Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve
Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve
Coil rated voltage 12, 24 VDC, 100, 110 to 120, 200, 220, 240 VAC (50/60 Hz) (3) (A) 2 INT Allowable voltage fluctuation 15 to +10% of rated voltage Coil insulation type Class B or equivalent Apparent power AC (Power consumption) Inrush 5.0 VA/60 Hz, 5.6 VA/50 Hz Electrical specifications Holding 2.3 VA (1.5 W)/60 Hz, 3.4 VA (2.1 W) 9/50 Hz Power consumption DC 1.8 W Electrical entry Grommet
Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Valve configuration Pilot type 4 port solenoid valve Air 0.15 to 0.7 10 to 50 (No freezing. Refer to page 3-13-4.) 15 or less 15 Refer to the table below.
Air Cylinder Standard: Double Acting, Single Rod 40, 50, 63, 80, 100 Series CA2 RoHS How to Order L 50 100 CA2 Z D 50 100 M9BW N W Z With auto switch CDA2 Made to Order For details, refer to the next page.
N: Petroleum, V: Phosphoric ester, W: Water-glycol, Emulsion. Note 2) Refer to page 528 for non-standard filtration. Note 3) Above elements require one element per filter. Construction/Seal List Replacement O-ring/Seal List (One each of the seal and O-ring types listed below are required per filter.) Differential pressure indicator w O-ring order no. e O-ring order no.
Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 2 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: CH1 20C/CH2 25C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC 3 q Ambient temperature
Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 3 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 460 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 460 VAC 5 q Ambient temperature
Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)
Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)
Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C8 (ø8), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)