HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Rc(PT) Thread F G(PF) N NPT Accessories Options Table: Accessory/Option combinations Available Not available Depending on model L D J T AM150 R AM250 AM350 AM450 Applicable models Accessories /Options C C D -J -R AM550 AM650 AM850 Port size N.C. auto drain N.O. auto drain Accessories 06 3/4B 01 02 03 1/8B Drain guide 1/4B 10 14 20 1/4B 1B 11/2 B Options INOUT reversal 3/8B Element service

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Compact Manifold Regulator

AR425 to 935 Nil A B C D E F G H J K L M N O P Q R ARX AMR ARM ARM With pressure guage With digital pressure switch ARP IR-A Common supply block Common supply block with pressure switch IR L side L side IRV VEX Note 1) Pressure display means a pressure gauge or digital pressure switch is attached.

•

r StJpply + TlIfm..ar r -RIld P()" 'f ~ Te-m"O

PF2A/PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS22l1FSl-U01-01 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-U01-03 5/32" 8.2 AS22l1FSl-U01-07 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-U01-09 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U02-01 1/8" 1/8 13 (12.7) 7.2

SYJ300-OMU0003

(DS) DZ DIN M8 SYJ Series LM S + Z S Z + 4WA 4WA R U +3WA 3WA R U 4(WA ) 4(WA ) 3(WA ) 3(WA ) () DC24V,12V +1/4 DC24V W WA + ,W13WA 43 DC24V,12V 62ms i1:i2 WA 11 No.SYJ300-OMU0003 SYJ Series S 904 3.57 JIS C 3306 0.5mm L M DIN ) (Z) 22 3 0.4Nm (DZ) (1.652.5N m) () NL: () () (3 ) 1V (0.20.25Nm) DIN Y Y DIN DIN 8mm DIN D SY100-61-3-05 DDIN 9.4mm D DIN

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Construction w e r !2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Sine Cylinder Series REC

screw D-B5/B64 D-B59W D-G5NTL D-G5NBL BA-01 BA-02 BA-32 BA-04 Cylinder tube BD1-01M BD1-02M BD1-02 BD1-04M D-A3/A44 D-G39/K39 qBMA2-: A set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.

Sine Cylinder Series REC

screw D-B5/B64 D-B59W D-G5NTL D-G5NBL BA-01 BA-02 BA-32 BA-04 Cylinder tube BD1-01M BD1-02M BD1-02 BD1-04M D-A3/A44 D-G39/K39 qBMA2-: A set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.

Gun Type Ionizer

Cable length: 3 m Nozzle assembly Emitter assembly IZG10 NT IZG10 A001 01 Nozzle type Symbol Type 01 Standard nozzle 02 Bypass nozzle*1 Standard nozzle Bypass nozzle *1 This nozzle is complaint with the OSHA standard for hand and portable powered tools and equipment, general (1910.242b) requiring that static pressure at the main orifice shall not exceed 30 psi (210 kPa).

ZSE30/ISE30

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/low pressure Option 2 Piping specifications Nil None Bracket R 1/8 (With M5 female thread) 01 NPT 1/8 (With M5 female thread) A T1 Straight type 4 One-touch

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Rod end threads Standard (Rod end female threads) Rod end male threads Nil M Rod end threads Action Standard (Rod end female threads) Rod end male threads Nil D Double acting M Specifications Action 10(Relieving type) Bore size (mm) D Double acting 12 16 20 25 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa 1.0MPa 0.04MPa 0.035MPa Without auto switch

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Thread Rc(PT) Table: Accessory/Option combinations Depends on model l Not available Available F G(PF) N NPT Accessories Options C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable models Port size Accessories Options AMH550 AMH650 AMH850 B 01 B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN/OUT reversal -T Element service indicator Accessories 02 03 1 4 3

Round Type Hydraulic Cylinder

Mounting correctly Mounting incorrectly Solid state D-G59, D-G5P, D-K59, D-G5BA D-G59W, D-G5PW, D-K59W D-G59F, D-G5NT, D-G5NB Solid state D-H7A1, D-H7A2, D-H7B, D-H7BA D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW Reed D-C73, D-C76, D-C80, D-C73C, D-C80C Reed D-B53, D-B54, D-B64, D-B59W Auto switch Auto switch Auto switch mounting screw M3 x 0.5