Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free. Direct operated precision regulator; Sensitivity: within 0.2%F.S.; 3 types of set pressure allow more freedom in designing a circuit; Repeatability: within ±1%F.S.; Backflow function available

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N7 (1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: M (SI Unit Only)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 50, Reverse Flow: No, Thread: N (NPT), Port Size: 10 [1 (Size 50, 60)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

The use of 34 pin connectors allows up to 16 stations with double solenoids.Fluid: air, Operating pressure range: -100kPa to 0.7MPa, Response time ms (at 0.5MPa): 18 or less, Coil rated voltage: 12, 24VDC, Ambient and fluid temperature: -10 to 50 C, Enclosure: IP67 (based on IEC529) SS5V1 MANIFOLD SV1000. SUP/EXH BLOCK ASSY INT. VALVE. SS5V1 NO SIZE RATING. .25813 lb. 21.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Fluid: air, Operating pressure range: -100kPa to 0.7MPa, Response time ms (at 0.5MPa): 18 or less, Coil rated voltage: 12, 24VDC, Ambient and fluid temperature: -10 to 50 C, Enclosure: IP67 (based on IEC529) SS5V1 MANIFOLD SV1000. SUP/EXH BLOCK ASSY INT. VALVE. SS5V1 NO SIZE RATING. .33733 lb. 21.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Fluid: air, Operating pressure range: -100kPa to 0.7MPa, Response time ms (at 0.5MPa): 33 or less, Coil rated voltage: 12, 24VDC, Ambient and fluid temperature: -10 to 50 C, Enclosure: IP67 (based on IEC529) SS5V2 MANIFOLD SV2000. SUP/EXH BLOCK ASSY INT. VALVE. SS5V2 NO SIZE RATING. .52492 lb. 21.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Fluid: air, Operating pressure range: -100kPa to 0.7MPa, Response time ms (at 0.5MPa): 18 or less, Coil rated voltage: 12, 24VDC, Ambient and fluid temperature: -10 to 50 C, Enclosure: IP67 (based on IEC529) SS5V1 MANIFOLD SV1000. TIE ROD. VALVE. SS5V1 NO SIZE RATING. .04345 lb. 21.

Standard strokes range from 5 to 50mm.   10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The CDQS clean series is auto switch capable.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free. Direct operated precision regulator; Sensitivity: within 0.2%F.S.; 3 types of set pressure allow more freedom in designing a circuit; Repeatability: within ±1%F.S.; Backflow function available

Series 10/11-C(D)G1, available for clean environment, prevent particle generation in a clean room. Series 21/22-C(D)G1 offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted.

Series 10/11-C(D)G1, available for clean environment, prevent particle generation in a clean room. Series 21/22-C(D)G1 offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted.

Series 10/11-C(D)G1, available for clean environment, prevent particle generation in a clean room. Series 21/22-C(D)G1 offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Fluid: air, Operating pressure range: -100kPa to 0.7MPa, Response time ms (at 0.5MPa): 18 or less, Coil rated voltage: 12, 24VDC, Ambient and fluid temperature: -10 to 50 C, Enclosure: IP67 (based on IEC529) SS5V1 MANIFOLD SV1000. SUP/EXH BLOCK ASSY INT. VALVE. SS5V1 NO SIZE RATING. .22000 lb. 21.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Fluid: air, Operating pressure range: -100kPa to 0.7MPa, Response time ms (at 0.5MPa): 18 or less, Coil rated voltage: 12, 24VDC, Ambient and fluid temperature: -10 to 50 C, Enclosure: IP67 (based on IEC529) SS5V1 MANIFOLD SV1000. CLAMP ASSY. VALVE. SS5V1 NO SIZE RATING. .05720 lb. 21.