Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

0.

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (for VQZ100) This is used when changing piping location.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(23.9) 0.9 18 2 EB P EA 36 2 x 2.2 (Positioning for manifold gasket) (66) L plug connector with cover (LL) 52-SY7420-LL-02 (-F2) 3 5 L 170.6 (Lead wire length) Insulation: Red (+) Insulation: Black () 4.1 14.7 12 0.3 mm2 91.8 Cable type (TT) 52-SY7420-TT-02 (-F2) 3 5 Max.10 L 204.2 (Lead wire length) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 108.6 10 ATEX Compliant Body Ported Type

Modular Type Regulators Series AR

Model Option AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) Bracket assembly Note 1) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L AR10P-270AS AR10P-260S G27-10-R1 Set nut Note 3) Note 3) G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L GC3-10AS [GC3P-010AS (Pressure gauge

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

7.5

Flat ribbon cable (10 pins) Symbol Stations 02 09 Symbol Stations 02 04 2 stations 9 stations 2 stations 4 stations Non-polar type, with plug (24 VDC) SJ3A6-5CU-DP (4 sets) SUP/EXH block (D side mounting) J: Flat ribbon cable (PC wiring) S6B: EX510 serial transmission Symbol Stations 02 08 Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat

45

2 stations Double wiring specifications(1) 10 10 stations 02 2 stations (2) Manifold base (5 stations) Available up to 20 solenoids.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 16 18 5 6.6 24 30 30 10 114 128 74 8 T-bracket Related Dimensions Note) Applicable bore size (mm) Part no.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

M): 10-SYJ74M-M01 02 DIN terminal (D, Y): 10-SYJ74MD Y01 02 M8 connector (WO): 10-SYJ74M-WO01 02 01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) Max. 10 91.5 84 58 [65] 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 89.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6

F

KM12-06-02-6 6 99 47 84 6 14 17 10 19.5 31.5 21.5 31 13 13.5 17 7.5 KM12-06-02-10 10 125 73 96 KM12-08-03-6 6 108 55 100 8 38 19 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 9 KM12-08-03-10 10 139 86 117 L5 T N H L3 L4 L6 P Q1 Q2 M L1 F L2 B Port Min Weight Model NPT Hex Inside Dia (g) (Inch Size) 19.5 6 16 16 18 29.5 29 40 12 1/4 87 5/32 10 6 67 KM12-03-35-6 19.5 10 16 16 18 29.5 29 61.5 12 1/

NCQ8

Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 RCS-08 RCS-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 RCD-08 RCD-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2")

%silltr

Powet Preflx Svmbol Pourer Preflx Svmbol 10-1 deci d 101 Deka da fi2 Heclo h 1O-2 centi c iO-3 milli m 103 Kilo k 10-6 micro ], tO6 Mega M Table 3.2 Prefixes tor powers of ten This lads us to a kPa (kilo-pascal or 1/100 b ol a BAR) and an MPa (1,OOO,OO0 pascals or 10 BAF). Practice with these prefixes and pay attention to what th symbol represents in terms of powers of ten.

SMC Basic Pneumatics

Powet Preflx Svmbol Pourer Preflx Svmbol 10-1 deci d 101 Deka da fi2 Heclo h 1O-2 centi c iO-3 milli m 103 Kilo k 10-6 micro ], tO6 Mega M Table 3.2 Prefixes tor powers of ten This lads us to a kPa (kilo-pascal or 1/100 b ol a BAR) and an MPa (1,OOO,OO0 pascals or 10 BAF). Practice with these prefixes and pay attention to what th symbol represents in terms of powers of ten.

Booster Regulator/Air Tank

For VBA10A-02 For VBA11A-02 For VBA20A-03 For VBA22A-03 Description Mist separator Exhaust cleaner AM250C-02 AMC310-03 AM450C-04, 06 AMC510-06 AM550C-06, 10 AMC610-10 Note) Refer to page 12 for air tanks, Best Pneumatics No. 5 for mist separators and Best Pneumatics No. 6 for exhaust cleaners.

SI unit for DeviceNet ®

No.EX-OMN0013-I PRODUCT NAME SI unit for DeviceNet MODEL / Series / Product Number EX260-SDN# Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Installation and Wiring 10 Installation 10 Wiring 11 LED Indication and Settings 15 DeviceNet Objects 20 Troubleshooting and Maintenance 28 Specification 33 Specifications 33 Dimensions 35 Accessories

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) MM U 114 136 165 190 H 39 45 55 60 FY 50 59 76 92 FD 9 11.5 13.5 13.5 FX 90 105 130 150 Model F 4 5 5 5 FT 13 15 18 18 ZY 81 101 119 133 ZX 110 130 160 180 20CRA1F U50 CRA1F U63 CRA1F U80 CRA1F U100 M6 x 1.0 depth 12 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M 10 x 1.5 depth 20 Flange style Double shaft: CRA1FWU Flange style Single shaft with four chamfers: CRA1FXU Flange style Double shaft

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) MM U 114 136 165 190 H 39 45 55 60 FY 50 59 76 92 FD 9 11.5 13.5 13.5 FX 90 105 130 150 Model F 4 5 5 5 FT 13 15 18 18 ZY 81 101 119 133 ZX 110 130 160 180 20CRA1F U50 CRA1F U63 CRA1F U80 CRA1F U100 M6 x 1.0 depth 12 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M 10 x 1.5 depth 20 Flange style Double shaft: CRA1FWU Flange style Single shaft with four chamfers: CRA1FXU Flange style Double shaft

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Membrane Air Dryer

for mist separator, micro mist separator) Description AFM40 AFD40 AFM40P-060AS AFD40-060AS Element assembly 41 Made to Order Series IDG10 02 Size With differential pressure gauge 3 5 10 20 Option Symbol Contents Size 3 10 20 5 M V $ $ $ $ $ $ Standard

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with