Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: None (0°), Thread: R, Port Size: U10/32 (U10-32UNF), Width Across Flats: 9mm, Tubing: 01 (ø1/8")
Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: U10/32 (U10-32UNF), Width Across Flats: 9mm, Tubing: 01 (ø1/8")
Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: X [5 μin. (0.13 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections
Number of Ports: 3 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: None, Indicator: Z (w/Miniature Indicator)
Number of Ports: 2 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller), Indicator: None
Number of Ports: 3 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: None, Indicator: None
Number of Ports: 3 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller), Indicator: None
Number of Ports: 2 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: None, Indicator: None
Parallel Seal Type Slit Valve Opening window size: 50 x 336 mm Valve type 1Insert type (Without body) 2Cassette type (Standard) 3Cassette type (Half MESC) Number of axes and seal type: One axis bellows Applicable water size: For 300mm wafer Table 1.
Size: 01(Size 26mm), Stations: 2 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -
Size: 01(Size 26mm), Stations: 2 Stations, A, B Port: Side, 3/8, Port Thread: NPTF, SI Unit: Serial Kit for DeviceNet™, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 3 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -
Size: 01(Size 26mm), Stations: 3 Stations, A, B Port: Side, 3/8, Port Thread: NPTF, SI Unit: Serial Kit for DeviceNet™, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 5 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -
Size: 01(Size 26mm), Stations: 6 Stations, A, B Port: Side, 1/4, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: EX250/500 Serial Kit w/o SI Unit, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 6 Stations, A, B Port: Side, 3/8, Port Thread: NPTF, SI Unit: Serial Kit for DeviceNet™, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 4 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -
Size: 01(Size 26mm), Stations: 6 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -
Size: 01(Size 26mm), Stations: 4 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 8 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 5 Stations, A, B Port: Side, 3/8, Port Thread: NPTF, SI Unit: Serial Kit for DeviceNet™, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: 1 Input Block, Type of Input Block: M12, 4 Inputs, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: Direct Exhaust w/Built-in Silencer, X Option: -, CE Compliant: -