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robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) W 4 A 15.5 W 5.5 A 11.5 12 16 20 25 0.5 4.5 0 4.5 16 4 6 12 3.5 1 20 7.5 2.5 16 5.5 -1 21 9.5 0.5 17 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

C For vacuum 0.0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -100 to 100 kPa -100 kPa 100 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OMG0004-D Dimensions PSE54(A)M3 M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision

1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: General rules for pneumatic equipment.

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 -2VEX-OMO0001 1 1 1 1 1 1 1 1 3 3 3 3) ) ) ) *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () -3VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / Nm , 1.5~2 1/6~1/4 2 (P.2.3) , (P.2.3) 1 1 1 1 P P P P 2 2 2 2 A A A A . . . . -4VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / ( ( ( ( ) ) ) ) -5VEX-OMO0001

INSTALLATION B D Installation Transmission Din & Feed-back lever Fig. SINGLE-ACTING ACTUATOR SIGNAL PRE-Y%i-rpur SIGNAL RANGE INSTALLATION STYLE IREF. FIG. 1) OUT 1 OUT2 Direct ? OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF.

cover 1 Options B and H are not assembled and supplied loose at the time of shipment.

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Universal 0.8 4.9 10 2 (OUT) 1.5 2.3 1 (SUP) 3 (EXH) 3 3 1.7 3 (EXH) port 1 (SUP) port 2 (OUT) port Specific Product Precautions Be sure to read this before handling the products.

-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

(Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety. JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines.

1 3 Port Air Operated Valve Series VZA200/400 Specifications SA Fluid Air 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VZA2 2, 2 4 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VA Operating pressure range (MPa) 0.1 to 1.0 0.15 to 1.0 VZA2 2, 2 4 0.1 to 1.0 0.15 to 1.0 SA Pilot pressure range (MPa) Impact/Vibration resistance (m/s2) Note) 150/50 VA Operating pressure Pilot pressure Note) Impact resistance: No malfunction from

B 8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1.. 2. 3. 1. 2. 3. 4. 2 VT301-0MP0001 / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VT301-0MP0001 VTA301 VTA301 VTA301 VTA301 3 3 3 3 / / / / / / / / -10 1 Nm Rc1/8 79 Rc1/4 1214 1224 1/8 1 21 ISO VG32 MSDS 2 ISO VG32 4 VT301-OMP0001 VTA301 VTA301 VTA301 VTA301 3 3 3 3 / / / / 30 1 1 ISO VG32 2 ISO

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

Designation Description 1 1 SLD Shield B RATE STATION NO. 10 1 4 5 2 1 2 DB Communication wire DB Thank you for purchasing an SMC EX260 Series Fieldbus device (Hereinafter referred to as "SI unit" ). Please read this manual carefully before operating the product and make sure you understand its capabilities and limitations. Please keep this manual handy for future reference.

GS 5 9 8 5 PS 36 3 22 22 ISA 3.2 ZSE1 ISE1 ZSE2 ISE2 1 M5 PT 40 ZSP ISl SET ALM. 20 kgf K P M b ZSM + _ PFl UNIT P.SET IFl 3.6-4

Note 1) ISO 4414: Pneumatic fluid power -Recommendations for the application of equipment to transmission and control systems Note 2) JIS B 8370: General Rules for Pneumatic Equipment Warning 1. The compatibility of equipment is the responsibility of the person who designs the system or decides its specifications.

Note 1) ISO 4414: Pneumatic fluid power -Recommendations for the application of equipment to transmission and control systems Note 2) JIS B 8370: General Rules for Pneumatic Equipment Warning 1. The compatibility of equipment is the responsibility of the person who designs the system or decides its specifications.

(ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: *2) 1. 2. 3. 1.

(mm) 4 5 6.5 8 Outer layer thickness (mm) 1 1 1 1 Black (B) Outer layer Flame resistant polyolefin (Equivalent to UL-94 standard V-0) White (W) Note 3) Outer layer color Red (R) Middle layer Aluminum laminated film Blue (BU) Yellow (Y) Inner tube Polyurethane Green (G) Specifications Fluid Note 1) Air, Water For general pneumatic and water piping in environments exposed to sparks from arc