Stations: 5 Stations, A, B Port: Side 1, SI Unit: DeviceNet, P, R Port Size: 1, P, R Port Location: Both Sides, Thread: NPTF
Stations: 7 Stations, A, B Port: Side/Bottom, Side Plugged 3/4, SI Unit: DeviceNet, P, R Port Size: 1, P, R Port Location: D Side, Thread: NPTF
Stations: 4 Stations, A, B Port: Side/Bottom, Side Plugged 1/2, SI Unit: w/o SI Unit, P, R Port Size: 1, P, R Port Location: Both Sides, Thread: G
Stations: 5 Stations, A, B Port: Side 3/4, SI Unit: w/o SI Unit, P, R Port Size: 1, P, R Port Location: Both Sides, Thread: Rc
Stations: 3 Stations, A, B Port: Side/Bottom, Bottom Plugged 3/4, SI Unit: w/o SI Unit, P, R Port Size: 1, P, R Port Location: Both Sides, Thread: Rc
Stations: 9 Stations, A, B Port: Side/Bottom, Bottom Plugged 3/4, SI Unit: w/o SI Unit, P, R Port Size: 1, P, R Port Location: Both Sides, Thread: NPTF
Stations: 5 Stations, A, B Port: Side/Bottom, Bottom Plugged 3/4, SI Unit: DeviceNet, P, R Port Size: 1, P, R Port Location: Both Sides, Thread: NPTF
Stations: 9 Stations, A, B Port: Side/Bottom, Bottom Plugged 3/4, SI Unit: DeviceNet, P, R Port Size: 1, P, R Port Location: Both Sides, Thread: NPTF
Speed Controller with One-touch Fittings 2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !
cylinder 12-CY3B Dimensions 12-CY3B15 to 40 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 4-MM Thread depth J Cylinder tube outer circumference: Hard chrome plated + special treatment L 0 -0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R
Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !
Thread type Cylinder side R Tube side Rc Symbol Bore size Made to Order (For details, refer to page 647.)
Required Element Required Element Required Element Option Option Pick Up Tube R = Reservoirs S1 They are manufactured of clear FDA Styrene Acrylonitrile (SAN). Bodies are stress relieved for added clarity and strength. Clear bodies offer on-site examination of flow, liquid levels and contaminant levels.
5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
(Example) For 6 stations 06 How to Order (Single unit) ZFA 100 01 Bracket Air suction filter Symbol Nil L None Bracket ZFA100 1 pc. on the left R LR Body type 1 pc. on the right With both the left and right sides 100 Filtration area (mm2) Symbol L or R shows the left or right of the filter IN when viewed from front. 2110 4210 200 Port size Thread type Applicable model Symbol 02 01 Port
(When using the 3 port valve, seal the R port of the release valve.) Supply valve (3 port valve) + Variable throttle + Suction filter Ex. 2 Supply/Release valve (5 port valve with 3-position) + Variable throttle Ex. 5 3 port valve 5 port valve with 3-position closed center Silencer 3 port valve is used to generate and release the vacuum.
Construction Vacuum generator side Vacuum generator side u w r t No.0.8 e y For the direction of the product, refer to 4 of back page 3. Pad side q u Description Component Parts Material Surface treatment No.