CG1-OM0227

P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3. GR-S-010(10g )GR-S-020(20g ) (XC85,X446)P25 1 2 3 4 8 1 100 83(g) L100mm 1 2 1mm 8. 8. g 20 25 32 40 100st 2 3 3 34 50st 0.5 0.5 0.5 1 20 3-2-4. 1) 8, 9 2 ( 8,) 10 3( 8,) 1mm 9. 10. 3-3.

SFOD-OMT0005CN

DRIVE ON )No.3 1 OUT1 OUT5 OUT 4 OUT 3 OUT 2 OUT 1 OUT 0 2 OUT2 OFF OFF OFF OFF ON ON 3 OUT3 4 OUT4 (1)RESET ON OFF (2) (3) () OFF 0 5 OUT5 6 7 ON 8 BUSY () BUSY OFF 9 SVRE OFF OFFON ON 10 SETON SETON()ON OFF -33- Word Bit INP ON (BUSY OFF) INP ON INP ON INP ON ()INP ON )100 80% 40%(*1) *1 11 INP 0 () INP [ON] 100 80 40 12 AREA 12 ON 13 WAREA W1 W2 ON 14 ESTOP ON

JXCx-OMT0028CN

3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1GW (B RATE) . 15 4.2 (CN2SW) . 16 4.3LEC . 16 4.4GW EtherNet/IP . 22 5. . 26 5.1 CN4 . 26 5.2 CN3 . 26 5.3 CN1CONT . 26 5.4 CN2PC/TB . 27 6.CN4 . 28 1 - 6.1 . 28 6.2 . 29 6.3 . 30 . 30 7.CN1(CONT) . 31 7.1 . 31 7.2 . 33 8.CNTB/PC . 34 8.1 . 34 9.LED . 35 9.1LED . 35 9.2 LED . 35 10. . 36 10.1 . 36 10.2 . 37 10.3 . 37 11.4 . 39 11. . 40

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) 15 to 40% ethylene glycol aqueous solution: Diluted with clean water, without any additives such as antiseptics. (Refer to "Operation at low ambient temperature or low circulating uid temperature" (page 186-1) for the concentration of the ethylene glycol aqueous solution.)

LZ-OM003xx

(Operation 60%, Holding 40%) Approx.4,000hrs. (Operation 60%, Holding 40%) Inspection every 6 m onths or the not use for 1m onth or longer. Cable No dam age, cracked or incorrect wiring Appearance No gouge or nick found on the body. Travel km 1,700 L[]Z[]3H 1,200 No debris, dust or water adhered.

Steam Valve

Symbol Graph (1) VND 02 D Pilot Pressure (N.O. type) Valve type Valve size N.C. N.O.

AME

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

CRQ2

40 Contents Description P473010-1 P473020-1 P473030-1 P473040-1 P473050-1 19, 20, 21, 23 Seal kit 4 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 With auto switch With auto switch Sizes 10, 15 Sizes 20, 30, 40 With cushion Sizes 20, 30, 40 With auto switch and cushion Sizes 20, 30, 40 5 Series CRQ2 Dimensions 3H9 effective depth 2 Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through (

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

40 Contents Description P473010-1 P473020-1 P473030-1 P473040-1 P473050-1 19, 20, 21, 23 Seal kit 4 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 With auto switch With auto switch Sizes 10, 15 Sizes 20, 30, 40 With cushion Sizes 20, 30, 40 With auto switch and cushion Sizes 20, 30, 40 5 Series CRQ2 Dimensions 3H9 effective depth 2 Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through

JXCx-OMT0002

(a) Direct Mounting with four M5 screws Mounting screw (M5) 4pcs. (prepared by customer) (b) DIN rail mounting The figure on the right shows how to mount the DIN rail mounting brackets. Secure the DIN rail mounting bracket using the mounting screws (M5 x 8) 2 places on one side (4 places on both Mounting screw M5X8 sides).

e-Rodless Actuator

(A clearance of 40 or more is required.) (60) (74.7) 101.7 60 (40) 80 40 74.7 27 27 4H7 depth 5 Motor 72 43.5 50 42 60 102 102 50.4 40 5 5.1 40 3.5 40 Long hole depth 5 Controller 4 15.5 6 7.2 5.6 (Max. 8.6) 14.4 6.5 4H7 2-6.5 counterbore depth 3.3 28 (60.3) 87.3 2 x 2-3.3 through hole 4 152 + Stroke 4-M4 x 0.7 depth 7 FG terminal M3 T-slot section for mounting I/O cable (9 wires) 5.8 3.5

SMC Pneumatic Clean Series

C D E GA GB H H1 J K KA MM N P M S ZZ A Up to 1000 30 27 60 22 44 16 32 33 15 51 8 M8 x 1.25 M14 x 1.5 6 14 11 1/4 27 102 164 40 Up to 1000 35 32 70 27 52 20 40 35 17 58 11 M8 x 1.25 M18 x 1.5 7 18 11 3/8 30 108 177 50 Up to 1000 35 32 85 27 64 20 40 35 17 58 11 M10 x 1.25 M18 x 1.5 7 18 14 3/8 31 116 188 63 Axial Foot Style (L) / CA2L, CA2L 10112122Relief port M5 x 0.8 2-cushion valve H

Support Guide/11-LEFG Series

(72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33 (40) 21.7 20 n x 3.5 Vacuum port M5 x 0.8 x 5 34 B D x 100 (= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180 11-LEFG16-S-150 244 157 230 11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300

Vacuum Saving Valve

(mm) Model M1 M2 L1 L2 L3 L4 H (Width across flats) D W (g) ZP2V-A5ZP2V-A8ZP2V-A01ZP2V-AG1ZP2V-AN1ZP2V-B5ZP2V-B6ZP2V-B01ZP2V-BG1ZP2V-BN1Tightening torque (Nm) Note) M5 x 0.8 M8 x 1.25 R1/8 G1/8 NPT1/8 M5 x 0.8 M6 x 1 Rc1/8 G1/8 NPT1/8 1.0 to 1.5 5.5 to 6.0 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 1.0 to 1.5 2.0 to 2.5 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 M5 x 0.8 M8 x 1.25 Rc1/8 G1/8 NPT1/8 M5 x 0.8

Rotary Table: High Precision Type

Mounting dimension in axial directions Size Tap depth for the Tap depth for the top Bolt bottom mounting mounting 1 8 4 M4 3 8 7 M4 7 10 7 M5 20 11 7 M6 Vertical mounting body through hole Body side mounting body through hole Table 9. Mounting dimension in body side Size L Bolt 1 38 M4 3 44 M4 7 50 M5 20 59 M6 28 Piping Fig. 4 and Table 10 show port position and size.

Drain Separator for Vacuum Series AMJ 1

AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

CYP

-06-X214 Caution 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 1.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.