Connector Type: FD (D-sub Connector, 25 Pins), Connector Entry: 1 (Upward), Stations: 10 Stations, SUP, EXH Block Mounting: D (D Side 1~10 Stations), Pilot Specification: S (Internal Pilot w/Built-in Silencer), SUP, EXH Block Fitting Spec: Straight Fitting, DIN Rail Length Specified: 10 Stations

Series: 1 (10-SV1000), Base Type: 10, Connector Type: PG (Flat Ribbon Cable Connector: 20 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 06 (6 Stations), P, E Port Location: D (D Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6), Mounting: D (DIN Rail Mounting w/DIN Rail)

EXxx-OMV0018_ENG

Solenoid on side A 2 Side D BUS IN: M12 4-pin socket D-coded (SPEEDCON) (SI unit side) 1 Output No. Solenoid on side B 1 3 5 7 9 17 29 31 No. Designation Description 1 3 5 7 1 1 5 7 Bit No.

Large Flow Air Filter AF800/900 Series

D-R Note 3) Options for 2, 6, and 8 can not be specified at the same time. (Ex.) 68 Note 4) Symbols 9, D, J can not be specified at the same time. (Ex.) 9-D-J Note 5) For products with auto drain, either symbol D or J cannot be specified at the same time. 1 Indicate the required filtration rate after the symbol 1. Ex.)

VFR5000-OMN0001

VFR5000-OMN0001 VFR5000 Series/ 01F D COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D

Jxx-OMT0084

Dimensions JT Symbol Applicable cylinder Nominal screw size For 20 20 20 M81.25 For 25 25 M101.25 32 For 32 M101.25 For 40 40 M141.5 Maximum Connecting Width depth of Weight Model screw A B C D E F G across the thread M flats H P JT20 M8 x 1.25 19.2 8 11 25.4 23 10 13.7 22 9.5 22g JT32 M10 x 1.25 23 10 13.4 30.8 28 12 16.3 27 11.5 38g JT40 M14 x 1.5 29 14 19 40.4 37.4 17 20.3 36 15.5

10%3020Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)175UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Hand Valve Series VH

3 (R) 12 4-Rc 1/4, 3/8 12 4-Rc1/4 VH33l-02 to 03 (Bottom piping) 2 (A) 44 Panel cut dimension 1 (P) 3 (R) 2-A +0.3 0 C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 Model B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 3.6-12 Series VH Panel Mounted/Dimensions VH41l-02 to 04 VH41l-06 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 107.5 19 l102 102 89

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Note 3) 10 to 15 in decimal number are displayed as follows in the 7-segment LED. Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 47

E-P HYREG ® VY1 Series

2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Mounting Port 1(P), 2(A) Port 3(R) Applicable pilot valve (4) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5

10% Max. supply current 2 A24 VDC +10%/?5% Max. supply current 2 AIP67 (Manifold assembly)?

10% Max. supply current 8 A24 VDC +10%/?5% Max. supply current 8 AIP67 (Manifold assembly)?

10% Max. supply current 8 A24 VDC +10%/?5% Max. supply current 8 AIP67 (Manifold assembly)?

10% Max. supply current 2 A24 VDC +10%/?5% Max. supply current 2 AIP67 (Manifold assembly)?

10% Max. supply current 2 A24 VDC +10%/?5% Max. supply current 2 AIP67 (Manifold assembly)?

10% Max. supply current 8 A24 VDC +10%/?5% Max. supply current 8 AIP67 (Manifold assembly)?

The use of 34 pin connectors allows up to 16 stations with double solenoids.Tie rod base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Maximum number of solenoids: 24, Number of connectors: 26, 25, 20, 10 pins, Maximum 20 stations available as standard, 6 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V1 MANIFOLD SV1000, UN,