SMC Corporation of America
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Lubrication If operated with lubrication, be sure to continue the lubrication. 5.

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. 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART. 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1 Clean the dustproof filter

. i-3 i-2-6 . i-4 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-2 2-2-1 . 2-2 2-2-2 . 2-3 2-2-3 . 2-3 2-2-4 . 2-3 2-2-5 . 2-4 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6-7 7 A 7-1

03 E30002 03 04 E500-06 Note 5) Piping adapter E400Note 5) IS1000E-20 01 02 03 IS1000E-30 02 03 04 IS1000E-40 Pressure switch with piping adapter Note 5) Y2401 02 Y3401 02 Y4402 03 Y5403 04 Cross interface Note 1) in part number for the round pressure gauge indicates a type of connection thread.

Remove the thin head screws (TP-M3 x 5, 8 pcs.) fixing the pulley cover using a hexagon wrench. Use a normal hexagon wrench. TP-M3 x 5 TP-M3 x 5 2. Pull out the pulley cover in the direction of the arrow. Pulley cover Motor mounting process 1.

R Current read value For example, when the display value is 1.000[MPa], 5%R.D. is 5% of 1.000[MPa], which becomes 0.05[MPa]. When the display value is 0.800[MPa], 5%R.D. is 5% of 0.800[MPa], which becomes 0.04[MPa]. R.D. The pressure range within which the product will meet all published specifications.

D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mWV D-M9mAV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) *1 When n is an odd number, an even number that is one larger

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle

V20 mA [F22] [AnA] [AnA][-] [F22] -48No.PF-OMM0004-D OFF ON 5 V 20 mA 10% [F22] -49No.PF-OMM0004-D [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] [F30] 2 5 OFF OFF 2 5 B -50No.PF-OMM0004-D [F80] 12% 30 ON [F80] [dSP] [F80] ON 30 OFF -51No.PF-OMM0004-D [F81] 58 [F81] [PiN] [F81] -52No.PF-OMM0004-D [F82] 6 ([F10](43 )) [F82] [LiNE] AbCXyZ0189 /

Analogue output 1 to 5 V Output impedance 1 K Max.28 V, 80 mA Internal voltage drop 1 V max.

1.5 5 5 100 to 120 200 to 230 200 to 240 200 to 230 200 to 240 200 to 240 200 to 240 200 to 240 200 to 240 A1 LECSA1-S A 10 A2 LECSA2-S * The length of the encoder, motor and lock B2 LECSB2T cables are the same.

Specific service None. -26No.EX-OME0003-H 5. DeviceNet Connection Object (Class ID: 05h) 5-1. Class attribute ID Access rule Description Value 5-2. Class common service Service code Service name 5-3.

range: 19 VDC to power supply voltage Current consumption: 5 mA or less Connect with +24V Voltage range: 19 VDC to power supply voltage Current consumption: 5 mA or less Ionizer stop signal Connect with 0V Voltage range: 5 VDC or less Current consumption: 5 mA or less Connect with 0V Voltage range: 5 VDC or less Current consumption: 5 mA or less Input signal Cleaning signal Maximum load

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Description Contents MHF2-20D MHF2-20D1 MHF2-20D2 DMHF20-PS MHF20-PS MHF20-PS Seal kit 20, 21, 22 MHF-A2002 MHF-A2002-1 MHF-A2002-2 Finger assembly 3, 4, 5, 6, 14, 16, 19 Mounting screw Replacement part/Grease pack part no.: MHF2-D, D1 (12, 16, 20) MHF2-D2 (12) GR-S-005 (5 g) (Guide unit) GR-L-005 (5 g) (Cylinder unit) GR-S-005 (5 g) (Guide unit) MHF2-D2 (16, 20) GR-L-010 (10 g) (Cylinder

4 2 5 A 10 x 8 3/4" x 5/8" 5 1 5 B 19 x 16 1/2" x 3/8" 5 2 6 A 12 x 10 1" x 7/8" SMC 6 1 6 B 25 x 22 3/4" x 5/8" 6 2 19 x 16 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor.