Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

24 22 9 59 68 15 76 40 29 55 MXP12-15B 42 40 29 89 98 25 106 60 49 75 MXP12-25B 12 Series MXP Dimensions MXP16 Z 3 With metal stopper 2-M5 x 0.8 depth 8 V K 6.5 5 M G Max. 4 Max. 4 11 25 2-M4 x 0.7 depth 6 Stroke: S MXP16-20 Width across flats 3 Width across flats 8 Piping port A 17 2-M5 x 0.8 (Plug: M-5P) 11 H 26.7 M6 x 1 10.5 5.5 35 34 8.5 A 30 4-M6 x 1 4-M5 x 0.8 depth 7 Prepared hole

Series AP3100

Code Knob Multi turn round knob 1/4 turn lever knob 4) Indication of opened/closed status. 600 625 Connections (Inlet, Outlet) Code Installation option 1/4 turn round knob with open/close indication window 650 Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld Code Installation Bottom

LECP6_C

I/O ()1 I/O (8 ) 64 / I/O 12ON 6 - 2.2.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

370 440 100 120 130 160 180 210 246 290 ITVX 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 PVQ 3 4, 1 3 4, 1 VY1 Adapter Assembly Installation Procedure Accessory/Compact Pressure Switch: IS10-01 For details, refer to Best Pneumatics No. 8.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

) Bottom through hole dia. 5.1 (Mounting hole) 2 x M6 x 1 thread depth 12 (Mounting thread) 47 29 42 58 45 30 32 9 +0.2 +0.1 23 2 34H9 +0.062 depth 4 0 27 30 4 x M6 x 1 thread depth 7 Rc 1/8 (G1/8, NPT1/8) (Finger closing port) 45 (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 32.9 20 20 51 11 11 Rc 1/8 (G1/8, NPT1/8) (Finger opening port) 25 13 MHW2-32D1 5 Right

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

supply systems AS-Interface, 8 in/8 out, 31 slave modes, 1 power supply systems AS-Interface, 4 in/4 out, 31 slave modes, 1 power supply systems 1 to 4 stations (8) SDTA VQ 1/2 IP67 compliant 1 to 2 stations (4) SDTB SI unit: EX600 Note) A separate gateway unit and communication cable are required.

CXT

1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10 9.5 15 17 19.5 25.5 8 8.5 3.5

Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

SI unit for DeviceNet ®

No.5 No.6 No.7 No.8 No.9 No.10 32 16 8 4 2 1 0 0 0 0 0 0 0 1 0 0 0 0 0 1 MAC ID 2 0 0 0 0 1 0 : : : : : : : 62 1 1 1 1 1 0 63 1 1 1 1 1 1 Communication speed setting (switches No. 3 to 4) The DeviceNet communication speed is binary coded and can be set to 125 kbps, 250 kbps and 500 kbps. : Factory default setting is 125 kbps. 0: OFF 1: ON Switch No.

Digital Pressure Switch ( compatible)

[F 1] Setting of OUT1 completed 1: Selected item becomes valid after pressing the button. 2: After enabling the setting by pressing the button, it is possible to return to the measurement mode by keeping pressing the button for 2 seconds or longer. -35No.PS-OMX0002-A List of output modes 1: The applicable errors are Er6, 8, 9, 15 as well as Er1 (excluding the error output). : The chart above

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.

High-precision Digital Pressure Switch

value (main display). (1) Press and hold the SET button between 1 and 3 seconds in measurement mode.

SYJ Series

Connector mounting position SYJ300 M1.7 0.12N.m SY3000-37-81A-2-N Single1 to 4stations SYJ500 M2.5 0.45N.m SY3000-37-81A-2-5 Double/3 position : 1 to 4 stations SS5YJ3-21,32SA SY3000-37-81A-1-N Single5 to 8 stations SYJ700 M3 0.8N.m SY3000-37-81A-1-4 Double/3 position : 5 to 8 stations SS5YJ5-20,40,42,43SA SY3000-37-81A-2-N Single1 to 8stations SY3000-37-81A-2-5 Double/3 position : 1 to 8

VT325

valve VO325-00 VP Port location/Port size Port direction P Exhaust port type P R A A R Base Base Base S070 Common Side Side/Bottom Side 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , Option Blanking plate (With seal, screw) DXT083-21A VQ VKF VQZ Accessory for Applicable Solenoid Description Manifold gasket Part no.

VVX31/32/33

<* 1 LVA Orifice size 1 2 3 4 5 6 77 6 6 0 6 LVH Rated voltage 1 2 3 4 7 8 ,, 9= 5,'., ?

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

It should be used as prefilter of compressed air for precision instruments or clean room required for higher clean air. (1) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa

3 Port Solenoid Valve SYJ300/500/700 Series

Valve Valve Base Base Base A port specifications Direction Top Top Bottom Bottom Side 1/4 NPTF 1/8 NPTF 1/8 NPTF 1/4 NPTF 1/4 NPTF P,R port 1/8 NPTF 1/4" onetouch fitting 1/8NPTF 1/8NPTF 1/8NPTF 1/8NPTF N7T Port size A port 5/16" onetouch fitting N9T X port Note 1) M5 0.8 M5 0.8 M3 0.8 Body ported type SYJ7 2/SYJ7 2R 10.6 (0.59) Note 2) Valve effective area mm2(Cv) 1/8:9.2 (0.51) N7T:8.8

MRHQ

Port B 4-M6 x 1 depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 R SMC R E 16 8 O P P T A I R R G Y R A I 48 36 Side A Side B 12-11-15 16 Series MRHQ Dimensions MRHQ25 A 70 58 B 93 4-M6 x 1 depth 10 47 64 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 66h9 0

39

8 t Rubber cover !0 q e !1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Air/Manually Operated High Purity Chemical Valve Series LV

A B A B Non-locking Locking Threaded Type LVH20 4 LVH30 8 LVH40 12 Model Orifice diameter Material SUS316 PPS PFA 1/4 3/8 3/8 3/8 SUS316 PPS PFA 3/8 1/2 1/2 1/2 SUS316 PPS PFA Port size 1/8 1/4 1/4 1/4 Symbol Type Basic type Valve type N.C. A B A B Non-locking Locking Manifold (5 stations max.)