Stations: 04 (4 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.
), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)
Stations: 04 (4 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.
Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 04 Stations, Passage: 2 (P: Common, EA,EB: Common, Port A,B: Bottom), Port Size: 04 (1/2), Thread: T (NPTF)
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Fluororubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 2, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] Conductive NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 2, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Conductive Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 2, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 2, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 2, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Urethane Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 2, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Fluororubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 4, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] Conductive NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 4, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Conductive Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 4, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 4, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 4, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Urethane Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 4, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Fluororubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 6, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] Conductive NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 6, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Conductive Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 6, Vacuum entry port thread diameter: M5 × 0.8
Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 6, Vacuum entry port thread diameter: M5 × 0.8