Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

steel, NBR, (FKM, EPDM) 13 Valve spring Stainless steel 14 Buffer PPS 15 Bonnet Stainless steel 16 Bolt Fe 17 Bracket Fe 6 Armature assembly Stainless steel, PPS, NBR, (FKM, EPDM) Stainless steel, PPS, NBR, (FKM) 7 Bracket Fe 8 Mounting screw Fe 9 Bonnet Stainless steel 10 Gasket NBR, (FKM, EPDM) NBR, (FKM) 11 Bolt Fe 12 Body Brass Stainless steel Aluminum 13 O-ring NBR, (FKM, EPDM) NBR,

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

AC Servo Motor Driver (SSCNET /H Type)

Wiring 8 3.1 Wiring for power supply . 8 3.2 SSCNET cable wiring . 9 3.3 I/O signal connection . 10 3.3.1 Sink I/O interfaces Connection example . 10 3.3.2 Source Sink I/O interfaces Connection example . 11 4. Axis No. settings 13 5. Parameter list (Driver side) 15 6.

HRX-OM-W038

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

HRX-OM-O021

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

HRX-OM-R005

Centigrade(oC) Fahrenheit(oF) 5.13 11 Changing temp. unit 12 Changing pressure unit Pressure unit can be changed.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

16 15 44 10 8 22 42.3 56 M8 X 1.25 M14 X 1.5 146 32 84 17 11 27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

44

(inch) L Model KKA 1/8" (3.18) KFG2N-01 1.9 8 7.8 H 5/32" (4) KP KFG2N-03 1.9 8 7.7 1/4" (6.35) KFG2N-07 4.6 12 9 LQ 5/16" (8) KFG2N-09 6.7 14 10.1 L MQR 3/8" (9.53) KFG2N-11 10.7 17 11.7 T 1/2" (12.7) KFG2N-13 13 19 12.8 IDK 331 KFG2 Series Applicable Fluid List How to Read the Table : Completely unaffected or largely unaffected. : May be slightly affected, but, dependent upon condition,

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y3-60Stations B (Light/surge voltage suppressor) Manual override (non-locking) Stations 2 3 4 5 6 7 8 9 10 (Station n) (Station 1) 43.3 (3.2) L1 110.5 123 135.5 148 160.5 173 173 185.5 198 33.4 (3) L2 100 112.5 125 137.5 150 162.5 162.5 175 187.5 L3 86 96.5 107 117.5 128 138.5 149 159.5 170 [44.7] L4 12 13 14 15 16 17 12 13 14 38.2 28.2 25.8 20.7 19.2 11 12 13 14 15 16 17 18 19 20 Stations

New

6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

HRX-OM-W032

Blue (DC COM) 11 Terminal No. Black (Output 1) 3 Terminal No. Black (Output 1) Fig. 3-10 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue (DC COM) Brown (24 VDC) Brown (24 VDC) Terminal No. 14 Terminal No. 6 Flow switch Blue (DC COM) Terminal No. 13 Terminal No. 3 Black (Output 1) Black (Output 1) 11 Terminal No.

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

LECP6_C

(DC24V) DC24V10 (1) 3A 5A 2 (3) 11 () 13 () A/B (800 /) RS485 Modbus EEPROM LED LED/1 I/O 5m 20m 0~40 90%RH ) -10~60 90%RH ) ()FG 50MDC500V 150g() 170g(DIN ) 1 2 3UL UL1310 Class2 11 - 3.2. ( SV1.00 ARX8300073 ()"SV1.00" ON/ ()/ 1 PWR LED() (LED()) () 2 ALM LED() ON/ 3 CN5 I/O (26 ) I/O PLC (11 COM 13 COM ) 4 CN4 I/O (8 ) 5 CN3 (16 ) 6 CN2 (6 ) 7 CN1 5 (DC24V)

PC Wiring System Series PCW

11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1 2 3 4 CN7

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Grommet D-90A/93A 11-11-13 Direct MSQ D-R731/R732 11-11-14 D-R801/R802 11-11-14 MRQ 11-11-15 D-R731C/R732C Connector 11-11-15 D-R801C/R802C DRail D-A79W 11-11-16 2-color indication 2-color indication With diagnosis output 2-color indication Water resistant 2-color indication With timer Grommet 20D-A59W Tie-rod Grommet 11-11-17 D-F79/F7P/J79 11-11-18 Grommet D-F7NV/F7PV/F7BV 11-11-19 Rail

15

Calculate mmax of i) from the allowable load mass on guides in Graphs (8) and (9), and calculate Mmax of ii) and iii) from the allowable moment (M1, M2, M3) in Graphs (10), (11), (12) and (13).

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)