How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)
Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.
Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-14-8 for precautions on every series.
(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21
across flats 3 3 C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 2 13 16 49 16 18 32 35 ZPT 40/50 F-B5-A14 (Without Buffer/Male Thread) M14 x 1 Width across flats 19 M5 x 0.8 5 5 20 D 5 F Width across flats 21
04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.
06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 JIS Symbol Flow type Flow type Pressure type 2 3 03 04 06 25 Rc 3/8 Rc 1/2 Rc 3/4 4 1 14-9-11 2 Series VEF/VEP Application Example How to Use DIN Terminal Caution Controlling
(mm) 50 50 M10 x 1 M14 x 1 Thread dia./ Port size Connection A10 A14 Symbol B5 M5 x 0.8 Female thread Pad type Vacuum entry B01 Rc 1/8 F Ball joint type 04 4 tube One-touch fitting 06 6 tube 08 8 tube Material N NBR S Silicon rubber Buffer stroke U Urethane rubber Symbol Stroke Pad dia.
(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21
Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.
31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1 49.6 47.8 62.8 17.4 17 25.4 25 24.5 24.1 21.1 25.4 23.7 33.6 31.8 40.1 38 52.4 8 8 19 20 21 21 22 36 37 75 76 149 152 328 D H1 A L1 Reference dimensions after R thread installation.
20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm
M-5J AS1201F-M5-04 (Extension fittings) (Speed controller with One-touch fittings, Elbow style) KJL04-M5 AS1001F-04 (One-touch fitting) (Speed controller with One-touch fittings, In-line style) + + Table for Auto Switch Interference with Speed Controller and Fittings Auto switch model Electrical entry direction Wiring type Auto switch model 3-wire D-M9NV, D-M9PV Solid state switch Perpendicular
+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.
O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.
Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.
Possible to use in vacuum or under low pressures Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Free mounting orientation How to Order 04 4 5 1 VP3 A G 1 VP series 3 port solenoid valve CE-compliant Q CE-compliant Note) Nil Number of solenoids Single Note) Electrical entry: D/DL/DS/DZ only 1 Body size Thread type 1 4 6 8 1 2 1 2 Rc Nil G F 1 NPT N NPTF T Body ported 5 Body type Pilot
Example 1) ASCII mode Received function code: 04(0 0100) ASCII code 30h, 34h Abnormal function code: 841000 0100 ASCII code 38h, 34h Example 2) RTU mode Receive function code: "04" (0 0100) Abnormal function code: "84" (1000 0100 2) Error Code Assign error code below. 01 : Function code of a command is outside the standard 02 : The specified address of register is outside the range. 03 :
Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (
Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C