Economy Valve

Measuring the time for lifting Fast Slow O K Reduce the setting of REG.(2). Increase the setting of REG.(2). Set REG.(2). Measuring the time for falling Fast Slow O K Checked End 9 No.VEX-OMA0019-C Troubleshooting Perform troubleshooting with higher possibility based on the failure phenomenon.

Soft Start-up Valve AV2000/3000/4000/5000 1

43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0

212

LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator for Chemical Liquids Material and Fluid Compatibility Check List Chemical Compatibility Acetone Note 1, 2) Ammonium hydroxide Note 2) Isobutyl alcohol Note 1, 2) Isopropyl alcohol Note 1, 2) Hydrochloric acid Note 2) Ozone Hydrogen peroxide Concentration 5% or

Air Cylinder

Minimum Stroke for Auto Switch Mounting n: Number of auto switches [mm] Auto switch model Number of auto switches 32, 40, 45, 50, 56, 63, 67, 80, 85, 100 2 (Different surfaces, Same surface), 1 15 D-M9m D-M9mW n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1 10 D-M9mV D-M9mWV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1

XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

Parallel Type Air Gripper

Internal C 12 31 56 83 gripping force Open/close stroke (Both sides(mm) 4 6 10 14 Note 2) Weight (g) D 60 130 250 460 SC 60 130 255 465 Note 1) Values based on pressure of 0.5 MPa, gripping point L=20 mm, at center of stroke. Note 2) Values excluding weight of auto switch. 4 - 2. Mounting of Auto Switch 2-1.

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

AMP

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

KA

10 28.4 28.4 21 1 2 KAY10-U04 30 49 51 31 35 22 1 4 3 8 KAY12-U02 KAY12-U03 49.5 50.5 27 28 17 20.9 17 12 28.5 45.4 45.4 22 1 2 KAY12-U04 31 51.5 22 55 Reference dimensions after Uni thread installation.

ATX-OM-F003E

Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions HAW2/7 HAW22 to 110 2VHAW110-30 Flange (mm) Model A B C D E F G H J K L M N P Q R S T U V W Y Z ZA HAW2-04 360 190 83 35 270 35 130 203 159 159 182 209 60 60 94 4.5 10 1/2 1/2 1/2 HAW7-06 570 390 83 35 480 35 130 203 159 159 182 209 60 60 94 4.5 10 3/4 1/2 1/2 HAW22-14 948 575

VG342

Flow Characteristics With DIN terminal block Port size Flow characteristics With terminal block 1 2 (P A) b Cv C [dm 3/(sbar)] 2 3 (A R) b Cv C [dm 3/(sbar)] 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) Ground

Turntable Cylinder Series MGT

[White] Blue [Black] Black [White] Load Switch 1 Switch 1 Switch 1 Relay Load Relay contact Blue [Black] Blue [Black] Brown [Red] Brown [Red] Brown [Red] Relay Black [White] Black [White] Blue [Black] Black [White] Switch 2 Switch 2 Switch 2 Blue [Black] Blue [Black] The indicator lights will light up when both switches are turned ON. 2 wire with 2 switch AND connection 2 wire with 2 switch

Compact Cylinder with Air Cushion and Lock Series RLQ

YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No. K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

XLDV Series

Material 25 40 50 Standard AS568-030V AS568-035V AS568-039V External seal 3 Specific AS568-030** AS568-035** AS568-039** Standard B2401-V24V B2401-P42V AS568-227V Valve seal 2 Specific B2401-V24** B2401-P42** AS568-227** Standard AS568-009V XLD40-2-9-1A XLD50-2-9-1A S valve seal assembly 4 Specific AS568-009** XLD40-2-9-1A** XLD50-2-9-1A** Valve size Description Constructions no.

Digital Flow Switch (Remote type sensor unit)

PFM5-(N)01/(N)02/F01-1/2 -25No.PF-OMJ0016-J PFM5-(N)01L/(N)02L/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N

Miniature Guide Rod Cylinder Series MGJ

Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V = 24 V 4 V x 2 pcs. = 16 V Example: Power supply is 24 VDC. Internal voltage drop in switch is 4 V. Example: Load impedance is 3 k.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

n = 1 + 2 + 3 1 MX Load factor n 1 = m/mmax Item Note Review m mmax is the maximum load mass MTS 1. Max. load mass 2 = M/Mmax MY Review M1, M2, M3 Mmax is the allowable moment 2. Static moment CY 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.