New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

1 !0oi q w e r t y u i !1 !2 No.

C95Series

. ~ .. )1 ..._... __ I -='.1' .J.. ~ ~ _.

Suction Guard (Produced upon receipt of order) FHG Series

Note 1) 1 1/4B 90 1 1/2B 120 Note 2) 2B 200 2 1/2B 315 3B 450 Description Part no.

High Vacuum L Type Valve

Use dust-free gloves. 16 XL-OMS0001-B Step 5 Remount of external seal Step 6 Reassembly of bonnet assembly (No.1) Valve seal 1 External seal Mounting part of the external seal Bellows holder Bonnet assembly Body Wipe off any dust from the surfaces of the valve seal 1 and the bellows holder.

-fl Seies

: Sta. l) NVFR2l 10-3G Sta. 2-6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

How to Order Valves How to Order Manifold Assemblies Example 4 0 5 SY 3 1 FU Single solenoid 2 position single Supply/Exhaust block (U side mounting) SY3140-5FU (3 sets) Double solenoid 5 FU Double/3 position 5 SY 3 2 4 SY3245-5FU (1 set) Series 3 SY3000 5 SY5000 Type of actuation 2 2 position double 3 3 position closed center 24VDC +COM + 1 2 3 Stations D side U side 4 3 position exhaust

Digital Flow Switch

[F 1] Setting of OUT1 completed.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

: Sta. l) NVFR2l 10-3G Sta. 2-6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

Speed Controller with One-touch Fittings Series AS In-line Type 1

Flow Rate and Effective Area AS3001F AS2051F AS4001F AS2001F AS1001F Model Metric size 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 5/32" 3/16", 1/4" 3/16" 1/4", 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Inch size Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Air flow /min (ANR) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area (mm 2) Note) Flow rate values

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

PSxx-OMU0008CN

-2No.PS-OMU0008CN-D 1 / *3) 1 1.5 3) 1 1 -3No.PS-OMU0008CN-D () () () () -4No.PS-OMU0008CN-D () * UL UL1310 2 UL1585 2 30 Vrms (42.4 V )(2 ) UL (1 20 ) N G -5No.PS-OMU0008CN-D SUS630SUS304 * FG (35 N () () TSJ(Swagelok URJ (VCR)/ Swagelok,VCRSwagelok Company *() 6 33 -6No.PS-OMU0008CN-D () () 30 m DC(-)() () * ( ) () CE -550(5) SUS630()SUS304() () / -7No.PS-OMU0008CN-D * 1015

VZM400

6 !0 PE PE e !5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !

Rotary Actuated Air Gripper

M3x0.5 0.88 6 3 +0.02 0 6 M(D)HR3-15 9 !

Air Suction Filter

Example: In case of 6 stations of air suction filter ZFA100-01 ZZFA1-06 1 pc. (Brackets for 6 stations) ZFA100-01 6 pcs.

Pressure Sensor Controller

(Er4, 6, 7, and 8) is indicated. (1)Bring the pressure back (1)Check if the pressure gets over within the set pressure range. 7 The display the upper limit of the set pressure range. shows "HHH". Applied pressure is over the upper limit (HHH). (2)Take measures to prevent (2)Check if foreign matter got into foreign matter from getting into the piping.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

MHS2-32D MHS2-40D Q 11 12 RA 38 44 SA 4.5 5.5 FX 23 26.5 G 30.5 32 AA 44 47 NA 14 16 J 20 21 AB 41 44 L 2H9 3H9 B 56 62 DO 64 70 DC 56 62 EO 24 28 EC 16 20 CA 8 9 CB 16 17 FY 20.5 23.5 FZ 5 6 +0.025 0 +0.025 0 Model MHS2-32D MHS2-40D UA M5 x 0.8 M6 x 1 UB 10 12 VA VB 3 4 WA XA XB 3 4 SB 8 9.5 +0.025 0 +0.030 0 +0.025 0 +0.030 0 +0.062 0 +0.062 0 34H9 3H9 4H9 3H9 4H9 42H9 6 Series MHS 2

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

Hand Valve Series VH 1

4 3 1 7 9 SA 1 (P) VA 4 (B) 2 (A) 3 (R) 2 SA VA VH300/400 VM 8 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 VR 4 3 VH 1 9 VHS 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component Parts Material VH200/300/400 Zinc die-casted Aluminium

ZSM1-115/121

. 887 Technical Information Pressure units conversion (Approximation) 16 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Valve stations are numbered from station 1 on the D side. Indicate the valves to be mounted below the manifold part number, in order starting from station 1 as shown in the drawing.