Process Pump

Read and understand the Material Safety Data Sheet (MSDS) carefully before using the product, and use appropriate protective equipment (e.g. goggles). 5 1. Precautions for system design Warning (1)Confirm the specifications.

KR

(mm) Connection thread R Model L1 L2 D1 Applicable tubing KRW06-02S KRW06-01S 1 8 26 41 67 30 47 74 66 76 145 10 42.5 40 46 48 43.5 49.5 51.5 56.5 58.5 65 57.5 59.5 66 10 20 48 46.5 1 4 17 4.0 14 17 12 14 17 12.8 6 8.6 KRW06-03S 47 14.2 3 8 1 8 KRW08-01S KRW08-02S KRW08-03S KRW10-02S KRW10-03S KRW10-04S KRW12-02S KRW12-03S 1 4 3 8 1 4 3 8 1 2 1 4 3 8 51 52.5 59.5 61 66 62 63.5 15.2 12 23

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

VNC

push type 9 Other 20 (14) 3 Option 25 (16) 4 Valve size 2 to 9 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F 40A 1 1 2 40 (28) 6 1 B 1 2 Flange 40F Electrical entry/With light/surge voltage suppressor 50A Nil Air operated 2 50 (33) 7 GS Grommet with surge voltage suppressor G Grommet 2B Flange 50F E Grommet terminal 2 B 1 2 Flange 65 (45) 8 65F Valve size 1 EZ Grommet terminal with light/surge

VN-OMP0002

-2VN-OMP0002 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 3 3 3 3) ) ) ) 1 1 1 1 1 1 1 1 () -3VN-OMP0002 . . . . 1) 5, 2) ( ( ( ( ) ) ) ) () IP65 IP65 IP65 IP65 1) ( ). 50mm 2/s 2) 3) ,, ,.( ). 1) . 2) 5m 3) 4) ,, , . , 1.5~2 . 2 4 VN-OMP0002 3) 0.1MPa , , , , , Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 2830 Rc1 3638 Rc1 1/4 4042 Rc1 1/2 4850 ( ( ( ( 5, 6, 7 5, 6,

EX510-GPR1.eng

INPUT COM D COM C COM B COM A Settings 2 4 Mounted by screw 54 5 16 70 5 PWR (V) Put Claw 1 of the body under DIN rail and push it upward.

Booster Regulator Series VBA1110 to 4200 1

Pressure gauge Lubrication Not required ITV Installation Horizontal AN200-02 AN400-04 AN300-03 AN300-03 AN400-04 Silencer Pressure adjustable mechanism Relieving type IC How to Order Pressure VBA Pressure increase ratio 2.0 MPa 1 Twice 4 times 0 1 VE Pressure setting Handle operated type 1 Port size VBA1110-02 VY1 Body size Port size Rc 1/4 Symbol 02 1/4 1 VBA1-02 G VBA 1 1 02 1 0 GN Series

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

single 1 4 Power saving circuit is not available for D, DO, Y, YO or W types. 10-SY9000 (A)4 2(B) 3 8 1 F2: With side bracket One-touch fitting (Metric size) 1 (P) (EA)5 3(EB) Symbol Port size Applicable series For DC 2 position double 4 One-touch fitting C4 10-SY3000 2(B) (A)4 5 24 VDC 6 12 VDC 6 One-touch fitting C6 2 4 One-touch fitting C4 (EA)5 1 (P) 3(EB) V 6 VDC 6 One-touch fitting

SGC200-OMJ0004

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) , 1. 2. 3. 1. 2. 3. 4. 2 SGC200*-OMJ0004-A / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / ( ( ( ( ) ) ) ) () IP65 IP65 IP65 IP65 80100 ( ) 1) 1) 1) 1) 2) 2) 2) 2) 5 3) 3) 3) 3) , , , , 4) 4)

POWER CLAMP CYLINDER

Arm angle [] Bore size [mm] 15 30 45 60 75 90 105 120 135 0 0 0 0 0 0 0 0 0 75 90 105 120 135 50 15 30 45 60 -3 -4 -5 -5 -5 -5 -5 -6 -9 1 0 0 0 0 0 0 0 0 75 90 105 120 135 63 15 30 45 60 -3 -4 -5 -5 -5 -5 -5 -6 -9 (7) Do not disassemble the power clamp cylinder. The power clamp cylinder consists of a completely sealed structure in order to protect it from welding spatter.

High Vacuum L Type Valve

Doc.no XL*-OMI0013-B PRODUCT NAME High Vacuum L Type Valve MODEL / Series / Product Number XLS Series Contents Safety Instructions 2 1. Precautions on handling 1 4 (Precautions on Design, Selection, Mounting, Piping, Maintenance) 2. Precautions on handling 2 5 (Maintenance parts) 3. Specifications 7 4. Construction / Operatio --8 5. Dimensions --9 6. Period and Scope of Warranty 10 7.

ISE70/75/75H

Note 1) G1/4: Applicable to ISO1179-1 With bracket Output 43 Fixed setting: NPN open collector 1 output (Pin no. 4) + PNP open collector 1 output (Pin no. 2) A 2 1 65 PNP open collector 1 output (Pin no. 4) 4 3 Note) Mounting screws are not included.

Pressure Relief 3 Port Valve with Locking Holes

Spacer (Y-D) Spacer with bracket (YT-D) Pressure relief 3 port valve -9- 5. Construction / Parts list (1) Standard Standard specifications No.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Note 3) PLC: Programmable Logic Controller Note 1) Lead wire length symbols: 0.5 m M9BW 1 m M Nil M9BWM 3 m L M9BWL 5 m Z M9BWZ Refer to page 889 for the applicable auto switch list.

VG342

light/surge voltage suppressor VQ DIN terminal (D) VKF VQZ VZ VS VFN Max. 10 (Surge voltage suppressor) Manual override (Non-locking) Applicable cable O.D. 6 to 8 Rc 1/8 (External pilot port) Rc 1/8 (Pilot exhaust) Switching plate (Light) (Mounting hole) Rc 1/2, 3/4, 1 (P port) Rc 1/2, 3/4, 1 (A port) Rc 1/2, 3/4, 1 (R port) 4-9-5

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

c

Operating temperature (oC) 1 Fluoropolymer Tubing (PFA) Inch Size Series TILM RoHS Series Inch size Size Model Tubing size inch mm inch mm TILM01 1/8" x 0.086" 1/8" TILMB01 1/8" x 1/16" 1/8" TILM05 3/16" x 1/8" 3/16" 4.75 1/8" 3.15 TILM07 1/4" x 5/32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

5 5 120 130 5 5 Driver input/output signal list (CN-1/F connector) Driver dimensions For LJ1, LG1, LX Pin no.

PSxx-OMG0001CN

-2No.PS-OMG0001CN-H / 1 1.5 *3) 3)1 1 -3No.PS-OMG0001CN-H () () () () -4No.PS-OMG0001CN-H () * UL UL1310 2 UL1585 2 UL * FG -5No.PS-OMG0001CN-H * 6 33 () () 30m30m DC(-)() * () CE 050 (5 ) -6No.PS-OMG0001CN-H * 2030 1 LCD * -7No.PS-OMG0001CN-H E DIN 0 1 3 0 NPN2 +15 V 1 NPN2 +420 mA C 2 NPN2 + 3 PNP2 +15 V 2 4 PNP2 +420 mA 5 PNP2 + A B D + 1 2 M SI 1 1 2 L

EX600-SDNA_eng

(Default setting) 8 7 Configuration Mode Address X1 9 6 x10 x1 2 1 0 0 5 Mark C on the unit Mark B at cable end Mark A at cable end 4 Address 1 9 4 3 1 0 : : (1) 2 3 Input data + System diagnosis + Unit diagnosis (Up to 10 units) Input data + System diagnosis Input data only (Default setting) 8 7 9 6 6 Content 3 4 1 2 0 5 Content 5 0 (Default setting) 4 1 2 3 Node Address Data Rate 8 7 PGM