ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

V IC circuit Solid state switch Reed switch 12 V 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indication) 24 V Yes Grommet 12 V 5 V, 12 V IC circuit Water resistant (2-color indication) 12 V 5 V 12 V Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (NPN equivalent) 100 V Grommet Relay, PLC IC circuit IC circuit Yes 2-wire 24 V 5 V, 12 V

Toggle Type Air Gripper ø 32, ø 40, ø 50, ø 63 Series MHT2

V 12 V 5V, 12 V 12 V 5 V, 12 V 12 V IC circuit Solid state switch Reed switch IC circuit Relay, PLC Diagnosis (2-color indication) 24 V Grommet Yes IC circuit Water resistant (2-color indication) M9PAV M9BAV A96 A93 A90 A96V A93V A90V IC circuit IC circuit 5 V 12 V Yes Grommet 100 V 3-wire (NPN equivalent) Relay, PLC 2-wire 24 V No 5 V,12 V 100 V or less Water resistant type auto

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Branch tee LQ1B P.10 6 1 2 3 Female 4 5 P.11 6 1 2 3 Union elbow LQ1E 4 5 P.12 6 1 2 3 Union tee LQ1T 4 5 P.13 6 1 2 3 Panel mount union LQ1P 4 5 P.14 6 1 2 3 Union LQ1U 4 5 P.15 6 4 Union flange LQ1F 5 P.15 6 Note) Basic size With reducer Features

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

AFF

Combinations such as C-FV, D-FHV, J-ST are not possible.) : Not available F H R S U T V Symbol Auto drain specifications Nil Auto drain 3 Symbol Nil Description C D J Drain cock (Without auto-drain) N.C. auto drain N.O. auto drain C D 3 Refer to Auto Drain Specifications/Option Combinations.

VFR2000-OMM0001

B VFR2 1.25-31.25-3S1.25Y-3N1.25Y-3S VFR2000 A-B+B+COM -COM 1)8 2)+COM -COM 3)D U D 1 -12No.VFR2000-OMM0001 01F D COM A B 1)8 2)+COM -COM 3)D U D 1 -13No.VFR2000-OMM0001 () X () (R) () (PE) -14No.VFR2000-OMM0001 NO 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7

SI unit for DeviceNet ®

D: Modified errors in text. E: Limited warranty and Disclaimer are added. F: Contents are added. [July 2017] G: Contents are added. [January 2021] H: Contents revised in several places.

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

Air Catch Sensor

Brown DC (+) OUT 1 OUT 2 OUT 3 OUT 4 OUT 5 GND VCC NC OUT 6 L side R side Load Black OUT Main circuit + 12 to 24V DC MAX.80mA PSE Blue DC () ZSE4 ISE4 ZSE5 ISE5 PNP Open Collector (Sourcing) ZSE6 ISE6 Brown DC (+) q w e r t y ZSE3 ISE3 Main circuit 12 to 24V DC MAX.80mA + Black OUT GS Load Blue DC () PS ISA Precautions ZSE1 ISE1 Be sure to read before handling.

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Indicator light Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

Guide Table Series MGF ø 40, ø 63, ø 100

V Solid state switch Reed switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Yes Grommet 24 V 12 V IC circuit Water resistant (2-color indication) 5 V, 12 V 12 V 3-wire (NPN equivalent) IC circuit Z76 5 V Yes 24 V Grommet 2-wire Z73 Z80 100 V Relay, PLC 12 V No IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt

Digital Gap Checker

[September 2019] D: Contents revised in several places. [October 2021] E: Contents revised in several places.

PSxx-OMT0001CN

Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12

3-Position Rotary Table MSZ Series Size: 10, 20, 30, 50

V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PA1 M9PAV1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

Rotary One-touch Fittings Manifold Series KM

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB KM11-04-08-6 6 65 40 61.5 47 73 55 86 22 30 32 44 44 62 8 4 10.6 10 18 29.5 19.5 27 12 16 18.5 6 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 6 13 10 19.5 31.5 21.5 31 13.5 17 21 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 12 8 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 KM12/Dimensions Inch H (Hex.) Thead NPT T Applicable tube O.D.

IO-Link/ELECTRO-PNEUMATIC REGULATOR

Pressure can be set by sending input data from the master PLC to the regulator where the F.S is based on a 12 BIT resolution.

Flame Resistant

Dimensions L5 D4 Applicable tubing O.D. d H (Width across flats) A L4 D1 L3 D3 L1 M D2 T L2 [mm] Model T H D1 D2 D3 D4 L1 L2 L3 L4 L5 A M Weight [g] AS221F-G01-06W2D G1/8 12 13.2 14.2 14 7.2 23 31 17.6 39.2 1.2 34.7 17 26 AS221F-G01-08W2D 15.2 25.3 32.4 18.5 28 AS221F-G01-10W2D 18.5 32.1 39.2 21 30 AS221F-G02-06W2D G1/4 17 13.2 18.5 17 7.2 25.2 34.4 20.2 42.8 1.2 36.8 17 46 AS221F-G02-08W2D

HEC-OM-S019

B Display/Operation panel G RemoteAlarm output connector D Compressed air INOUT I Temperature sensor connector D C Heat radiating air suction port H Communication connector D A Power switch F ACDC connector C E Power connector 6 Outline Dimensions (mm) Controller Heat exchanger G H I 8 Maintenance 7 Key Parts C E F A C B