20 x 1.5 8 13 15.0 12.5 M8 x 1.25 5 32 37 31.5 M26 x 1.5 8 17 19.6 16.5 6 M10 x 1.25 41 47.3 40.5 M32 x 2.0 10 22 25.4 21.0 8 M14 x 1.5 Trunnion Nut Material: Carbon steel (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no.

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations