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in the state similar to direct The installation as shown on Fig. 3-1 and 3-2 are connection. recommended, but if they are not available due to mounted load, the installation like above can be substituted.

Removing Loosen clamp ring (1), and separate the multiconnector into two parts, multiconnector into two parts, socket side and plug side. (1) Clamping ring K (3) Case B M D H Insertion and removal of tube D + Driver (5) Barb (6) Clamp bolt (3) Case (2) Stopper Connection 1.

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 CL A CL1 MLGC CNG A MNB C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B CNA M(D)LUB25 CNS y CLS !9 i o !5 @0 CLQ Extension locking w q MLGP Section A-A' !

F O T I D G 3 7 I D G E L 3 H F O T I D G 3 H1 E N 4 0 0 U l e s e t T u b e c o n n e c t i o n D o r t for purse air e]-!-q-U.!-! a m e t e r : 8 m m I D G E L 5 F O T I D G 5 I I D G E L 5 H F O T I D G s H t D e w ( 0 p t i o n : S ) 4 5 1 3 3 5 N / C C o r p . I 6 4 , 1 C h o m e , 5 h i m b a s n i , M i n a t o k u T o k v o 1 0 5 0 0 0 4 , J a p a n T E L . 0 3 3 5 0 2 B ?

ULTIC ARMOR R is a registered trademark of Nippon Valqia Industries, Ltd. 6 XL*-OMJ0005-C 3. Specifications 3-1. Valve specifications 3-2.

1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Recommended tightening torque (Nm) Thread size 1/4 3/8 1/2 Torque 12 to 14 22 to 24 28 to 30 -9- (2) Do not apply torsion or bending moment other than the weight of the product itself.

(V)), 3-wire (D-M9NW(V),D-M9PW(V)) Impact proof 1000 m/s2 Insulation resistance 50 M or more under the test voltage 500 VDC (between case and cable) Withstand voltage 1000 VAC 1 min.

3 @2 @1 @5 !1 !0 Section AA' @0 u @8 r y !6 @3 @4 e !7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

in the state similar to direct The installation as shown on Fig. 3-1 and 3-2 are connection. recommended, but if they are not available due to mounted load, the installation like above can be substituted.

Doc. no.MX*-OMP0038PRODUCT NAME AIR SLIDE TABLE MODEL / Series / Product Number Contents 1. Product Specifications 1-1 Specifications 2. How to use 2-1 Mounting 2-2 Air supply 2-3 Piping 2-4 Operating environment 2-5 Lubricating 2-6 Speed adjustment 2-7 Handling of optional adjuster 2-8 Handling of optional function 2-9 Handling of symmetrical type 2-10 Mounting of auto switch 3.

Abnormal (19 V or less) Output area mapping Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 -45No.EX-OMX1001 Dimensions -46No.EX-OMX1001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications

Dimensions 4 EXH port 1/8 Input signal port( PIL ) R port Supply pressure exhaust port 2 x 1/8 Output port 2( A ) Supply port on the other side 1( P ) 2 x M6 x 1 thread depth 8 (Panel mounting screw) Panel mounted Bracket mounted 2 x 6.5 hole (Mounting screw M6 x 1 x 12) Handle side 4 x M6 screw 4 x 7 hole on the bracket side Bracket plate thickness t = 2 Panel plate thickness t = 3 or less

<* 1 LVA Orifice size 1 2 3 4 5 6 77 6 6 0 6 LVH Rated voltage 1 2 3 4 7 8 ,, 9= 5,'., ?

M 1 2 x 1 Cable connection threads suP (1) 2-Ro(PT) 114,318, 1/2 Port size Mounting hole L-bracket tNt-398-0-6 (optional) 2-Rc(PT) 1/4,3/8, 1/2 SUP port, OUT port Eleclno-Pltoulnalic Relulatnn rTUz000/3 lt'iler ilile $ruciliciliotts 2 through I station manifold.

robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Enter the necessary settings for communication setup. 1. Select Online in the Connect window. When Online is selected, the window below will be displayed. 2. Select the USB tab. 3. Click Search. 1 3 2 8 - The Search Condition Setting window will be displayed. 4. Select the V series. 5. Select Search of the USB tab. 6. Click Search.

It should be used as prefilter of compressed air for precision instruments or clean room required for higher clean air. (1) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa

HEC ii CONTENTS CONTENTS Pages 1 Preparation for Communication -1-1 2 Specifications of Communication Method -2-1 3 Communication Format -3-1 3.1 Control code used for communication -3-1 3.2 Command code list -3-1 3.3 Communication procedures and format -3-2 3.4 Calculation of checksum -3-3 4 Details of Communication format -4-1 4.1 Temperature setting (without writing EEPROM) -4-1 4.2 Reading

Suction Verification High Vacuum Set-value correction by auto-shift function Suction Work 1 Work 2 Work n Supply pressure normal Supply pressure drop Supply pressure increase Max. A Rectified value P-1 Rectified value P-1 (Differential) Pressure H-1 (P-3) H-1 (H-2) n-1 Min.