Aluminum High Vacuum Angle Valve

With Bypass Valve (Flange size: 100) (40) 185 154 55 154 (40) Lead wire length: 500 mm (L type: 3,000 mm) (M type: 1,000 mm) (40) (Z type: 5,000 mm) XLA-16-X65 y t w e Pilot port: Rc1/8 Bypass valve adjustment thread (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r 92 58 0.2 9 Scraper (FKM) Pilot port: M5 Lock nut Width across flats 13 270.5 (Max. 13) 102 130 102 134 7.5

SMC Pneumatic Clean Series

30 32 2 2 14<12> 14<12> 58 58 218 218 80 40 37 32 50 25 40 3 20<17> 71 13 89 M10 x 1.5 depth 22 10 22 M22 x 1.5 80 3/8 10 122 10 20 264 100 40 37 41 60 30 50 3 20<17> 71 16 110 M12 x 1.75 depth 22 10 26 M26 x 1.5 100 1/2 10 122 10 20 264 50 35 32 63 35 32 11 11 58 72 10 10 23 20 M18 x 1.5 M18 x 1.5 55 69 1/4 1/4 10 10 102 102 7 7 18 18 M8 x 1.25 depth 16 M10 x 1.5 depth 16 Note) < >: Denotes

•

(DiH erEffl surfaces 110 100 105 15 Same surfOlce), W~h 1 pc D-A90 10 41 15+ 40 (0 2) 100 + 40(1\ 2 4) 110 -+ 40 1 05+40~ 2 2 2 With n pes. (n:: 4. 8, 12, 16 .j (n :: 4, 8, 12. 16 .. ) (n = 4, 8. 12. 16) (n:: 2, 4. 6. 8 ) W ith 2 pes. (Dilferem surfaces 85 75 80 ' 0 Same sunacg).

Battery-less

series JXCD1 series JXCE1 series JXCP1 series JXCL1 series 16, 25 Version 3.6 (V3.6, S3.6) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 8, 16, 25 25, 32, 40 25, 32, 40 25 25 50 32, 40 Version 3.4 (V3.4, S3.4) 25, 32, 40 25, 32, 40 25, 32, 40 25, 32, 40 16, 25 JXCM1 series JXC51/61 series Version 3.5 (V3.5, S3.5) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32,

Rotary Actuator/Vane Type

steel Size 40 only e y u MSQ o w MSZ !

76

Therefore, the amount of condensed water is as follows. 140 (60) 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218 psi (1.5 MPa) 189 psi (1.3 MPa) 160 psi (1.1 MPa) 131 psi (0.9 MPa) 102 psi (0.7 MPa) 73 psi (0.5 MPa) 44 psi (0.3 MPa) 15 psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4 (20

ISO Cylinder

rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (

MY1

MY1C32 MY1C40 MY1C50 MY1C63 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 3/8 PG 3.5 4.5 7 8 9 10 12 NG 13.5 17 29 34 42.5 54 68 NW 56 60 60 74 94 118 142 W 68 72 84 102 118 144 168 PA 40 50 60 80 100 120 140 NC 13.5 17 21 26 32 43.5 56 NH 27.7 33.7 40.5 50 63.5 83.5 105 PB 40 40 50 60 80 90 110 NE 28 34 41.8 52.3 65.3 84.5 104 Q 153 191 206 264 322 380 436 QW 48 45 46 60 72 90 110 W1

Cylinder with Lock Series MNB

1/8 12 35 10 30 22 8 52 104 38 10 14 28 16 13 14 16.5 to 500 27 63 14 91 52.5 50 1/4 15 40 12.5 35 27 11 65 120.5 46.5 14 20 40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20

CXWM/CXWL

CXWM10-50 CXWM10-75 CXWM10-100 181.5 144 92 52 154 40 63 26 231.5 194 117 77 204 65 88 26 281.5 244 142 102 254 90 113 26 8-26-13 12 Series CXWM 10 Basic Type: CXWM1025 stroke 2 x 2-3.3 through 2 x 2-6.5 counterbore depth 3.2 (4H7 hole pitch) 4H7 depth 3 +0.012 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

1

x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x 102 9.8067 x 102 9.8067 x 10 1 1.4217 x 10 1.0133 x 105 1.0133 x 102 1.0332 x 104 7.6000 x 102 1.0133 x 101 1.0133 1.0332 1.4706 x 10 1 9.8067 x 103 9.8067 x 105 1 x 104 9.6784 x 105 7.3556 x 102 1.4220 x 103 9.8067 x 106 9.8067 1 1.3332 x 102 1.3332 x 101 1.3332 x 103

15

200 84.5 205 to 300 102 LC3F2 25 Up to 35 96 55 25 101 123 63.8 12 16.5 5.4 50.3 68.3 38.3 30 M6 x 1.0 40 to 100 68 105 to 120 126 125 to 200 85 205 to 300 102 32 Size Stroke range [mm] NC OA OB P Q S T U WA WB WC X XA XB Z 35 26 70 Up to 35 54 4 5 8.5 40 to 100 50 33.5 105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 6.5 M6 x 1.0 12 80 18 30 95 6.8 40 28.5 75 Up to 35 64 5 6 8.5 40

C76

Bore size Stroke NCA Standard stroke (mm) Bore size (mm) 32 40 Max. stroke (mm) 200 250 32 40 10, 25, 40, 50, 80, 100, 125, 160, 200, 250 Flange, Foot (1 pc.) C76F32A C76F40A DFlange, Foot (2 pcs. with mounting nut 1 pc.)

C76

Bore size Stroke NCA Standard stroke (mm) Bore size (mm) 32 40 Max. stroke (mm) 200 250 32 40 10, 25, 40, 50, 80, 100, 125, 160, 200, 250 C76F40A C76F32A Flange, Foot (1 pc.) DFlange, Foot (2 pcs. with mounting nut 1 pc.)

MB1

M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 4 4 5 9 11 .5 17 6.5 9 10.5 12 14 15 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

LC LD 55 40 40 40 LH 13 8 AL 54 47 47 40 B ZZ 30 28 28 25 LT LS 75 55 55 55 LZ X Y 13.5 10.5 10.5 10.5 FL D K 188 154 152 144 LX Bore size M10 x 1.25 M10 x 1.25 M8 x 1.25 1/8 27 25 25 21 M26 x 1.5 M26 x 1.5 M20 x 1.5 40 32 25 20 7 6.8 6.8 6.8 42.5 34.5 30 24 24 22 22 18 104 102 102 3.2 3.2 3.2 88 64 62 62 21 19.5 19.5 15.5 22 17 17 13 10 8 8 8 41 32 32 26 20 20 20 6 6 5 46.5 37.5 33.5 28

70astamb1

50 63 80 100 4 4 5 5 5 5 M6 x 1 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 13 14 15.5 16.5 19 19 9 6.5 Up to 500 Up to 500 Up to 600 Up

mb1

84 94 94 114 114 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 13 14 15.5 16.5 19 19 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 4 4 5 9 M6 x 1 M14 x 1.5 10.5 M8 x 1.25 M18

Square Tube Type Air Cylinder Series MB1

Moreover, due to the fact that bumpers are installed at each end of the piston, overall length is increased by 6mm for 32 and 40, 8mm for 50 and 63, and by 10mm for 80 and 100. 32 40 50 63 80 100 90 90 102 102 124 124 164 200 200 141 145 164 Width across flats Stroke range Bore size (mm) Effective thread length C B A D Ee11 F G H MB J K MM N P S V W ZZ 32 40 50 63 80 100 19.5 27 32 32 37

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4