Possible to transfer a workpiece at low-speed.

Applicable shaft types: S, W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) L4 max Y Y L2 6 (9 Y) to Y 7 (10 Y) to Y Y 3 to 9 3 to10 L3 max X 2 X 2 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) X 8 to 18 10 to 20 Size 10 15 Size 10 15 Symbol: A14 Symbol: A15 Symbol

MXQ

M2.5 x 0.45 thread depth 3.5 F 4 27 1.5 15 12 13.5 10 31 20 14 0.5 5.5 3 4 Retraction end adjuster Adjuster at extension end N-M3 x 0.5 thread depth 4 3 depth 2.5 +0.03 0 19.5 (Adjuster at extension end) Bottom view of MXQ6L-30 1 5.5 3.5 5.5 6 I J 3 2 6 Max. 10 (Retraction end adjuster) 2-M2.5 x 0.45 thread depth 3 Operating port 2-M5 x 0.8 13 16 20 3H9 depth 2.5 +0.025 0 HA GA NN-M4 x 0.7

One-touch Fittings

[mm] *1 D1 Weight [g] With a rib X (X) Y Nylon Urethane M L1 Rib Oval type Round type 4 1/8 KQ2W04-01GS1 10 8.2 7.7 10 10 14.8 29.9 30.9 13.3 4 4 3 11 V 1/4 KQ2W04-02GS1 14 8.2 7.7 10 10 14.8 33.3 32.7 13.3 4 4 3 27.5 V 4, 6 8 to 12 4, 6 D1 6 1/8 KQ2W06-01GS1 10 10.4 9.7 12 10 15.5 31 33.1 13.3 10.9 8.6 4.5 11.4 1/4 KQ2W06-02GS1 14 10.4 9.7 12 10 15.5 34.4 34.9 13.3 10.9 8.6 4.5 28 3/8

C85

A B 26 NCA D-J79C Bore 17 Hs D-X B 8 (5) 2 4 (2) 5.5 (3.5) A B 2 2 (2.5) 3 (4) 9 (6) 3 5 (3) 6.5 (4.5) B 3.5 3.5 (4) 4.5 (5.5) A 2 2 (2.5) 3 (4) A 3.5 3.5 (4) 4.5 (5.5) B 4 4 (4.5) 5 (6) 11 (8) 5 7 (5) 8.5 (6.5) B 3 3 (3.5) 4 (4.5) 10 (7) 4 6 (4) 7.5 (5.5) A 4 4 (4.5) 5 (6) A 3 3 (3.5) 4 (4.5) 1 D-F7V D-F7WV D-F7BAVL 8 10 12 7 23 A B 2015 Hs 10.5 (7.5) 4.5 6.5 (4.5) 8 (6) 2 (3) 3 (4) 4.5

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

HRX-OM-X037

, Brass 10,Bronze 10,Fluoropolymer,PP,PBT,POM,PU,PC,PVC, Wetted material EPDM,NBR, Ion-exchange resin 9 CH2 : Stainless, Alumina ceramic, Carbon, Fluoropolymer,PP,PBT,POM,PU, PVC,PPS,AS,PS,EPDM,NBR, Ion-exchange resin 3-phase 380 to 415VAC(50/60Hz) Allowable voltage range 10%(No continuous voltage fluctuation) Power supply 3-phase 460 to 480VAC(60Hz) Allowable voltage range +4%,-10%(Max.

2/3 Port Valve

(mm) mm Flow rate coefficient Max. system pressure (MPa) (1) Port size Weight (g) Cv Water Air Model AC DC AC DC AC DC Effective area (mm2) 34 10 1.9 600 10 VXZ2232-02 0.7 0.6 0.7 0.6 0.7 0.6 1 4 1 4 10 43 2.4 600 10 VXZ2232-03 0.7 0.6 0.7 0.6 0.7 0.6 3 8 3 8 . 0.7 VXZ2242-04 0 1.5 15 95 5.3 850 15 0.7 0.6 0.7 0.6 0.6 1 2 1 2 165 20 9.2 1,370 20 VXZ2352-06 0.7 0.6 0.7 0.6 0.7 0.6 3 4 3 4

MXS

deep 4H9 3.5 deep +0.030 0 HA GA Cross section AA Cross section BB With auto switch Basic style MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 VWith stroke adjuster MXS12-10AS MXS12-20AS MXS12-30AS MXS12-40AS MXS12-50AS SMXS12A, #1 SMXS12A, #2 SMXS12A, #3(#3+#7) SMXS12B, #1 SMXS12B, #2(#2+#5) SMXS12B, #3(#3+#7) (mm) Model F 35 35 35 50 35 55 65 K J 40 40 40 52 60 85 130 I 10 10 10

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

CG5-S

(mm) Applicable fitting size 6 8 10 4 8 10 12 10 12 12 16 16 KGE10-02 R 1/4 Model 10 -03 R 3/8 KGR04-06 KGE12-03 R 3/8 12 4 -08 -04 R 1/2 -10 KGE16-03 R 3/8 16 KGR06-04 -04 R 1/2 -08 6 Tube Cap KGC -10 -12 KGR08-10 Applicable tubing O.D.

Environment

Nil Without cable 1 1.5 3 3 5 5 8 8* A 10* B 15* C 20* LEPY LEPS LER *1 The standard cable should be used on fixed parts.

Fieldbus system EtherNet/IP compatible SI Unit

mA, 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA, 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 4..6 (Ch1 in) Analogue input range 7 Reserved 0: None 1: 2 value average 2: 4 value average 3: 8 value average 0..1 (Ch0 in) Analogue average filter 2..3 Reserved 4 0: None 1:

7ND9071en

8 10 mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0

VQZ1000/2000/3000

pressure 0.1 MPa Valve specifications Electricity specifications 3 position 0.2 MPa 10 to 50C(1) 10 to 50C(1) Ambient and fluid temperaure Single Double 2 position Max. operating frequency VQC 20 Hz 5 Hz 3 position 10 Hz 3 Hz SQ Pilot valve EXH Individual EXH Lubrication Not required VQ0 Pilot valve manual override Push type/Locking type (Tool required) Option Shock/Vibration resistance(

Solid State Auto Switches

Weight (g) D-A72 D-A73 D-A80 Auto switch model 0.5 m (Nil) 10 10 10 3 m (L) 47 47 47 Lead wire length 5 m (Z) 77 Dimensions (mm) 8 3.2 Indicator light D-A80 without indicator light 15 (14) 7 (6) 4 23 (22) 11.5 (11.7) 3.4 6 (6.2) 3 Most sensitive position 9 (8.5) ( ) values for D-A72 1636 Reed Auto Switch Rail Mounting Style D-A7H/D-A80H Refer to SMC website for the details of the products

HRX-OM-M090

9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018-10-MT 0.8 80 0.7 70 Circulating fluid pressure [MPa] 0.6 60 0.5 Pump head [m] Available area 50 0.4 Outlet60Hz 40 0.3 30 Outlet50Hz 0.2 20 Return port 0.1 10 Available area 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow [L/min] Fig 9.6-3 Pump capacity(HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT) 9.6.4 HRS012--20-T, HRS018

One-touch Fittings Series KQ2

13.7 15.4 14.29 7 20 3.5 10 11 20 12 21 4.4 12 22 35 16 24 36 31 29 38 64 34 43 69 10-32UNF 12.7 2.3 9.3 15.6 1 16 5 32 23 22 11.11 1 8 1 4 1 8 1 4 16 10.4 10 18 3 26 25 24 26 14.29 11.11 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 NPT 3 16 3.5 16.5 11.4 10 19.5 14.29 10-32UNF 2.3 18.1 13.6 12 16.1 7 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area Flow direction symbols on body Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Models Symbol JIS symbol Metric sizes 3.2, 4, 6 3.2, 4 6 6 8 10 12 6, 8, 10 8, 10 4 10, 12 Tubing O.D. 1/8 5/32 3/16, 1/4 5/16 1/4, 5/16 3/8 1/8, 5/32 3/16, 1/4 Inch sizes 5/32 3/16 5/16 3/8 1/2 3/8 1/4 Flow rate l/min (

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Rotary Table/

Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !