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Mounting Wiring/Piping Caution Warning 11. Transition wiring of ionizer For transition wiring of ionizers, use a transition wiring cable for connection between ionizers. Use a power supply cable for connection between ionizer and power supply or external equipment. (Transition wiring is not possible with the IZS40.)

13 90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

(Mounting hole) (12) 24.9 43.85 L (Lead wire length) 153.4 3 x 1/4" {1(P), 3(EB), 5(EA) port} 56.3 23 0.5 0.5 EB 3 P 1 EA 5 49.8 02 03 L-type plug connector with cover (LL) 53-SY9120-LLInsulator: Red (+) Insulator: Black () 4.1 16.7 0.3 mm2 L (Lead wire length) 148.3 02 03 Terminal type (TT) 53-SY9120-TTLead wire marking No. 1 (+), No. 2 () 14 0.75 mm2 L (Lead wire length) 165.1 Max. 10 11

Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082 Diaphragm Valve for Ultra High Purity Manually operated type (For

No.EX-OMX1001 PRODUCT NAME SI unit for EtherNet/IPTM MODEL / Series / Product Number EX260-SEN2-X205 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Installation and Wiring 11 Installation 11 Wiring 12 LED Indication and Settings 16 Hardware Configuration 19 EDS file and icon 19 Setting using RSLogix5000TM

MXQ12 M50.8 4.4 11 15 MXQ16 M61 7.4 14 19 MXQ20 M61 7.4 9 MXQ25 M81.25 18 12 MXQ6A M40.7 2.1 8 11 MXQ8A M40.7 2.1 8 11 MXQ12A M50.8 4.4 8 12 MXQ16A M61 7.4 12 17 MXQ20A M61 7.4 9 MXQ25A M81.25 18 12 MXQ6B M40.7 2.1 5 8 MXQ8B M50.8 4.4 4 9 MXQ12B M61 7.4 7 12 MXQ16B M61 7.4 10 15 MXQ20B M81.25 18 14 20 MXQ8C M40.7 2.1 6 9 MXQ12C M50.8 4.4 8 12 MXQ20(A)MXQ25(A) (L2)0.5mm ,, 6 L1 (Nm) (mm

In this case, consider using larger size or external stopper (buffer mechanism) to stop the load itself. 11 5-2Kinetic Energy Allowable kinetic energy of CRB2BW40 is 0.04 (J) when rubber cushion is used, and it is 0.03 (J) when rubber cushion is not used.

20H10 mm 4 4 6 8 8 12 16 20 g 90 140 220 410 570 970 1,650 2,920 1) 1625 =20mm 3263 =30mm 80 =50mm 0.5MPa MHSH3 / MHSH3-32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

Bushing CDQ2B only A set of Nos.11, 12 and 13 from the table above 180 9 CQ2WB180-PS Magnet Nickel plated 200 10 Rolled steel CQ2WB200-PS Rod end nut Mounting 1in = 25.4mm Mounting/Through hole type mounting bolts are available. How to order: Add "Bolt" in front of the bolts to be used.

AK ASS ASR ASF 15-9-11 3 Series AS Construction Component Parts No. q w e r t y u i o !0 !

TMH-06 26.5 10.6 11 20 10 11 7.2 4.3 7.1 TMH-07 TMH-09 TMH-08 TMH-10 TMH-11 34 14.6 14.2 28 14 14 9.6 4.3 9.5 TMH-12 TMH-13 15-9-13

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

.: 0.5MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length:1m MK/MK2 Flow control valve Flow control valve Throttle valve Throttle valve Stop valve RSQ/RSG CCVS10, 11, 12, 13 CCVS20, 21, 22, 23 CCVS02 RSH CE1 CE2 ML2B ML1C REA REC CCVS30, 31, 32, 33 CCVL20, 21, 22, 23 CCVL02 RHC MTS CC CCVL10, 11, 12, 13 eWithin the reciprocating movement of the actuator, if only the

Proof pressure 0.15MPa (At horizontal non-load) 1.5MPa Min. operating pressure MY1 Max. operating pressure Air cushion 50 to 750mm/s 1.0MPa Cushion Min. operating pressure 0.18MPa (At horizontal non-load) Piston speed Piston speed 15 to 300mm/s Basic Front flange Mounting Cushion +5 to + 60C Ambient and fluid temp Refer to p.3.20-3 regarding other specifications and p.3.20-10 and 3.20-11

CRBU Basic (Side port) CRB1FW Basic (Axial direction port) CRB1FW W/ angle adjuster CRB1FWU W/ auto switch CDRB1FW W/ angle adjuster and auto switch CDRB1FWU Size Size Size Size Size Angle , #11 (#1+#11) , #12 (#3+#12) , #13 (#5+#13) , #14 (#7+#14) , #15 (#9+#15) S SCRB SE SCRB S SCRB S SCRB S SCRB Size Size Size Size Size Angle Angle CRA1 Angle Angle CRQ Ass'y Part Number: P211070

4 11 4 11 4 11 2 VPA3185 2.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions 3-Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145

Moreover, the residual voltage of the diode is approximately 1 V. 4-2-11

Refer to page 5-11-4.) Not required Lubrication Mounting orientation Free Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .