Stations: 02

Piping: 41R (Base Mounted), Stations: 2 Stations, A, B Port: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 2 Stations, A Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Solenoid on Same Side as A Port, Piping: Base Mounted, Stations: 2 Stations, A Port Size: Base Mounted M5X0.8, P R Port Thread: -

Stations: 02

Process Pump

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

25

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

Heavy Duty Stopper Cylinder Series RSH/RS1H

10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 16

RSH

10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Load speed : u (m/min) m=0 Load speed : u (m/min) m=0.1 4.3-4 Heavy Duty

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

M10 x 1.25 14 +0.08 0 7.5 2 10 M12 x 1.25 16 11.5 3 14.5 M14 x 1.5 +0.08 0 Trunnion mounting taps for the width across flats NA are not attached to 80 and 100 types. 18 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth

ZSE1/ISE1

(Between lead wires and case) 50 M or more (at 500 VDC by megameter) 01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type Approx. 40 g (Including 0.6 mLong lead wire) Operating pressure range/Regulating pressure range Proof pressure Fluid Power supply voltage Current consumption Response time Repeatability 500 kPa ZSE ISE PSE Enclosure Operating temperature range Operating humidity

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

(between live parts and case) 50 M or more (at 500 VDC by megameter) between live parts and case 01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type 40 g (Including 0.6 m-Long lead wire) Oil-resistant vinyl cabtire code 3 cores, 3.4, Cross section: 0.2 mm2, Insulator O.D.: 1.1 mm Heat-resistant vinyl electric wire, 4-wire, Cross section: 0.3 mm2, Insulator O.D.: 1.55 mm Compliant

ITVH

AP100 Port size B 2 1/4 3 3/8 Note) EXH port: 1/4 Built-in regulator EXH port: M5 Solenoid valve EXH port: M5 L-bracket C * Bracket is included. 957 ITVH2000 Series Standard Specifications Model ITVH2000 Minimum supply pressure Whichever is higher: 0.5 MPa or the set pressure + 0.2 MPa Maximum supply pressure 3.0 MPa Set pressure range Note 1) 0.2 to 2.0 MPa Power supply Voltage 24 VDC 10%

Vacuum gripper

-45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -12No.

ZMA

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,

IDX-OM-N030

When the IDFA100F-40 is provided with options C, R and V the part number will be IDFA100F-40-CRV. 100 F 40 NIL IDFA C K Size R Air compressor size Note) 100kW 125kW 150kW Note) The value is referential. Confirm the capability of the compressor used.

ZSE30/ISE30

kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE OUT OUT OUT OUT OUT SET SET SET SET SET With One-touch fitting (4, 6, 5/32", 1/4") Reduced dimensions in piping direction 17.8 mm reduction Straight type 12.4 mm reduction Elbow type 14.4 22.4 12.4 mm 17.8 mm 32.2 34.8 KQ2H06-M5 KQ2L06-M5 Comparison when One-touch fittings (KQ2H06-M5 / KQ2L06-M5) are connected to the piping