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11.6 8.4 9.3 15.3 16.6 15.8 16.8 5.8 6.3 6.3 7.3 b T VMG Applicable tubing Applicable tubing a a Male Run Tee: KJY H (width across flats) Effective area (mm2) Nylon Urethane Connection thread T Applicable tubing O.D.

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W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

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3 y r t !1 RE A B REC CX CY A A MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Enlarged view of A Component Parts RS H A Description No.

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t Component Parts No.

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W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

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Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

CRB2/CRBU2/CRB1

Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.

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L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 AS ASP Metric Size ASN A M1 L5 Max.

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0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

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10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

V100

VK Nil F N T Rc G NPT NPTF Passage symbol Body size N.C. (Normally closed) A N.O.

LEC-OM07605CN

A 1 () () [] A 2 LECSS2-T Series/ / *3) 1 1.5 3)1 1 () A 3 1. 15P()N() (PE)( )(PE) (RCD)B 2. (L1L2L3) 3. () () A 4 4.

AC Servo Motor Driver (CC-Link Type)

Refer to LECSC2-T Operation Manual,chapter 6 for details. Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

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W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

AC

Then, the charging time (T) for a 100l tank, V 10 T = t x = 110 x = 110(s). 10 10 T = t x = 49 x = 49(s). 10 10 V 10 T = t x = 12.4 x = 24(s). 100 10 V 10 1.13-2 VBA1110 to 4200 Size Selection Pulsation is decreased by using tank. If secondary capacity is undersized, pulsation may occur.

Fluoropolymer Piping Equipment

(The body of the fitting is PTFE machined.) 904 A LQ1 Series Tubing Extension Union Elbow Reducing How to Order Tubing connection Fitting type 1 R8 LQ1 E 2 T Size combination (Metric) B side A side LVC Piping type Symbol E Type Union elbow Class Model Tubing size (mm) Applicable tubing size (mm) Symbol R Type Reducing LVA LQ1E21-T-R8 LQ1E21-T-R9 LQ1E21-T-R10 LQ1E22-T-R8 LQ1E22-T-R9 LQ1E22

CC-Link-E

S. a EX. ) To set pressure at 0. 3M Pa by I TV2030( f or 0. 5M Pa t ype) ( 0. 3M Pa/0. 5M Pa) 40952457D EC999( H EX) A pressure of 0. 3M Pa i s set by sendi ng i nput dat a of 999 t o t he el ect ropneum at i c regul at or t hrough t he m ast er PLC. Com m uni cat i on dat a al l ocat i on For "1" t he num ber of t he st at i on.