FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

Multistage Ejector (N)ZL Series

[kPa] Vacuum pressure [kPa] 80 80 70 70 200 100 60 60 Air consumption Air consumption 150 50 50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa

Air Catch Sensor

200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

Process Pump

D-DN

PF2D5.eng

Black Flow direction 1 Main circuit + Mounting hole Brown DC(+) Main circuit Port size D 12 to 24 VDC 2 Piping port (IN side) Blue DC(-) 3 White Analogue output Switch output 1 4 Restrictor D x 8 times Safety Instructions Description Item Analogue output: 1 to 5 V Output impedance: 1 k (load impedance: 100 k or more) Body The body of the product.

IDX-OM-W014

T 100 2 () 100 IDU Series 4-1 4 1 IDX-OM-W014 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDU Series 4-2 4 2 IDX-OM-W014 4 30 (2) 30 () O IDU Series 4-2 4 3 IDX-OM-W014 4 AD48-A 1 IDU3E/4E/6E ) 2019 3 2019 2 SERIAL No.XP AD48 SMC WEB IDF-S0002 1 IDU3E/4E/6E C42FP-260S 1 IDU3E/4E/6E IDF-S1933 1 IDU3E/4E/6E 2 IDU Series 4-2 4 4 IDX-OM-W014 5 5 5-1 3 ON OFF () 3 2 R T 600mm

IDX-OM-W023

T 100 2 () 100 IDU Series 4-1 4 1 IDX-OM-W023 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDU Series 4-2 4 2 IDX-OM-W023 4 30 (2) 30 () O IDU Series 4-2 4 3 IDX-OM-W023 4 AD48-A 1 IDU8E/11E/15E1 ) 20193 20192SERIAL No.XPAD48 SMC WEB IDF-S0002 1 IDU8E/11E/15E1 C42FP-260S 1 IDU8E/11E/15E1 IDF-S1933 1 IDU8E/11E/15E1 2 IDU Series 4-2 4 4 IDX-OM-W023 5 5 5-1 3 ON OFF () 3 2

IDX-OM-W029

IN IDU Series 3-1 3 1 IDX-OM-W029 3 / 3-3 OFF 3-4 3 3 5 3-5 OFF 3-6 24H IDU Series 3-3 3 2 IDX-OM-W029 4 4-1 5 310 /12-1 4-2 4-2-1 4-2-2 1. 100 2 () 100 -T IDU Series 4-1 4 1 IDX-OM-W029 4 4-2-3 OFF 501015 1 OFF INOUT IDU Series 4-2 4 2 IDX-OM-W029 4 30 30 (2) O AD48-A 1 C42FP-260S 111692 1 2019 3 2019 2 SERIAL No.XP AD48 SMC WEB IDU Series 4-2 4 3

With the use of D-sub output blocks, a maximum of 9 remote D-sub manifolds can be attached to one EX600 communication module. This serial interface is compatible with series SV1000/2000/3000, VQC1000/2000/4000, S0700 and the new SY series valves.

Stations: 02 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting

Stations: 02 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting

Stations: 08 (Stations), Wiring: F (D-sub Connector), Manifold Options: BD (with Manifold Options B & D), Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: JK (with Unit Options J & K), 1st Nominal Nozzle Size: 2 (ø1.0

Stations: 08 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting

Stations: 06 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 32mm, Port Thread: Rc: 32-100 Bore; M Thread 20, 25 Bore, Stroke: 50mm, Body Option: Standard, Rod End Female Thread, Auto Switch Groove: Z (ø20 to ø63, 4 Surfaces), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.

Stations: 06 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: without Leadwire, Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation

Stations: 08 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: JK (with Unit Options J & K), 1st Nominal

Stations: 08 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: JKW (with Unit Options J, K, & W), 1st

Stations: 03 (Stations), Wiring: F (D-sub Connector), Manifold Options: BD (with Manifold Options B & D), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size:

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: without Leadwire, Unit Options: J (Vacuum Break Flow Adjusting Needle, Round Lock Nut)