ZP

U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16 16 ZP16D 18 4 13 11.7 16 D25 25 ZP25D 28 4 15 15.5 20 D40 40 ZP40D 43 7 18 24.2 29 13-11-59 Series ZP Replacement Parts: Pad Unit (With

ACG

Note 9) Without a valve function. Note 10) For thread type NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.) (1) (3) (2) (1) (2) Note 1) Wall mount is not available for size 20 regulator with downward facing handle in B combination. Contact SMC when wall mount is needed.

Thermo-chiller Basic Type HRSE Series

Note 9) Weight in the dry state without circulating uids. Note 10) Cable terminal is provided with a plug with ground terminal (JIS C 8303 Plug for the receptacle with dipoles grounding electrode). Note 11) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher. 198 A

Thermo-chiller

(In such a case, use a bypass piping set (sold separately).) 8 Purchase an earth leakage breaker with current sensitivity of 30 mA separately. 9 Front: 1 m, height: 1 m, stable with no load, Other conditions See 3. 10 Weight in the dry state without circulating uids 9

ISG

Bellows assembly for ISG 110-030 16-9-6

S Couplers Series KK130

/O.D. mm Symbol 01 02 03 04 N01 N02 N03 N04 Symbol 07 09 11 13 Applicable tube O.D. mm 6 8 10 12 1/4" 5/16" 3/8" 1/2" Symbol 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose. Inch size 1

ISA3_L

Stations Nil With unit selection function 9 1 1 station 2 2 stations 3 3 stations 4 4 stations 5 5 stations 6 6 stations F G1/8 3 M Fixed SI unit 10 9 Under the New Measurement Act, digital gap checkers with the unit selection function are no longer allowed for use in Japan. 10 Unit: kPa G1/8 3 1 When F is selected for the rated distance range 2 When G or H is selected for the rated distance

PVC Quick Drain Valve LVW Series

PVC Quick Drain Valve LVW Series How to Order 60 25A LVW Series O-ring material Material Symbol Body class Orifice size Symbol 60 80 Nil N FKM 6 25 EPDM 8 40 65 90 9 80 Pilot port thread type Thread type Symbol Port size Nil N Rc1/8 Body class Symbol Applicable PVC piping external diameter NPT1/8 Symbol 25A 32A 40A 50A 65A 80A 6 32 PA 38 8 48 60 B A 9 75 89 PB Standard Specifications Model

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

2-Layer Soft Fluoropolymer Tubing Series TQ

2-Layer Soft Fluoropolymer Tubing Series TQ RoHS Specifications TQ0604 6 4 # # TQ0806 8 6 # # Translucent (Material color) Air, Water, Inert gas, Solvent TQ1008 10 8 # # TQ1209 12 9 # # Designation TQ0425 4 2.5 # # O.D. (mm) I.D.

VEX5

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 11 4 11 4 220 VAC 50/60 Hz 24 VDC 12 VDC 5 6 11 2 9 2 2 7 240 VAC 50/60 Hz Other 9 Option Threadtype Nil F N T Rc G(1) NPT NPTF Note 1) Not conforming to ISO1179-1.

VG342

valve (External pilot) VG342 04 G 1 A Valve option CE-compliant Nil R Internal pilot External pilot Q CE-compliant Nil Rated voltage Electrical entry: D only 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Pilot valve option Standard type Nil 4 Energy-saving type (DC only) Y 24 VDC 12 VDC 5 6 Continuous duty type E Option 7 240 VAC, 50/60 Hz Passage symbol 9

VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Option Connector Rated voltage Port size of sub-plate Number of solenoid Single — Without sub-plate None 100V AC 1 S — — Connector SV ∗ Indicator light 1 4 A02 200V AC 2 0 N Double D FG Side piping FJG W/o conn

3 8 B03 Bottom piping SYJ R Wedge packing style 3 8 R port: N NPT Contact SMC for other voltages (9) Order Made Individual pilot EXH V T NPTF FIG FHG SX If specifying more than one symbol, indicate them in the alphabetical order.

Series VS

Series VS R8 S HOW TO ORDER ISO5599/2 VALVE MANIFOLD VV8 2 5 03 TU1 03 D T W1 W1=NEMA 4 ISO Size 1 Size 1 Port Thread Code 2 Size 2 3 Size 3 NIL Rc (PT) T NPTF F G(PF) Location of port 1(P), 5(EA), 3(EB) Number of Stations D D side 2 2 stations U U side B Both side 9 9 stations Size of port 1(P), 5(EA), 3(EB) Symbol Size Applicable ISO size 02 1/4 Size 1 U side option 03 3/8 Size 1

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

10%6046Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)275UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Double acting, single rod type Cylinder stroke range: 1/8" to 4" Maximum operating pressure: 200PSI Operating temperature range: 15 - 150F Auto switch capable, 9/16 INCH NCQ8 DBL-ROD AUTO-SW, ACTUATOR, NCQ8 COMPACT CYLINDER, GX, 9/16 INCH NCQ8 DBL-ROD AUTO-SW, 3.42 lb

10%3020Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Double acting, single rod type Cylinder stroke range: 1/8" to 4" Maximum operating pressure: 200PSI Operating temperature range: 15 - 150F Auto switch capable, 9/16 INCH NCQ7 DBL-ACT AUTO-SW, ACTUATOR, NCQ8 COMPACT CYLINDER, GE, 9/16 INCH NCQ7 DBL-ACT AUTO-SW