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. -6- Revision history First edition: February 2017 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved

./2015 2nd printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 13 -

For the saving parameters from SigmaWin+ to file destination, refer to Section 4.4. 4 6 5 7 19 - Revision history No.LEC-OM09601 Sep/2015 1st printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Otherwise, it may lead to a Return to Origin error. 20 - Revision history 1st printing: Revised in November 2015 A: Revised in November 2019 B: Revised in June 2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Make sure that the pad is correctly in place (The pad is not lifted from the surface) Remove the old pad Fit the new pad into the groove 24 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

When it is necessary to disassemble, please contact the SMC Sales representative. 26 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 27 -

When it is necessary to disassemble, please contact the SMC Sales representative. 28 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 29 -

Dimensions SFD110-C** SFD110-C** dimensions Model A B C04 4 81 SFD110C06 6 81 C08 8 82 SFD110-*02* Bracket mounting dimensions Hole shape for bracket mounting *Use a countersunk head screw (M3) for bracket mounting 9 Document No.DOC1018377 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications

. -1EXH 7 1 4 -11- -12-12- Revision history A Sectional view filter deletion of P.5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

EXH 7. 1 4 -11- -12- Revision history A Sectional view filter deletion of P.5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa -6VEX-OMO0001 3 VEX1 3 Series 0 +0.1MPa 2 PE(ASN2-M5) 0.1MPa P1 O M5 P1 O VEX1-A30-3 O P1 P1 P1 M5 -7VEX-OMO0001 (PE) Best Pneumatics No. () VEX1333-03 G36-4-01 -8VEX-OMO0001 P1 P1 02A 3R (VBA1-10) 3R () PE 3R PE 2A / (VBA1-10) P1 O PE 3R 02A 3R 2A / 2A -9VEX-OMO0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

[F 5] Setting of analog output/auto-shift input Analog output [F 6] Setting of fine adjustment of display value 0% 1000-split [F11] Setting of display resolution Tube OFF [F80] Setting of power saving mode To the safe position to keep from water and dust URL http://www.smcworld.com OFF [F81] Setting of security code Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone

[F 6] Setting of fine adjustment of display value 0% 1000-split [F11] Setting of display resolution OFF [F80] Setting of power saving mode OFF [F81] Setting of security code URL http://www.smcworld.com OFF [F90] Setting of all functions OFF [F97] Selection of copy function Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Ver.A

Green 1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 6 9 5. Apply a thickness gauge again and check that the Green turns on.

[December 2020] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. EtherNet/IPTM is a trademark of ODVA. 2018-2020 SMC Corporation All Rights Reserved. No.EX-OMV1026-B

No. 15 No.VFS4000-OMY0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved No.VFS4000-OMY0001

ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2 3 4 5 6 7 8 9 10 (m) 4 11 7. 4 (EXH) 1/8 (PIL) R 3 (R) 21/8 2 (A) 1 (P) 2M61 8 () 2x6.5 M6x1x12 4xM6 4X7 t=2 t=3 12 Revision history DVM VM100-A E (JIS) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101