Suction Flow Rate: 600 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: L Plug Vertical Connector w/o Connector, Light/Surge Voltage Supprressor:

Suction Flow Rate: 300 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: L Plug Vertical Connector w/o Connector, Light/Surge Voltage

Suction Flow Rate: 300 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: L Plug Vertical Connector w/o Connector, Light/Surge Voltage

Suction Flow Rate: 300 L/min (ANR, Supply Pressure: 0.35 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: L Plug Vertical Connector w/o Connector, Light/Surge

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: H (Digital Pressure Switch for Vacuum / -100 to 100 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F06 [Vacuum: G3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: M (0.35 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: H (Digital Pressure Switch for Vacuum / -100 to 100 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow

ATX-OM-F003E

](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L) Shall not be detected.

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 1 (100 VAC), Electrical Entry: MO (M Plug Horizontal Connector w/o Connector), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 1 (100 VAC), Electrical Entry: MO (M Plug Horizontal Connector w/o Connector), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push

Collector 2 Outputs + Copy function), Unit Specifications: w/Unit Switching Function, Not for Use in Japan, Lead Wire Specifications: L (Lead Wire w/Connector, 2m)

Pressure Sensor: D (Digital Vacuum Pressure Switch), Output Specifications: X (NPN Open Collector 2 Outputs + Copy function), Unit Specifications: w/Unit Switching Function, Not for Use in Japan, Lead Wire Specifications: L (Lead Wire w/Connector, 2m), Option: B [Adapter Assembly for Bottom Mounting, (ZL112A-AD1-A)]

2 Outputs + Copy function), Unit Specifications: w/Unit Switching Function, Not for Use in Japan, Lead Wire Specifications: L (Lead Wire w/Connector, 2m)

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 12 (1 1/4), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: M (0.35 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: E (Push-turn Locking Lever Type

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: M (0.35 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: E (Push-turn Locking Lever Type

Sensor: None, Output: B (PNP Open Collector), Unit: P (w/Unit Switching Function, Initial Value psi), Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: E (Push-turn Locking Lever Type

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: Non-locking Push Type, Vacuum