Micro Mist Separator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

PSxx-OMT0005CN

3585RH() CERoHS M12 3 m 02 R1/4M5x0.8 C3604+ Al2O3(96) FKM M12 103 g M12 191 g AWG23 0.72 mm 1.14 mm 4 -13No.PS-OMT0005CN-A [mA] [V] A B PSE575 02 MPa 0 2MPa PSE576 05 MPa 0 5MPa PSE577 010 MPa 0 10MPa -14No.PS-OMT0005CN-A M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1 M12 ZS-31-X175 -15No.PS-OMT0005CN-A Revision history A 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel:

Precision Regulator

Flapper Diaphragm(A) Fixed orifice Diaphragm(B) IN Nozzle BLEED BLEED Exhaust valve Diaphragm(C ) SUP. passage SUP OUT Main valve Valve guide Adjusting spring N/m Fi xed ori f i ce Screw displ m S UP For ce N Fo rce N Nozzle flapper MPa/ m Diaph.(B) m2 Main valve MPa/ m (S) 1 1 Daiph (A) m2 press Press Press. Displ m Displ m spring Compd. spring Compd.

Air cooled Thermo-con (Compact type)

Length of communication cable for RS-485 shall be limited to around 500[m] in total, and that for RS232C shall be 15[m].

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Filtration degree should be 5 m or less. ( ): VHS500 1943 1944

Air Filter

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.

PSE540/560

Do not drop, bump, or apply excessive impact (PSE540: 980 m/s2, PSE560: 500 m/s2) while handling. Although the body of the sensor may not be damaged, the inside of the sensor could be damaged and lead to malfunction. 2. The tensile strength of the cord is 50 N. Applying a greater pulling force to it can cause malfunction.

VXP21/22/23

N M N M M N Q L K J H F E D C B A P Applicable thread Pc Normally open Normally closed VXP2270 VXP2380 VXP2390 VXP2272 1 43.5 46.5 52 51.5 54.5 59 53 60 71 67.5 72 81 48 50 50 95 97 97 62 64 64 125 132 150 128 (145) 144 (159) 160 (175) 26.5 30 35.5 57.5 60 69 23 25.5 25.5 35 40 40 92 (102) 103 (113) 114 (124) 25.5 28 28 84 (94 ) 95 (105) 106 (117 ) 41.5 84 (94) 95(105) 106(117) 60 62 62 84

Precision Regulator

Diaphragm( A) IN BLEED BLEED Flapper Nozzle Fixed orifice Exhaust valve Diaphragm(C) SUP side passage OUT SUP Main valve Valve guide Screw displ m Adjusting spring N/m Fixed or ific e SUP Force N Fo rc e N Nozzle flapper MPa/ m Diaph. (C) m2 Main valve MPa/ m (S) 1 1 Displ m Displ m Daiph (A) m2 press MPa Press Press. spring Compd. spring Compd.

PSxx-OMM0002CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 9 / / 10 () 11 /5 m / 12 10~15 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -47No.PS-OMM0002CN-F No. 14 15 16 () 17 () ( ) () / -48No.PS-OMM0002CN-F 80mA 10 1 1dight 1 -49No.PS-OMM0002CN-F ISE80() ISE80H() ZSE80() ZSE80F() -0.11MPa -0.12MPa 0-101kPa -100100kPa -0.1051.1MPa -0.1052.2MPa 10-111kPa -110110kPa 2 MPa 4 MPa 500 kPa 0.001 MPa

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

XB13 CXT Standard part number M L Microspeed cylinder Specifications Guide cylinder Slide unit Compact guide cylinder Dual rod cylinder Compact slide Platform cylinder Magnetically coupled rodless cylinder CJ2 CM2 CG1 MB CU CQ2 CQS CY1 MGP MGGM MGCM CX2 CXW CXS MXU Air cylinder/Standard type Freemounting cylinder Compact cylinder Compact cylinder Applicable cylinder M L M

Air-hydro Unit

Conditions: Operating pressure 0.5 MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1 m AS500-06 AS420-02/03/04 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load CC CC Load ratio Load ratio Refer to Best Pneumatics No. 7 for the details of speed controllers.

A

-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

Soft Start-up Valve AV2000/3000/4000/5000

300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000

HRX-OM-W058

Out put type Current consumption Flow switch SMC PF3W7--A(-M) NPN open collector output 70mA or less PF3W7--B(-M) PNP open collector output 70mA or less 1. Prepare the external switch 2. Depending on the external switch output type, wire the switch to the communication connector for contact input / output (which is included as an accessory) as shown below.