C76

9 @0 q w e r t y u i o !

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Check Valve Series AK 1

5/32, 1/4 5/16 x NPT 1/8 8, 10, 12 5/16, 3/8, 1/2 Free flow Female thread Male thread t r t r Free flow One-touch fitting Male thread u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2 q u r !0 !1 e !4 !3 w !0 !

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Series VCS

Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Vacuum Pad: Ball Joint Type

Q Applicable tubing O.D.

MXQ

x 0.8 MXQ-CS6(L)-X11 15 25.5 MX MXQ-CS8(L) 5 18 B MXQ8(L) 7 22 7.5 8 16.6 14.6 9 3 8 9.8 MXQ-CS8(L)-X11 M3 x 8 M3 x 10 M6 x 1 15 28 MTS F MXQ-CS8(L)-X12 25 38 G E MXQ-CS12(L) 5 22 MY C MXQ12(L) M8 x 1 M4 x 12 M4 x 12 MXQ-CS12(L)-X11 9.5 29 11 12 20.5 18.5 14 4 11 13 15 32 MXQ-CS12(L)-X12 25 42 CY Table mounting section MXQ-CS16(L) 5 23 MXQ16(L) Q M10 x 1 MXQ-CS16(L)-X11 M5 x 16 M5 x 16 11

NAAMS Standards Compliant

M N O J K L 8F7 through +0.028 +0.013 +0.028 +0.013 8F7 through M 11 through N O 12.5 300.05 250.03 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 250.03 12.5 11 through P P Q M8 x 1.25 R28 Q 150.03 180.03 M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 [mm] [mm] Model NAAMS code A B C D E F G H I Model NAAMS code

SX

AXT100-DS25015 030 050 L Terminal no.

EX500-GPR1A.eng

How to order: EX500-AP 050 S How to order: EX500-AC 030 SSPS How to order: EX500-AC000-S 1 How to order: EX9-AC 010 1 How to order: EX9-AP 010 7 Cable length (L) Connector specification 003 0.3 [m] 005 0.5 [m] 010 1 [m] 030 3 [m] 050 5 [m] Cable length (L) Connector specification 010 1 [m] 050 5 [m] Cable length (L) 010 1 [m] 030 3 [m] 050 5 [m] Cable length(L) 010 030 1[m] 3[m] S Straight

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Disassembly 1) After loosening the screw q, then if the housing r is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull out the screw q, then remove the gasket or . 3) On the bottom part of the terminal block e, theres a cut-off part (indication of an arrow) .

C95

L min.

Fluoropolymer Piping Equipment

B E E F G H L L M Min. port size 2 x B L, L LQ3T11 4 3.5 10 9 4.8 9.5 11 28.5 27.5 14 2.5 LQ3T12 3 2 LQ3T21 6 4 17 16 6 12 16 34.5 33.5 20 4 LQ3T31 10 5 22.5 19.5 9 18 21 47.5 44.5 25 7.5 LQ3T32 8 6.4 LQ3T41 12 6 24 22 10 20 24 52.5 50.5 29 9.5 LQ3T51 19 7 26.5 24 14 28 32 64 61.5 37 16 LQ3T61 25 8 30 26 18 36 41 78 74 49 22 M (E, E) (E, E) G H L, L L, L (E,E): Reference dimension for the

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365