Oscillation Angle A: 190°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy(J): 0.048, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy(J): 0.048, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy(J): 0.048, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

High Vacuum L Type Valve

Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2

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To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e. CAU TI O N O perat or error coul d resul t i n i nj ury or equi pm ent dam age.

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To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e. CAU TI O N O perat or error coul d resul t i n i nj ury or equi pm ent dam age.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

J Setting of security code (F81) The user can select whether a security code must be entered to release the key lock. At a time of shipment from the factory, it is set such that a security code is not required. Made to Order 36 ZSE20(F)/ISE20 Series The F in ( ) shows the function code number. Refer to the operation manual for details about operation procedures and function codes.

Dedicated Controller

(P-no.) label Condition jump General purpose input no., State OR input condition jump command J-OR (P-no.) label Program control commands T-bracket Parameter value Classification Function Instruction Jump Unconditional jump command (P-no.) label JMP Subroutine call command (P-no.) label CALL Sub-routine Subroutine end declaration RET Loop start command Loop frequency FOR Loop Loop end command

Suction Filter with Case FH99 Series

A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126 50 70 69.9 35.7 30.2 58.7 16.5 8 16.5 1 1/4B 1 1

Suction Guard (Produced upon receipt of order) FHG Series

W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69 69 74 80 80 85 R 70 70 70 85 85 85 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (

Hydraulic Filters

After washing the element, make sure the base seal is properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA