Time Delay Valve

Incorrect description corrected on page 12, outside diameter dimension drawing layout changed on page 13. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Clean Gas Filter

. -10- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved -11-

FGX-OM-K003_e

Resin 2 to 3 Rc1/4 Metal 12 to 14 Deteriorated oil discharged from compressor Dust sucked from ambient air Warning Moisture (drain) 1. Operation Manual Installation 2. Flushing Mounting Selection Piping

LOCK UP VALVE

ring NBR 1 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 IL211 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 290311#1 Valve BRASS 1 JIS B 2401, P21 O ring NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14

Bacteria Removal Filter

B : October, 2022 Caution on Installation Clerical error correction 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Digital Flow Switch (Integrated display type)

[January 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2019 SMC Corporation All Rights Reserved No.PF-OMO0012-E

E-MY2_E_D

Connector Motor cable of the controller Motor cable of the actuator Connector Lever Encoder cable of the controller Encoder cable of the actuator Lever 14 Setting Setting Procedures Confirm the product is installed and connected properly and perform setting in the following procedure.

In-line Air Filter

Unlocked Locked (2) Lock mechanism (7) (3) Product no. display (6) Body Element (4) (5) Cover Raised part of the cover 12 - Revision history Rev.A: The ZFC1series and ZFC3 series added. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

High Vacuum L Type Valve

The procedure 4 can be done easily and accurately. 12 XL*-OMI0013-B Revision B RENEWAL 2018.9 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved XL*-OMI0013-B

10-my3a-e

Qty. 1 MY3A20 MY3A32 MY3A50 9 Seal belt MY3A50-16AStroke MY3A20-16AStroke MY3A32-16AStroke Polyamide 10 Dust seal band 1 MY3A50-16BStroke MY3A20-16BStroke MY3A32-16BStroke Stainless steel 14 Gasket bumper 2 RMA-50 RMA-20 RMA-32 NBR 15 Piston seal 2 RMY-50 RMY-20 RMY-32 NBR 16 Scraper 2 MYA50-15-AC596 MYA20-15-AC594 MYA32-15-AC595 Polyamie 22 O-ring 4 KA00050 KA00035 KA00048 NBR When o and

10-my3b-e

MY3B20 MY3B32 MY3B50 Qty. 1 9 Seal belt MY3B20-16AStroke MY3B32-16AStroke MY3B50-16AStroke Polyamide 10 Dust seal band MY3B20-16BStroke MY3B32-16BStroke MY3B50-16BStroke 1 Stainless steel 14 Tube gasket RMB-20 RMB-32 RMB-50 2 NBR 15 Piston seal RMY-20 RMY-32 RMY-50 2 NBR 16 Scraper MYA20-15-AC594 MYA32-15-AC595 MYA50-15-AC596 2 Polyamide 22 O-ring KA00048 KA00050 KA00035 4 NBR KA00309 KA00309

11-rq-e

Contents Bore size (mm) RQB20-PS RQB25-PS RQB32-PS RQB40-PS RQB50-PS 20 25 32 40 50 63 80 100 RQB20-PS RQB25-PS RQB32-PS RQB40-PS RQB50-PS RQB63-PS RQB80-PS RQB100-PS Cushion needle 12 Stainless steel Check seal 13 NBR Check gasket 14 NBR Set of left nos. !6, !7, !8. Needle gasket 15 !6 !7 !

Magnet Gripper

Magnetic Field Resistant Auto Switches Type Auto switch model Applicable magnetic field Electrical entry Indicator light Wiring (Pin no. in use) Load voltage Lead wire length Applicable load P3DWASC AC magnetic field (Single-phase AC welding magnetic field) 2-wire (34) Pre-wired connector 2-color 0.3 m Relay, PLC P3DWASE 2-wire (14) P3DWA Grommet 2-wire 0.5 m P3DWAL 3 m P3DWAZ 5 m Solid state

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

polyurethane tube Body rotates at 360 around the stud axis 4/2.5 x M5 4/2.5 x M5 MS-5HLH-4 MS-5ATHU-4 For soft nylon and polyurethane tube KG KFG2 6/4 x M5 6/4 x M5 MS-5ATHU-6 MS-5HLH-6 MS MS P.338 P.339 KKA KP LQ MQR T IDK 337 MS Series Barb Fitting for Soft Tube: MS-5AU-3/4/6 Weight (g) 1.4 1.5 Effective area (mm2) 1.7 2.1 Model C D L MS-5AU-3 MS-5AU-4 4.5 5 1.6 1.8 11.5 12 MS-5AU-6 7 2.5 14

Doc. no.MX*-OMG0114

Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

0.01

AT IDF IDU IDF FS IDFA IDFB IDH Tightening torque (Nm) Material ID 2 to 3 Resin 12 to 14 Metal IDG 4. Check the arrow mark on the case which shows the flow direction to connect the IN and OUT ports correctly. If connected in reverse, the element could break. IDK AMG AFF Maintenance Warning AM AMD Other Tube Brands Caution 1. Follow the maintenance procedures in the operation manual.

CJ2Q

(mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

CYV

Electroless nickel plated Aluminum alloy Slide table 11 Electroless nickel plated Electroless nickel plated Aluminum alloy Base 31 Stainless steel Insertion guide plate 12 Electroless nickel plated Aluminum alloy Cylinder tube 32 Stainless steel Round head Phillips screw 13 Electroless nickel plated Aluminum alloy Tube attaching bracket Hexagon socket head cap screw 33 Aluminum alloy Side plate A 14

Quick Exhaust Valve Series AQ 1

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4