Modular F.R.L. Units

Made-to-Order List Mist Separator/ Micro Mist Separator AFM/AFD Series Filter Regulator with Backflow Function AWK Series Filter Regulator AW Series Regulator with Backflow Function ARK Series Air Filter AF Series Regulator AR Series Long bowl (-X64) P.51 P.61 From P.108 From P.109 0.4 MPa setting (-X406) From P.78 P.79 From P.108 From P.109 With element service indicator (-X2141) P.52 P.62

MQQ

46 66 10.7 5.8 25 68.5 3.2 57 57 71 11.2 5.8 X X LG Y Y 4-LD LT MQQ M 28 88 3.2 64 64 78 11.2 7 LS + Stroke LX A + Stroke LZ RHC Rod side flange style: MQQLF 10, 16, 20 MK(2) Bore size (mm) Stroke range (mm) A B FD FT FV FX RS Q G 10 10 to 40 61.5 79.5 4.5 5.5 30 45 FV 16 10 to 60 70.5 90.5 6.6 8 39 48 RS H A 20 10 to 60 79 99 6.6 8 42 52 FT FX 25 10 to 50, 75, 100 84.5 106.5 5.5 8 48 56

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGF Z DA DDH10 (Hole) W1 B DF DH DS DT DR DO DC DU DE DL DX CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 165 10 57 60 52 40 8 17 9 10 85 15 65 11 35 10 +0.058 0 CY1 183 10 57 70 52 40 8 17 9 10 85 18 65 11 35 12 +0.070 0 196 10 67 85 66 50 10 22 11 12.5 105 25 80 13.5 40 16 +0.070 0 MY1 235 12 93 102 90 65 12 24 13.5 15 130 31.5 100 16.5 60 20 +0.084 0 256 12 93 116 90 65 12 24

CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

CXS

CXSJ6-10 10 15 19 42 52 CXSJ6-20 20 25 29 52 62 CXSJ6-30 30 35 39 62 72 CXSJ6-40 40 45 49 72 82 CXSJ6-50 50 55 59 82 92 5 Series CXSJ Dimensions: 10 Standard Piping 16 12 + ST 4-M3 x 0.5 with depth 4.5 3.5 8 7.5 2-M5 x 0.8 with depth 4 (Piping port) 28.5 8 ST 56 + ST 15 44.5 + ST 8 3.5 13 1 M5 x 0.8 x 4 (Hexagon socket head set screw) 4 16 8 + ST 4.5 4.5 M8 x 1.25 x 7.5 (Bolt holder) 1 40

MGG

The amount of fluid can be confirmed with the level gauge on the air-hydro converter. 52 Series MGG Auto Switch Precautions 1 Be sure to read before handling. Design and Selection Warning Warning 1. Confirm the specifications. Read the specifications carefully and use the product appropriately.

MQQ

of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5 M4 x 0.7 10 to 60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

46 66 10.7 5.8 LS + Stroke LX LZ 25 26 3.2 57 57 71 11.2 5.8 A + Stroke 30 32.5 3.2 64 64 78 11.2 7 40 27 3.2 79 78 95 14.7 8 Front flange type: MQQTF 10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Air Cylinder CLA Series Fine Lock Model

t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

Single Axis Electric Actuator Series LJ1H

m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 12 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202NA Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52

Applicable Auto Switch Model

(Tolerance 30%) Dimensions Bore size (mm) Z Auto switch part number H H' HW C T T' D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 40 50 63 80 100 57 58 60.5 64 67 69 77 91 107 121 44 52 64 78 92 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 6.5 6.5 7.5 9.5 9.5 M5 X 0.8 X 16 M5 X 0.8 X 20 M5 X 0.8 X 25 5.3-38 Solid State Switch/Direct Mounting

VXP21/22/23

23 25.5 25.5 35 40 40 12 14 14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

SQ1000/2000

Connection method (Refer to page 52 regarding the procedures for adding stations to a manifold block.) Connect lead wire assemblies included with manifold blocks as follows. q Connecting common terminals Connect the round terminal of the red lead wire to the common terminal inside the junction cover.

Title not found

t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

15

39 11 60 5.8 28 40 8 CY1S20-Z M6 x 1 M6 x 1 10 9.5 21.6 44 8.5 36 37.5 24 19 20 10.5 22 5.4 16 2 5.5 8 45 16 70 28 62 5.8 46 10 CY1S25-Z M6 x 1 M6 x 1 10 26.4 52 8.5 40.5 40.5 27.5 21.5 21 12.5 22 11 6.5 16 5.5 53 20 49 2 8 70 70 54 7 10 CY1S32-Z M8 x 1.25 M8 x 1.25 12.5 14 33.6 64 9.5 50 50 33 26 24 11.5 23.5 8.6 20 2 5.5 9 64 26 85 52 86 66 9 12 CY1S40-Z M8 x 1.25 M8 x 1.25 12.5 41.6 74

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

MB

Z Bore size (mm) Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

LEH_C

INP(IN )() INP ON INP LEHF20K2-24 MAX. 28N JAPAN 100 ) P.50,P.52 8.3 15 - No.

3

The arm dimensions other than M dimensions are the same as those of with arm. 6.6 (2 locations) M6 x 1.0 (2 locations) (Special cap bolt) M MM FX FZ Arm 8 FV (mm) Rod Flange M MM Model Rod state Clamp stroke 20 mm 30 mm Clamp stroke 20 mm 30 mm 10 mm 10 mm Head Flange Model (mm) Retracted Extended Retracted Extended 24 43.5 24 43.5 34 63.5 34 63.5 12.5 32 12.5 32 22.5 52 22.5 52 44 83.5 44