Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. The test was performed in both an axial direction and a perpendicular direction to the lead screw. (The test was performed with the actuator in the initial state.) Note5) The power is for when the actuator is operating.

LEF-OM006xx

SETTING 1 No. 1 0.00mm 1 SET <1> -7- 50mm30mm 50mm TEST MONITOR DATA 1 No. 0 50.00mm 250mm/s 1 No. 0 50 .00mm 250mm/s ALARM JOG SETTING 30 SET __ DATA SET <> MENU (5) 1 No. 0 30 .00mm 250mm/s 3.3[]P21P24 -8- 2. 2.1 LEF/ (1)(DC24V) LEFS16 LEFS25 LEFS32 (mm) 1) 100,200,300,(400) 100,200,300,(400),500,(600) 100,200,300,400 500 (600,700,800) 9 10 20 20 40 45

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

(The test was performed with the actuator in the initial state) Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz when the actuator was tested in both an axial direction and a perpendicular direction to the lead screw.

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz, when the actuator was tested in both an axial and perpendicular direction to the lead screw. (The test was performed with the actuator in the initialized state). Note 6) Maximum instantaneous power consumption (including the controller) is when the actuator is operating.

LEH_C

/LEHS .20 4.1 . 20 4.2 . 21 4.3 . 22 5.23 5.1 . 23 5.2 . 24 5.3 . 27 . 27 . 29 (1). 31 (2). 32 (3). 33 . 34 5.4 . 36 . 36 . 38 1 - 6.39 7.40 7.1 . 40 7.2 . 41 7.3 . 41 7.4 . 42 7.5 . 44 7.6 . 44 8.45 8.1 . 45 8.2 . 46 8.3 . 50 8.4 . 53 .54 2 - LEH Series / (ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General

JXCx-OMY0006

Settings and Data Entry 42 10.1 Step Data 42 10.2 Basic parameters 45 10.3 Return to origin parameter 47 11.

JXCx-OMY0004

Settings and Data Entry 42 10.1 Step Data 42 10.2 Basic parameters 45 10.3 Return to origin parameter 47 11.

SFOD-OMT0005CN

44- Para protect Para protect 12 1+(++) 2(+) Enable SW Enable SW 12 SW 1 2 Unit name Unit name () W-AREA1 W-AREA1 (-) (+) WAREA ON (mm) W 1W 2 WAREA ON *W 1W 2 PARA W 1=W 2=0 WAREA OFF) W-AREA2 W-AREA2 (-) (+) ORG Correct Link Offset () Sensor type Sensor type () Option 1 Option 1 () Undefine No. 11 Undefine No. 11 () Undefine No. 12 Undefine No. 12 () *1 -45

SFOD-OMT0009CN

-COM4 40 1) +COM1+COM2 +COM3+COM4 I/O2 +COM1+COM2 +COM3 +COM4 DC24V 24V -COM1-COM2-COM3-COM4 OUT -COM DC24V 0V 45 No.SFOD-OMT0009CN-B (2) PNP I/O 1 DC24V OUT0 10 +COM1 1 OUT1 30 +COM2 21 OUT2 11 IN0 2 OUT3 31 IN1 22 OUT4 12 IN2 3 OUT5 32 OUT6 13 IN3 23 OUT7 33 IN4 4 OUT8 14 IN5 24 BUSY 34 IN6 5 (OUT9) IN7 25 AREA 15 (OUT10) IN8 6 SETON 35 IN9 26 INP 16 IN10 7 SVRE 36

JXCx-OMT0062

. *4) The output turns on when the electric actuator is "In position" of the step data. 45 - (4) Higher level device Controller [OUT] (Master to Remote) PLC Memory address Signal name Content Single Half numerical Full numerical Ry numerical data data data instructions instructions instructions 00 IN0 Bit no. to specify the step data (Specify the number by combining On/Off of the terminals

JXCx-OMT0061CN

) 00h*3 10.1.2 (1)[ ](P.40) 70 1 7 DATA(L) F8 2 70 3 10.1.2 (1)[ ](P.40) F8 4 8 9.5.1 (P.30)RWw1 Sub Function 80h OR() 9 F0 Sub Function *3 10 F0 Address 9.5.1 (P.30)00h*3 11 F0 Address (0) 0 12 F0 DATA(H) *3 13 F0 DATA(L) 00h *3 14 F0 15 F0 H= L= *3 RWr3: Sub Function (RWr9) RWw1Sub Function80hOR() RWr6:DATA(H)(RWr12)RWr4:AddressRWr7:DATA(L)( RWr10RWr13)00h 2 1) 2) () 3 45

Output block / Power block

block for high wattage load) 14 Polarity 15 The number of connected stations 15 Limit of output points when the Output block for high wattage load and Power block are used 16 Supply current 19 Connection of inductive load 28 Mounting and Installation 29 Mounting 29 Installation 29 Wiring 30 LED Indication 40 Maintenance 41 Troubleshooting 42 Specification 43 Specifications 43 Dimensions 45

EtherNet/IP TM Compatible Fieldbus System

(See fig. b) 45 No.EX-OMS0014-A Separate power supply It is possible to provide a separate power supply to the SI unit and valves using a Y branch connector. Separate connector pin layout M12, 4 pin, plug No.

EXxx-OMK0006

Please refer to the individual catalog for dimensions when other manifolds are connected. n m L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 Wiring (for power supply, communication and input) and piping are installed on only one side of the product

SI unit for CC-Link

significant bit). (3) Fuse disconnection details The power supply fuse disconnection for the SI unit solenoid valves can be monitored by the link special register of the master station. 0: Normal 1: Fuse disconnected Buffer area of master station Example: QJ61BT11N b15 b14 b13 b12 b3 b2 b1 b0 (688H)SW0088 16 15 14 13 4 3 2 1 (689H)SW0089 32 31 30 29 20 19 18 17 (68AH)SW008A 48 47 46 45

Fieldbus system (SI unit – PROFIBUS DP compatible)

Please refer to an individual catalog for the size when other manifolds are connected. n_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 n_m L 9 10 11 12 13 14 15 16 L1 139.5 150 160.5 171 181.5 192 202.5 213 L2 278.8 299.8 Wiring (for power supply, communication and input) and piping are done on only one side.

LV50-OMQ0004

Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g -12No.LV50***-OMQ0004-F Summary of product parts Body With lead wire and M12 connector (4 pins) (Options) Connector Piping port (OUT side) Piping port (IN side) Bracket (Options) Description Function Connector The part to which lead wires are connected.

SFOD-OMT0010

Connect the corresponding common -COM of the 0V side of the input/ output signal 24 VDC power supply. 45 No.SFOD-OMT0010-B (2) PNP type I/O 1 24 VDC OUT0 10 +COM1 1 Load OUT1 30 Load +COM2 21 OUT2 11 Load IN0 2 OUT3 31 Load IN1 22 OUT4 12 Load IN2 3 OUT5 32 Load OUT6 13 IN3 23 Load OUT7 33 IN4 4 Load OUT8 14 Load IN5 24 BUSY 34 IN6 5 Load (OUT9) IN7 25 AREA 15 Load (OUT10) IN8 6 SETON 35

FGX-OM-K003_e

Air flow capacityNote 1) 100L/min(ANR) 500L/min(ANR) Filtration rating 0.0199.99 MAX Operating pressure 1.0MPa (0.99MPa for Nitrogenat 20 Operating temp. 5 to 45 Initial pressure oss 0.03MPa or less (at primary pressure of 0.7MPa and max. air flow capacity) Clean room (class 100) Note 1) The air flow capacity is the flow rate at a primary pressure of 0.7MPa.

Fieldbus system (PROFIBUS DP compliant)

Unit Summary of Product Parts 13 Mounting and Installation 14 Installation 14 Wiring 15 Setting 20 Specifications 32 Specifications 32 Dimensions 33 SI Unit Summary of Product Parts 34 Mounting and Installation 36 Installation 36 Wiring 37 Setting 41 Specifications 41 Specifications 41 Dimensions 42 Output Unit Summary of Product Parts 43 Mounting and Installation 44 Installation 44 Wiring 45