Intrinsically Safe Valve

plug connector (L) 53-SY5140(R)-L-02 18 19 9.5 60.3 8.3 48 37.2 2 x 4.3 (For mounting) 15.5 15.5 M5 x 0.8 (External pilot port) 4 Insulator: Black () B A 17.5 35 B A Insulator: Red (+) PE X P EB EA Manual override 17 4.3 56 17 62.5 65 M5 x 0.8 (Pilot EXH port) 109.1 L (Lead wire length) 0.3 mm2 1.55 22 9.5 18 18 66.5 (E-type) 28 5 x 1/4" (Piping port) L-type plug

MRHQ

Mp My Mr MHS MHC Fv L MHT MHY MHW MRHQ L: Distance to the point at which a load is applied (mm) Misc.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

CLQ

x 0.8 Front cylinder port VH Q 2 x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port

CNG

m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Stopper Cylinder

B + stroke R R O1 thread [mm] Bore size A B D E F G H J K L M N O P Q S T V X Y Z W Rc NPT G Rc NPT G 16 68 41.5 10 29 6 3 26.5 18 1.5 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 8 20 18 3.5 37 0 0 0 20 78 45 12 36 8 4 33 22 2 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 10 24 22 4 47 1.5 1.5 0 32 87 48 20 45 7.5 8 39 4.5 32 3 34 5.5 9 depth 7 1/8 1/8 1/8 20 18 36 20 8 14 40 105.5 52.5

Rotary Table/

Standard type For 90 For 180 Positioning pin hole Positioning pin hole Counter-clockwise 3 3 A port A port A port 3 22.5 3 22.5 84 e 96 ng e 3 ra ng on ra ti B port n ta 3 90 tio 4 ro 7 ta m 1 Clockwise ro e e u s i g m w 3 m 6 k C n c l o ni a u 8 r Mi im 3 n 1 o ti e ax ta ng ro m M u ra m ni Mi 180 n tio e C s ta l i o w c k ro m mu xi Ma Positioning pin hole Positioning pin hole Position

Slider Type/Ball Bushing Bearing

L Yaw moment M3 = W (L A) Roll moment M2 = W L CY3B CY3R (mm) Model CY1H10 CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 A 15 17.5 19.5 23.5 0 CY1S L L A L CY1L M2 M1 CY1H CY1H 0 M3 Since there are 2 guides, the guides central axis and the cylinders central axis are the same.

Speed Controller with Indicator

In addition, the universal type is only available with 180 setting. 5 Speed Controller with Indicator Series AS-FS Needle Valve/Flow Rate Characteristics AS101FS-M5, AS111FS-M5 AS201FS-01, AS211FS-01 AS201FS-02, AS211FS-02 600 300 AS-FS AS-FSG Uni-AS-FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate

MQQ

CAT.ES20-156 A Compact Low Friction Cylinder (Metal Seal Type) Series MQQ 10, 16, 20, 25, 28 Lateral Load Resisting Low Friction Cylinder (Metal Seal Type) Series MQM 6, 10, 16, 20, 25 Series MQM Series MQQ eds spe ow ds d l spee an rm rict w f ion c lo igh ifo act ylind un er f mp or o h Co w t Q lo MQ or isti ng lo res ad w frictio r f l lo de lin n cy era Lat M MQ Low Friction Cylinder

MHF2

Max. tightening torque Nm Max. screw-in depth l mm Model Bolt used 1) Stroke end when fingers are open MHF2-8D M3 x 0.5 0.95 7 With clearance MHF2-12D M4 x 0.7 2.2 10 MHF2-16D M5 x 0.8 4.5 12 MHF2-20D M6 x 1 7.8 15 Vertical mounting (Body tapped) Holding point is adjusted. l Clearance Clearance Max. tightening torque Nm Max. screw-in depth l mm Model Bolt used Without clearance Impact load

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

0: 500mm L 1: 1500mm L 2: 3000mm U D U D U D 83.5 106 59.2 46.8 55.5 M5 ground screw Station No. 9 9 2n-1/2 (ports A, B) Electrical entry on U side (LU) 34.5 U side n 12 X ... ... ... ... ... ... ...

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS120M AS220M-01 AS220M-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Construction Meter-out type AS1200M AS2200M u w u w t e r !0 !1 i q !4 r e !0 !1 q i !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

(kg) 5 1.0 0.5 1 Point of application L Workpiece weight m kg 0.1 Transfer speed V m/min 30 20 10 5 5 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 30 20 100 L = 120 mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg

240

Front Mounting Top Mounting L L L 6.5 8 9 9.5 L 5.5 7.5 10 11 Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 Model MXH6 MXH10 MXH16 MXH20 Model MXH6 MXH10 MXH16 MXH20 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 How to Mount a Workpiece Work pieces can be mounted on 2 surfaces of the Compact Slide.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

[95.1] (Lead wire length) (Non-locking) Manual override 41.5 [48] 29.1 33.5 22.5 R2 R1 P 13 5 10 10 14 5-M5 0.8 (Piping port) 28 [ ] for AC 3 4 5 3 4 5 L type plug connector (L) : SYJ3 40L -M5 M type plug connector (M) : SYJ3 40M -M5 33.5 16.5 33.5 16.5 23.2 (Mounting holes) 23.2 (Mounting holes) 22 3 22 3 2.5 2.5 A B A B 11 11 17.5 17.5 A B A B 47.4 50.7 33.7 About 300 111.6 39.2 [40.5]

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l